| Budget Amount *help |
¥11,300,000 (Direct Cost: ¥11,300,000)
Fiscal Year 2006: ¥3,700,000 (Direct Cost: ¥3,700,000)
Fiscal Year 2005: ¥3,400,000 (Direct Cost: ¥3,400,000)
Fiscal Year 2004: ¥4,200,000 (Direct Cost: ¥4,200,000)
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| Research Abstract |
In this research, a new nano/micro fabrication technology by nano plastic forming method was developed, and a new surface technology that develops functional surface by using the nano plastic forming was studied.
(1)A new nano forming device was developed to conduct nano forming test. The device consists of ultra precision stages, a load cell, and a ultra fine imprinting tool (mold). The motion of stages is controlled by a computer, and forming load and position of imprinting can be programmed on the computer. The tool is made of a single crystal diamond, and manufactured by polishing and FIB machining. Several kinds of imprinting tools, i.e. a knife edge tool, a flat tool, a micro structured tool, a nano structured tool, a point tool etc., were developed A tool is imprinted on the work material, and its structure is copied on the material..
(2)The critical depth of hard brittle materials was analyzed with the nano forming device by using a knife edge tool. Ductile/brittle transition was
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studied theoretically based on plasticity theory and fracture mechanics, and effective factors on the critical depth was investigated. Results explained that the critical depth depends on the fracture toughness and yield stress of the work material.
(3)Micro plastic deformation property of single crystal copper was studied. Three kinds of specimen of various crystal orientation was tested by knife edge tool indentation. Cross section of indent grooves were analyzed by EBSD, and distribution of spin vectors around the grooves were calculated. Meso plasticity FEM was developed to simulate nano forming process of single crystal copper.
(4)A new nano fabrication process based on nano forming and plate coating and polishing was developed. It is efficient to manufacture small mechanical parts, micro composite structured surface, and micro structured foil.
(5)Functional surfaces were developed by nano forming technique. Nano structures were fabricated on glass plates, and their optical property and friction property were analyzed. Results indicates surface properties can be controlled by controlling nano forming conditions. Nano forming technique is efficient to develop functional surfaces. Less
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