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Study on the one-dimensional structure of metals on semiconductor surfaces and buried interfaces

Research Project

Project/Area Number 16360017
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Thin film/Surface and interfacial physical properties
Research InstitutionThe University of Tokyo

Principal Investigator

TAKAHASHI Toshio  The University of Tokyo, Institute for Solid State Physics, Professor, 物性研究所, 教授 (20107395)

Co-Investigator(Kenkyū-buntansha) AKIMOTO Koichi  Nagoya University, School of Engineering, Associate Professor, 大学院工学研究科, 助教授 (40262852)
中谷 信一郎  東京大学, 物性研究所, 助手 (40198122)
Project Period (FY) 2004 – 2006
Project Status Completed (Fiscal Year 2006)
Budget Amount *help
¥14,000,000 (Direct Cost: ¥14,000,000)
Fiscal Year 2006: ¥1,600,000 (Direct Cost: ¥1,600,000)
Fiscal Year 2005: ¥2,600,000 (Direct Cost: ¥2,600,000)
Fiscal Year 2004: ¥9,800,000 (Direct Cost: ¥9,800,000)
Keywordsx-ray diffraction / surface structure / buried interface / 1D structure / semiconductor / silicon / silver / gold / 高指数面 / 金属1次元構造 / X線回析 / STM / 金属一次元構造
Research Abstract

The surface structure of Si(111)-6xl-Ag was investigated using surface X-ray diffraction techniques at the Photon Factory. By analyzing the CTR scattering intensities along 00 rod, the positions of the Ag and reconstructed Si atoms perpendicular to the surface were determined. The results agreed well with the HCC model proposed for a 3xl structure induced by alkali-metals on a Si(111) substrate. The heights of the surface Ag and Si atoms thus determined show that those surface atoms make little perpendicular displacement when the surface structure changes from Si(111)-√<3>x√<3>-Ag to Si(111)-6xl-Ag by the desorption of the Ag atoms. From the GIXD measurement, the in-plane arrangement of the surface Ag atoms was determined. The results indicate that the Ag atoms move large distances laterally at the phase transition between the 6xl and 3xl structures.
Next we studied the structure of Si(111)-5x2-Au using surface X-ray diffraction. The surface structure was analyzed from the measurements of diffraction spots observed by GIXD. The least-squrares fit was done for the three models; Marks and Plass model proposed by transmission electron diffraction (1995) and theoretical models based on the first principles calculations by Erwin (2003) and Riikonen (2005). The results indicate that the most probable model is Erwin's model, but the structural parameters should be modified considerably. Similarly, we studied the Si(111)-5x2-Au structure when the surface is buried with a amorphous silicon layer of about 5 nm thickness. We could clearly observe some diffraction spots from the buried interface. The CTR scattering intensity distributions observed were consistent with those calculated for Erwin's model.

Report

(4 results)
  • 2006 Annual Research Report   Final Research Report Summary
  • 2005 Annual Research Report
  • 2004 Annual Research Report
  • Research Products

    (19 results)

All 2007 2006 2005 2004 Other

All Journal Article (18 results) Book (1 results)

  • [Journal Article] Structural study of Si(111)-6×1-Ag surface using surface x-ray diffraction2007

    • Author(s)
      K.Sumitani, K.Masuzawa, T.Hoshino, R.Yoshida, S.Nakatani, T.Takahashi, H.Tajiri, K.Akimoto, H.Sugiyama, X.Zhang, H.Kawata
    • Journal Title

      Surf. Sci. (印刷中)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Structure of the oxidized 4H-SiC(0001)-3 × 3 surface2007

    • Author(s)
      W.Voegeli, K.Akimoto, T.Urata, S.Nakatani, K.Sumitani, T.Takahashi, Y.Hisada, Y.Mitsuoka, S.Mukainakano, H.Sugiyama, X.Zhang, H.Kawata
    • Journal Title

      Surf. Sci. 601

      Pages: 1048-1053

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Structural study of Si(111)-6 × 1-Ag surface using surface x-ray diffraction2007

    • Author(s)
      K.Sumitani, K.Masuzawa, T.Hoshino, R.Yoshida, S.Nakatani, T.Takahashi, H.Tajiri, K.Akimoto, H.Sugiyama, X.Zhang, H.Kawata
    • Journal Title

      Surf. Sci. (in printing)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Structure of the oxidized 4H-SiC(0001)-3x3 surface2007

    • Author(s)
      W.Voegeli, K.Akimoto, T.Urata, S.Nakatani, K.Sumitani, T.Takahashi, Y.Hisada, Y.Mitsuoka, S.Mukainakano, H.Sugiyama, X.Zhang, H.Kawata
    • Journal Title

      Surf. Sci. 601

      Pages: 1048-1053

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Structural study of Si(111)-6x1-Ag surface using surface x-ray diffraction2007

    • Author(s)
      K.Sumitani, K.Masuzawa, T.Hoshino, R.Yoshida, S.Nakatani, T.Takahashi, H.Tajiri, K.Akimoto, H.Sugiyama, X.Zhang, H.Kawata
    • Journal Title

      Surf. Sci. (印刷中)

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Study of the surface structure of Si(111)-6xl(3xl)-Ag using x-ray crystal truncation rod scattering2006

    • Author(s)
      K..Sumitani, K.Masuzwa, T.Hoshino, S.Naktani, T.Takahashi, H.Tajiri, A.Koichi, H.Sugiyama, X.Zhang, H.Kawata
    • Journal Title

      Appl. Surf. Sci. 252

      Pages: 5288-5291

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Structure of the SiC (0001) 3x3 Reconstruction Studied by Surface X-ray Diffraction2006

    • Author(s)
      W.Voegeli, K..Akimoto, T.Aoyama, K.Sumitani, S.Nakatani, H.Tajiri, T.Takahashi, Y.Hisada, S.Mukainakano, X.Zhang, H.Sugiyama, H.Kawata
    • Journal Title

      Appl. Surf. Sci. 252

      Pages: 5259-5262

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Study of the surface structure of Si(111)-6xl(3xl)-Ag using x-ray crystal truncation rod scattering2006

    • Author(s)
      K.Sumitani, K.Masuzwa, T.Hoshino, S.Naktani, T.Takahashi, H.Tajiri, A.Koichi, H.Sugiyama, X.Zhang, H.Kawata
    • Journal Title

      Appl. Surf. Sci. 252

      Pages: 5288-5291

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Structure of the SiC (0001) 3x3 Reconstruction Studied by Surface X-ray Diffraction2006

    • Author(s)
      W.Voegeli, K.Akimoto, T.Aoyama, K.Sumitani, S.Nakatani, H.Tajiri, T.Takahashi, Y.Hisada, S.Mukainakano, X.Zhang, H.Sugiyama, H.Kawata
    • Journal Title

      Appl. Surf. Sci. 252

      Pages: 5259-5262

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Crystallization process of high-K gate dielectrics studied by surface X-ray diffraction2005

    • Author(s)
      N.Terasawa
    • Journal Title

      Appl.Surf.Sci. (印刷中)

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Surface X-ray diffraction in transmision geometry2004

    • Author(s)
      H.Tajiri, O.Sakatani, T.Takahashi
    • Journal Title

      Appl. Surf. Sci. 234

      Pages: 404-408

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Sample holder assembly covering a wide range of temperatures for surface X-ray diffraction2004

    • Author(s)
      H.Tajiri, K.Sumitani, S.Nakatani, T.Takahashi, K.Akimoto, H.Sugiyama, X.Zhang, H.Kawata
    • Journal Title

      Appl. Surf. Sci. 237

      Pages: 645-648

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Structure of the Si(113) surface studied by surface X-ray diffraction2004

    • Author(s)
      Y.Mizuno, K.Akimoto, T.Aoyama, H.Suzuki, H.Nakahara, A.Ichimiya, K.Sumitani, T.Takahashi, X.W.Zhang, H.Sugiyama, H.Kawata
    • Journal Title

      Appl. Surf. Sci. 237

      Pages: 40-44

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Structure of the Si(113) surface studied by X-ray diffraction2004

    • Author(s)
      Y.Mizuno
    • Journal Title

      Appl.Surf.Sci. 237

      Pages: 40-44

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Sample holder assembly covering a wide range of temperature for surface X-ray diffraction2004

    • Author(s)
      H.Tajiri
    • Journal Title

      Appl.Surf.Sci. 237

      Pages: 645-648

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Study of the surface structure of Si(111)-6x1(3x1)-Ag using x-ray crystal truncation rod scattering

    • Author(s)
      K.Sumitani, K.Masuzwa, T.Hoshino, S.Naktani, T.Takahashi, H.Tajiri, A.Koichi, H.Sugiyama, X.Zhang, H.Kawata
    • Journal Title

      Appl.Surf.Sci. (in press)

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Structure of the SiC(0001) 3x3 Reconstruction Studied by Surface X-ray Diffraction

    • Author(s)
      W.Voegeli, K.Akimoto, T.Aoyama, K.Sumitani, S.Nakatani, H.Tajiri, T.Takahashi, Y.Hisada, S.Mukainakano, X.Zhang, H.Sugiyama, H.Kawata
    • Journal Title

      Appl.Surf.Sci. (in press)

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Hugh Sensitive Imaging of Atomic Arrangement of Ge Clusters Buried in a Si Crystal by X-ray Fluorescence Holography

    • Author(s)
      S.Kusano, S.Nakatani, K.Sumitani, T.Takahashi, Y.Yoda, N.Usami, Y.Shiraki
    • Journal Title

      Jpn.J.Appl.Phys.Part 2 (in press)

    • Related Report
      2005 Annual Research Report
  • [Book] 表面物性工学ハンドブック 第2版 2.2.5 X線回析 (XRD)2007

    • Author(s)
      高橋 敏男 (小間篤等編)
    • Publisher
      丸善
    • Related Report
      2006 Annual Research Report

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Published: 2004-04-01   Modified: 2016-04-21  

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