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Theoretical Analysis and Control of Harmonic Generation Aimed at Applying to Electronics Implementation

Research Project

Project/Area Number 16360068
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Production engineering/Processing studies
Research InstitutionOsaka University

Principal Investigator

OHMURA Etsuji  Osaka University, Graduate School of Engineering, Associate Professor, 工学研究科, 助教授 (90144435)

Co-Investigator(Kenkyū-buntansha) MORI Yusuke  Osaka University, Graduate School of Engineering, Associate Professor, 工学研究科, 助教授 (90252618)
SANO Tomokazu  Osaka University, Graduate School of Engineering, Assistance Professor, 工学研究科, 助手 (30314371)
竹野 祥瑞  三菱電機(株), 生産技術センター, 研究員
Project Period (FY) 2004 – 2006
Project Status Completed (Fiscal Year 2006)
Budget Amount *help
¥8,700,000 (Direct Cost: ¥8,700,000)
Fiscal Year 2006: ¥1,800,000 (Direct Cost: ¥1,800,000)
Fiscal Year 2005: ¥1,800,000 (Direct Cost: ¥1,800,000)
Fiscal Year 2004: ¥5,100,000 (Direct Cost: ¥5,100,000)
Keywordsharmonic generation / wavelength conversion / nonlinear optical crystal / pulse laser / repetitive irradiation / laser absorption / beam quality / electronics implementation / 高周波発生
Research Abstract

The wavelength conversion technology with nonlinear optical crystals is important for laser precision microfabrication. The conventional researches / developments about harmonic generation under repetitive irradiation have been conducted experimentally or empirically. Theoretical studies about them have dealt with single pulse irradiation or steady state under continuous irradiation. Phase matching that is indispensable for wavelength conversion is sensitive to the temperature of crystal, and conversion efficiency falls when its temperature is changed. The temperature of crystal is changed due to laser absorption. Therefore, it is impossible to analyze influence of the temperature change in the crystal on wavelength conversion by the conventional theoretical analysis.
In this research, the non-steady state theoretical analysis considering the influence of laser absorption under repetitive irradiation was performed. First, about second harmonic generation, the governing equations of the … More harmonics generation were derived by considering laser absorption, and a coupling analysis model with the heat conduction equation was constructed. KDP and KTP were supposed as nonlinear optical crystals. Promotion of high efficiency by the high intensity of incident pulse caused by the focusing effect was also analyzed. Based on the constructed model, optimum phase matching temperature was investigated. As a result, it was found that the high conversion efficiency is achieved by tuning phase matching temperature to the maximum temperature reached in the crystal. It was clarified also that the conversion efficiency is affected by the beam divergence angle and the repetition frequency. However, according to the proposed method, it was confirmed by simulations that high conversion efficiency is obtained without receiving influence of them.
Fundamental studies in electronics application, such as measurement of the temperature dependence of the absorption coefficient of silicon, the laser internal processing of silicon single crystal and thermohydrodynamics analysis of laser drilling by considering multiple reflection and evaporation were also performed. Less

Report

(4 results)
  • 2006 Annual Research Report   Final Research Report Summary
  • 2005 Annual Research Report
  • 2004 Annual Research Report
  • Research Products

    (127 results)

All 2007 2006 2005 2004 Other

All Journal Article (126 results) Book (1 results)

  • [Journal Article] 単結晶シリコンの吸収係数温度依存性測定2007

    • Author(s)
      福世文嗣
    • Journal Title

      レーザ加工学会誌 14-1

      Pages: 22-26

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Journal Article] 集光ビーム繰り返し照射下における第二高調波発生の温度分布解析とその高効率化の検討2007

    • Author(s)
      野村和史
    • Journal Title

      レーザ加工学会誌 14-1

      Pages: 27-32

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Journal Article] レーザの多重反射と蒸発を考慮したレーザ穴あけ加工の熱流体解析-第1報,光線追跡を用いたレーザの多重反射シミュレーション-2007

    • Author(s)
      野口 暁
    • Journal Title

      レーザ加工学会誌 14-1

      Pages: 33-38

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Journal Article] レーザの多重反射と蒸発を考慮したレーザ穴あけ加工の熱流体解析-第2報,レーザの多重反射と材料の蒸発を考慮したレーザ穴あけシミュレーション-2007

    • Author(s)
      野口 暁
    • Journal Title

      レーザ加工学会誌 14-2

      Pages: 113-119

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] セラミックス溶射皮膜のレーザによる表面改質2007

    • Author(s)
      植木章太
    • Journal Title

      Proceedings of the 13th Symposium on "Microjoining and Assembly Technology in Electronics"

      Pages: 61-66

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Measurement of Temperature Dependence of Absorption Coefficient of Single Crystal Silicon2007

    • Author(s)
      F.Fukuyo et al.
    • Journal Title

      J.Japan Laser Processing Soc. 14-1

      Pages: 22-26

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Temperature Distribution Analysis of Second Harmonic Generation with Repetitive Irradiation of a Focused beam and Examination of Improvement of High Conversion Efficiency2007

    • Author(s)
      K.Nomura et al.
    • Journal Title

      J.Japan Laser Processing Soc. 14-1

      Pages: 27-32

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Thermohydrodynamics Analysis of Laser Drilling Considering Multiple Reflection of Laser and Evaporation-1st Report, Multiple Reflection Simulation of Laser Using Ray Tracing Technique-2007

    • Author(s)
      S.Noguchi et al.
    • Journal Title

      J.Japan Laser Processing Soc. 14-1

      Pages: 33-38

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Thermohydrodynamics Analysis of Laser Drilling Considering Multiple Reflection of Laser and Evaporation-2nd Report, Laser Drilling Simulation Considering Multiple Reflection of Laser and Evaporation-2007

    • Author(s)
      S.Noguchi et al.
    • Journal Title

      J.Japan Laser Processing Soc. 14-2

      Pages: 113-119

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Thermal Stress Analysis on Laser Scribing of Glass2007

    • Author(s)
      K.Yamamoto et al.
    • Journal Title

      Proc.ICALEO2004 (CD-ROM)

      Pages: 1-7

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Surface Modification of Thermal Sprayed Ceramics Coatings with Laser Irradiation2007

    • Author(s)
      S.Ueki et al.
    • Journal Title

      Proc. 13th Symp. on "Microjoining and Assembly Technology in Electronics"

      Pages: 61-66

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] レーザの多重反射と蒸発を考慮したレーザ穴あけ加工の熱流体解析-第2報,レーザの多重反射と材料の蒸発を考慮したレーザ穴あけシミュレーション-2007

    • Author(s)
      野口 暁
    • Journal Title

      レーザ加工学会誌 14-2(印刷中)

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Analysis of Second Harmonic Pulse Distortion Induced by Repetitive Irradiation2006

    • Author(s)
      Kazufumi Nomura
    • Journal Title

      Materials Science Forum 512

      Pages: 343-348

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary 2005 Annual Research Report
  • [Journal Article] Femtosecond Laser Synthesis of the High-Pressure Phase of Iron2006

    • Author(s)
      Tomokazu Sano
    • Journal Title

      Materials Science Forum 512

      Pages: 349-354

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Journal Article] フェムト秒レーザによるタングステン表面のマイクロスパイクアレイ生成機構の解析2006

    • Author(s)
      野村泰光
    • Journal Title

      精密工学会誌 72-5

      Pages: 668-673

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Journal Article] Molecular Dynamics Analysis of Elementary Process of Coating by a High-Temperature, High-Speed Droplet (Flattening Process and Atomic Behavior of a Droplet)2006

    • Author(s)
      Jun Shimizu
    • Journal Title

      JSME International Journal C 49-2

      Pages: 505-511

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Journal Article] Internal Modified-layer Formation Mechanism into Silicon with Nanosecond Laser2006

    • Author(s)
      Etsuji Ohmura
    • Journal Title

      Journal of Achievements in Materials and Manufacturing Engineering 17

      Pages: 381-384

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Journal Article] ガラスのレーザスクライブにおける三次元熱応力解析2006

    • Author(s)
      山本幸司
    • Journal Title

      日本機械学会論文集,C編 72-724

      Pages: 3927-3933

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Journal Article] Thermo-Elastic-Plastic Analysis on Internal Processing Phenomena of Single-Crystal Silicon by Nanosecond Laser2006

    • Author(s)
      Takeshi Monodane
    • Journal Title

      Journal of Laser Micro/Nanoengineering 1-3

      Pages: 231-235

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Journal Article] Theoretical Analysis of second harmonic generation considering laser absorption with repetitive irradiation of focused beam2006

    • Author(s)
      Kazufumi Nomura
    • Journal Title

      Journal of Laser Micro/Nanoengineering 1-3

      Pages: 247-252

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Journal Article] Analysis of Second Harmonic Generation Considering Laser Absorption with Repetitive Irradiation2006

    • Author(s)
      Kazufumi Nomura
    • Journal Title

      Proceedings of SPIE 6259

      Pages: 183-191

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Analysis of Microspike Array Formation by Diffraction of Femtosecond Laser through Aperture2006

    • Author(s)
      Etsuji Ohmura
    • Journal Title

      Proceedings of 2006 International Symposium on Flexible Automation (2006ISFA)

      Pages: 280-287

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Journal Article] Analysis of second harmonic generation with repetitive irradiation of focused beam2006

    • Author(s)
      Kazufumi Nomura
    • Journal Title

      Proceedings of 2006 International Symposium on Flexible Automation (2006ISFA)

      Pages: 288-294

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Journal Article] Finite Element Analysis on Laser Drilling of Printed Circuit Board Considering Evaporation of Resin2006

    • Author(s)
      Satoru Noguchi
    • Journal Title

      Proceedings of 2006 International Symposium on Flexible Automation (2006ISFA)

      Pages: 303-310

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Journal Article] Analysis on Resin Removal in Laser Drilling of Printed Circuit Board Considering Diffraction in Image Formation Optical System2006

    • Author(s)
      Satoru Noguchi
    • Journal Title

      Online Proceedings of the 4th International Congress on Laser Advanced Materials Processing (LAMP2006)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Journal Article] Analysis of second harmonic generation considering laser absorption with repetitive irradiation of focused beam2006

    • Author(s)
      Kazufumi Nomura
    • Journal Title

      Online Proceedings of the 4th International Congress on Laser Advanced Materials Processing (LAMP2006)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Journal Article] The Mechanism of Semiconductor Wafer Dicing by Stealth Dicing Technology2006

    • Author(s)
      Kenshi Fukumitsu
    • Journal Title

      Online Proceedings of the 4th International Congress on Laser Advanced Materials Processing (LAMP2006)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Journal Article] Thermo-Elastic-Plastic Analysis on Internal Processing Phenomena of Single-Crystal Silicon by Nanosecond Laser2006

    • Author(s)
      Takeshi Monodane
    • Journal Title

      Online Proceedings of the 4th International Congress on Laser Advanced Materials Processing (LAMP2006)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Journal Article] Advanced dicing technology for semiconductor wafer -Stealth dicing-2006

    • Author(s)
      Masayoshi Kumagai
    • Journal Title

      Proceedings of 15th International Symposium on Semiconductor Manufacturing (ISSM2006)

      Pages: 215-218

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Analysis of Modified Layer Formation into Silicon Wafer by Permeable Nanosecond Laser2006

    • Author(s)
      Etsuji Ohmura
    • Journal Title

      Proceedings of ICALEO2006 (CD-ROM)

      Pages: 24-31

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] アルミナ溶射皮膜のCO_2レーザによる改質2006

    • Author(s)
      植木章太
    • Journal Title

      Proceedings of the 12th Symposium on "Microjoining and Assembly Technology in Electronics "

      Pages: 511-516

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] ステルスダイシングにおける内部改質層形成機構の解析2006

    • Author(s)
      大村悦二
    • Journal Title

      第66回レーザ加工学会講演会講演論文集

      Pages: 19-22

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] 機械工学年鑑(2005年) 加工学・加工機器,16・2エネルギービーム加工2006

    • Author(s)
      大村悦二
    • Journal Title

      日本機械学会誌 109-1053

      Pages: 670-670

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] レーザアブレーションによる材料への穴あけ加エシミュレーション2006

    • Author(s)
      大村悦二
    • Journal Title

      エレクトロニクス実装学会誌 9-5

      Pages: 399-404

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] レーザ加工における回折を考慮した表面生成機講の解析2006

    • Author(s)
      大村悦二
    • Journal Title

      レーザ加工学会誌 13-3

      Pages: 177-182

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Journal Article] レーザによる熱加工2006

    • Author(s)
      大村悦二
    • Journal Title

      伝熱 45-193

      Pages: 43-48

    • NAID

      10018342036

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Journal Article] LAMP2006参加報告2006

    • Author(s)
      宮本 勇
    • Journal Title

      レーザ加工学会誌 13-4

      Pages: 275-290

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Analysis of Second Harmonic Pulse Distortion Induced by Repetitive Irradiation2006

    • Author(s)
      K.Nomura et al.
    • Journal Title

      Mater.Sci.Forum 512

      Pages: 343-348

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Femtosecond Laser Synthesis of the High-Pressure Phase of Iron2006

    • Author(s)
      T.Sano et al.
    • Journal Title

      Mater.Sci.Forum 512

      Pages: 349-354

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Molecular Dynamics Analysis of Elementary Process of Coating by a High-Temperature, High-Speed Droplet (Flattening Process and Atomic Behavior of a Droplet)2006

    • Author(s)
      J.Shimizu et al.
    • Journal Title

      JSME Int.J., C 49-2

      Pages: 505-511

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Internal Modified-layer Formation Mechanism into Silicon with Nanosecond Laser2006

    • Author(s)
      E.Ohmura et al.
    • Journal Title

      J.Achiev. in Mater.Manuf.Eng. 17

      Pages: 381-384

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Three Dimensional Thermal Stress Analysis on Laser Scribing of Glass2006

    • Author(s)
      K.Yamamoto et al.
    • Journal Title

      Tran.Japan Soc.Mech.Eng., Ser.C 72-724

      Pages: 3927-3933

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Theoretical Analysis of second harmonic generation considering laser absorption with repetitive irradiation of focused beam2006

    • Author(s)
      K.Nomura et al.
    • Journal Title

      J.Laser Micro/Nanoengineering 1-3

      Pages: 247-252

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Analysis of Second Harmonic Generation Considering Laser Absorption with Repetitive Irradiation2006

    • Author(s)
      K.Nomura et al.
    • Journal Title

      Proc.SPIE Vol.6259

      Pages: 183-191

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Analysis of Microspike Array Formation by Diffraction of Femtosecond Laser through Aperture2006

    • Author(s)
      E.Ohmura et al.
    • Journal Title

      Proc. 2006 Int.Symp. on Flexible Automation (2006ISFA)

      Pages: 280-287

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Analysis of second harmonic generation with repetitive irradiation of focused beam2006

    • Author(s)
      K.Nomura et al.
    • Journal Title

      Proc. 2006 Int.Symp. on Flexible Automation (2006ISFA)

      Pages: 288-294

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Analysis of Modified Layer Formation into Silicon Wafer by Permeable Nanosecond Laser2006

    • Author(s)
      E.Ohmura et al.
    • Journal Title

      Proc.ICALEO2006 (CD-ROM)

      Pages: 24-31

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Advanced dicing technology for semiconductor wafer-Stealth dicing-2006

    • Author(s)
      M.Kumagai et al.
    • Journal Title

      Proc. 15th Int.Symp. on Semiconductor Manuf. (ISSM2006)

      Pages: 215-218

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Modification of Al_2O_3 Thermal Sprayed Coatings by Irradiating CO_2 Laser2006

    • Author(s)
      S.Ueki et al.
    • Journal Title

      Proc. 12th Symp. on "Microjoining and Assembly Technology in Electronics"

      Pages: 511-516

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Analysis of Internal Modified-Layer Formation Mechanism in Stealth Dicing2006

    • Author(s)
      E.Ohmura et al.
    • Journal Title

      Proc. 67th Laser Mater.Processing Conf.

      Pages: 19-22

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Computer Simulation of Laser Drilling with Ablation2006

    • Author(s)
      E.Ohmura
    • Journal Title

      J.Japan Inst.Electronics Packaging 9-5

      Pages: 399-404

    • NAID

      110004799339

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Analysis of Surface Generation Mechanism Considering Diffraction of Laser Beam2006

    • Author(s)
      E.Ohmura
    • Journal Title

      J.Japan Laser Processing Soc. 13-3

      Pages: 177-182

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Thermal Processing with Laser2006

    • Author(s)
      E.Ohmura
    • Journal Title

      J.Heat Transfer Soc. Japan 45-193

      Pages: 43-48

    • NAID

      10018342036

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Report on LAMP20062006

    • Author(s)
      I.Miyamoto et al.
    • Journal Title

      J.Japan Laser Processing Soc. 13-4

      Pages: 275-290

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Analysis of Second Harmonic Generation Considering Laser Absorption with Repetitive Irradiation2006

    • Author(s)
      Etsuji Ohmura
    • Journal Title

      Proceedings of SPIE Vol.6259

      Pages: 183-191

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Advanced dicing technology for semiconductor wafer - Stealth dicing-2006

    • Author(s)
      Masayoshi Kumagai
    • Journal Title

      Proceedings of 15th International Symposium on Semiconductor Manufacturing (ISSM2006)

      Pages: 215-218

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Analysis of Modified Layer Formation into Silicon Wafer by Permeable Nanosecond Laser2006

    • Author(s)
      Etsuji Ohmura
    • Journal Title

      Proceedings of ICALEO2006, Laser Microfabrication Conference

      Pages: 24-31

    • Related Report
      2006 Annual Research Report
  • [Journal Article] レーザアブレーションによる材料への穴あけ加工シミュレーション2006

    • Author(s)
      大村悦二
    • Journal Title

      エレクトロニクス実装学会誌 9-5

      Pages: 399-404

    • Related Report
      2006 Annual Research Report
  • [Journal Article] フェムト秒レーザによるタングステン表面のマイクロスパイクアレイ生成機構の解析2006

    • Author(s)
      野村泰光
    • Journal Title

      精密工学会誌 72(掲載決定)

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Analysis of Second Harmonic Generation Considering Laser Absorption with Repetitive Irradiation2006

    • Author(s)
      Kazufumi Nomura
    • Journal Title

      Proceedings of ICONO/LAT 2005 (掲載予定)

    • Related Report
      2005 Annual Research Report
  • [Journal Article] アルミナ溶射皮膜のCO2レーザによる改質2006

    • Author(s)
      植木章太
    • Journal Title

      Proceedings of Mate 2006

      Pages: 511-516

    • Related Report
      2005 Annual Research Report
  • [Journal Article] 高温高速液滴による皮膜形成素過程の分子動力学解析-液滴の偏平過程と原子挙動-2005

    • Author(s)
      清水 淳
    • Journal Title

      日本機械学会論文集,C編 71-701

      Pages: 298-303

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Femtosecond Laser Driven Shock Quenching of the Nanocrystalline High-Pressure Phase of Iron2005

    • Author(s)
      Tomokazu Sano
    • Journal Title

      Materials Science Forum 475-479

      Pages: 3475-3478

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary 2004 Annual Research Report
  • [Journal Article] フェムト秒レーザダブルパルスによるクロム薄膜アブレーション2005

    • Author(s)
      大村悦二
    • Journal Title

      精密工学会誌 71-2

      Pages: 284-289

    • NAID

      110001824129

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary 2004 Annual Research Report
  • [Journal Article] Analytical Study on Metal Microstructures Using Femtosecond Laser2005

    • Author(s)
      Tomohiro Okamoto
    • Journal Title

      Applied Physics A 81

      Pages: 639-643

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary 2005 Annual Research Report
  • [Journal Article] Femtosecond Laser Fabrication of Microspike-Arrays on Tungsten Surface2005

    • Author(s)
      Tomokazu Sano
    • Journal Title

      Applied Surface Science 247

      Pages: 340-346

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary 2005 Annual Research Report
  • [Journal Article] Femtosecond Laser Driven Shock Quenching of the High-PressurePhase of Iron2005

    • Author(s)
      Tomokazu Sano
    • Journal Title

      Applied Surface Science 247

      Pages: 571-576

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] ガラスのレーザスクライブにおける熱応力解析2005

    • Author(s)
      山本幸司
    • Journal Title

      精密工学会誌 71-9

      Pages: 1157-1162

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary 2005 Annual Research Report
  • [Journal Article] 結像光学系の回折を考慮したプリント基板レーザ穴あけの樹脂除去解析2005

    • Author(s)
      野口 暁
    • Journal Title

      精密工学会誌 71-10

      Pages: 1296-1302

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Analysis of Microspike Array Formation on Tungsten Surface with Femtosecond Laser2005

    • Author(s)
      Etsuji Ohmura
    • Journal Title

      Proceedings of ICALEO2005 (CD-ROM)

      Pages: 232-238

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary 2005 Annual Research Report
  • [Journal Article] フェムト秒レーザーによる鉄の非平衡相合成2005

    • Author(s)
      佐野智一
    • Journal Title

      Proceedings of the 11th Symposium on "Microjoining and Assembly Technology in Electronics "

      Pages: 471-476

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] ガラスのレーザスクライブ2005

    • Author(s)
      山本幸司
    • Journal Title

      レーザ協会誌 30-3,4

      Pages: 7-12

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Molecular Dynamics Analysis on Elementary Process of Coating by High-Temperature and High-Speed Droplet (Flattening Process and Atomic Behavior of Droplet)2005

    • Author(s)
      J.Shimizu et al.
    • Journal Title

      Tran.Japan Soc.Mech.Eng., Ser.C 71-701

      Pages: 298-303

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Femtosecond Laser Driven Shock Quenching of the Nanocrystalline High-Pressure Phase of Iron2005

    • Author(s)
      T.Sano et al.
    • Journal Title

      Mater.Sci.Forum 475-479

      Pages: 3475-3478

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Chromium Thin Film Ablation with Double Pulses of Femtosecond Laser2005

    • Author(s)
      E.Ohmura et al.
    • Journal Title

      J.Japan Soc., Prec.Eng. 71-2

      Pages: 284-289

    • NAID

      110004056110

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Analytical Study on Metal Microstructures Using Femtosecond Laser2005

    • Author(s)
      T.Okamoto et al.
    • Journal Title

      Appl.Phys.A 81

      Pages: 639-643

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Femtosecond Laser Fabrication of Microspike-Arrays on Tungsten Surface2005

    • Author(s)
      T.Sano et al.
    • Journal Title

      Appl.Surface Sci. 247

      Pages: 340-346

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Femtosecond Laser Driven Shock Quenching of the High-Pressure Phase of Iron2005

    • Author(s)
      T.Sano et al.
    • Journal Title

      Appl.Surface Sci. 247

      Pages: 571-576

    • NAID

      110003827716

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Thermal Stress Analysis on Laser Scribing of Glass2005

    • Author(s)
      K.Yamamoto et al.
    • Journal Title

      J.Japan Soc., Prec.Eng. 71-9

      Pages: 1157-1162

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Analysis on Resin Removal in Laser Drilling of Printed Circuit Board Considering Diffraction in Image Formation Optical System2005

    • Author(s)
      S.Noguchi et al.
    • Journal Title

      J.Japan Soc., Prec.Eng. 71-10

      Pages: 1296-1302

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Analysis of Formation of Microspike-Arrays on Tungsten Surface by Femtosecond Laser Irradiation2005

    • Author(s)
      Y.Nomura et al.
    • Journal Title

      J.Japan Soc., Prec.Eng. 72-5

      Pages: 668-673

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Thermo-Elastic-Plastic Analysis on Internal Processing Phenomena of Single-Crystal Silicon by Nanosecond Laser2005

    • Author(s)
      T.Monodane et al.
    • Journal Title

      J.Laser Micro/Nanoengineering 1-3

      Pages: 231-235

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Analysis of Microspike Array Formation on Tungsten Surface with Femtosecond Laser2005

    • Author(s)
      E.Ohmura et al.
    • Journal Title

      Proc.ICALEO2005 (CD-ROM)

      Pages: 232-238

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Nonequilibrium High-Pressure Phase Synthesis of Iron Using Femtosecond Laser2005

    • Author(s)
      T.Sano et al.
    • Journal Title

      Proc. 11th Symp. on "Microjoining and Assembly Technology in Electronics"

      Pages: 471-476

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Laser Scribing of Glass2005

    • Author(s)
      K.Yamamoto et al.
    • Journal Title

      J.Japan Soc.Laser Tech. 30-3, 4

      Pages: 7-12

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Femtosecond Laser Driven shock Quenching of the High-Pressure Phase of Iron2005

    • Author(s)
      Tomokazu Sano
    • Journal Title

      Applied Surface Science 247

      Pages: 571-576

    • NAID

      110003827716

    • Related Report
      2005 Annual Research Report
  • [Journal Article] 結像光学系の回折を考慮したプリント基板レーザ穴あけの樹脂除去解析2005

    • Author(s)
      野口暁
    • Journal Title

      精密工学会誌 71-10

      Pages: 1296-1302

    • Related Report
      2005 Annual Research Report
  • [Journal Article] ガラスのレーザスクライブ2005

    • Author(s)
      山本幸司
    • Journal Title

      レーザ協会誌 30-3

      Pages: 7-12

    • Related Report
      2005 Annual Research Report
  • [Journal Article] 高温高速液滴による皮膜形成素過程の分子動力学解析-液滴の偏平過程と原子挙動-2005

    • Author(s)
      清水 淳
    • Journal Title

      日本機械学会論文集,C編 71(掲載予定)

    • Related Report
      2004 Annual Research Report
  • [Journal Article] フェムト秒レーザー駆動衝撃による鉄の高圧相凍結2004

    • Author(s)
      佐野智一
    • Journal Title

      プラズマ・核融合学会誌 80-6

      Pages: 482-485

    • NAID

      110003827716

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary 2004 Annual Research Report
  • [Journal Article] KH_2PO_4結晶により発生する第二高調波のビームプロファイル解析2004

    • Author(s)
      大村悦二
    • Journal Title

      日本機械学会論文集,C編 70-697

      Pages: 2737-2743

    • NAID

      110006264074

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary 2004 Annual Research Report
  • [Journal Article] 二軸性正結晶KTiOPO_4結晶により発生する第二高調波のビームプロファイル解析2004

    • Author(s)
      大村悦二
    • Journal Title

      日本機械学会論文集,C編 70-697

      Pages: 2744-2752

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary 2004 Annual Research Report
  • [Journal Article] 第二高調波発生に及ぼすパルス波形の影響2004

    • Author(s)
      大村悦二
    • Journal Title

      日本機械学会論文集,C編 70-697

      Pages: 2753-2759

    • NAID

      110006264076

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary 2004 Annual Research Report
  • [Journal Article] 繰り返し照射下における第二高調波パルスのひずみ解析2004

    • Author(s)
      野村和史
    • Journal Title

      レーザ加工学会誌 11-3

      Pages: 167-174

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary 2004 Annual Research Report
  • [Journal Article] Distortion Analysis of Beam Profile and Pulse Shape of Second Harmonic Due to Repetitive Irradiation of Picosecond Pulses2004

    • Author(s)
      Etsuji Ohmura
    • Journal Title

      Proceedings of SPIE 5456

      Pages: 19-27

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Molecular Dynamics Simulation on Flattening Process of a High-Temperature and High-Speed Droplet2004

    • Author(s)
      Jun Shimizu
    • Journal Title

      Proceedings of ITSC2004 (CD-ROM)

      Pages: 7-12

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary 2004 Annual Research Report
  • [Journal Article] Femtosecond Laser Driven Shock Quenching of the High -Pressure Phase of Iron2004

    • Author(s)
      Tomokazu Sano
    • Journal Title

      Proceedings of SPIE 5662

      Pages: 678-683

    • NAID

      110003827716

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Fabrication of Microspike-Arrays on Tungsten Surface Using Femtosecond Laser2004

    • Author(s)
      Tomokazu Sano
    • Journal Title

      Proceedings of SPIE 5662

      Pages: 760-765

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Chromium Thin Film Ablation with Double Pulse of Femtosecond Laser2004

    • Author(s)
      Etsuji Ohmura
    • Journal Title

      Proceedings of ICALEO2004 (CD-ROM)

      Pages: 1-7

    • NAID

      110004056110

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Thermal Stress Analysis on Laser Scribing of Glass2004

    • Author(s)
      Koji Yamamoto
    • Journal Title

      Proceedings of ICALEO2004 (CD-ROM)

      Pages: 1-7

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary 2004 Annual Research Report
  • [Journal Article] 伝熱工学シミュレーションの基礎と応用2004

    • Author(s)
      大村悦二
    • Journal Title

      軽金属 54-6

      Pages: 225-235

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary 2004 Annual Research Report
  • [Journal Article] レーザ加工のための熱伝導解析2004

    • Author(s)
      大村悦二
    • Journal Title

      レーザ加工学会誌 11-2

      Pages: 103-110

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary 2004 Annual Research Report
  • [Journal Article] Femtosecond-Laser-Driven Shock Quenching of the High-Pressure Phase of Iron2004

    • Author(s)
      T.Sano et al.
    • Journal Title

      J.Plasma Fusion Res. 80-6

      Pages: 482-485

    • NAID

      110003827716

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Beam Profile Analysis of Second Harmonic Generated by KH_2PO_42004

    • Author(s)
      E.Ohmura et al.
    • Journal Title

      Tran.Japan Soc.Mech.Eng., Ser.C 90-697

      Pages: 2737-2743

    • NAID

      110006264074

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Beam Profile Analysis of Second Harmonic Generated by KTiOPO_42004

    • Author(s)
      E.Ohmura et al.
    • Journal Title

      Tran.Japan Soc.Mech.Eng., Ser.C 70-697

      Pages: 2744-2752

    • NAID

      110006264075

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Influence of Temporal Pulse Shape on Second Harmonic Generation2004

    • Author(s)
      E.Ohmura et al.
    • Journal Title

      Tran.Japan Soc.Mech.Eng., Ser.C 70-697

      Pages: 2753-2759

    • NAID

      110006264076

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Analysis of Second Harmonic Generation and Output Pulse Distortion Considering Laser Absorption with Repetitive Irradiation2004

    • Author(s)
      K.Nomura et al.
    • Journal Title

      J.Japan Laser Processing Soc. 11-3

      Pages: 167-174

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Distortion Analysis of Beam Profile and Pulse Shape of Second Harmonic Due to Repetitive Irradiation of Picosecond Pulses2004

    • Author(s)
      E.Ohmura et al.
    • Journal Title

      Proc.SPIE Vol.5456

      Pages: 19-27

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Molecular Dynamics Simulation on Flattening Process of a High-Temperature and High-Speed Droplet2004

    • Author(s)
      J.Shimizu et al.
    • Journal Title

      Proc.ITSC2004 (CD-ROM)

      Pages: 7-12

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Femtosecond Laser Driven Shock Quenching of the High-Pressure Phase of Iron2004

    • Author(s)
      T.Sano et al.
    • Journal Title

      Proc.SPIE Vol.5662

      Pages: 678-683

    • NAID

      110003827716

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Fabrication of Microspike-Arrays on Tungsten Surface Using Femtosecond Laser2004

    • Author(s)
      T.Sano et al.
    • Journal Title

      Proc.SPIE Vol.5662

      Pages: 760-765

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Chromium Thin Film Ablation with Double Pulse of Femtosecond Laser2004

    • Author(s)
      E.Ohmura et al.
    • Journal Title

      Proc.ICALEO2004 (CD-ROM)

      Pages: 1-7

    • NAID

      110004056110

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Fundamentals of Heat Transfer Simulation and Their Applications2004

    • Author(s)
      E.Ohmura
    • Journal Title

      J.Japan Inst.Light Metals 54-6

      Pages: 225-235

    • NAID

      10013136630

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Heat Conduction Analysis for Laser Materials Processing2004

    • Author(s)
      E.Ohmura
    • Journal Title

      J.Japan Laser Processing Soc. 11-2

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Analytical Study on Metal Microstructures Using Femtosecond Laser2004

    • Author(s)
      Tomohiro Okamoto
    • Journal Title

      Applied Physics A (Online Journal)

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Distortion Analysis of Beam Profile and Pulse Shape of Second Harmonic Due to Repetitive Irradiation of Picosecond Pulses2004

    • Author(s)
      Etsuji Ohmura
    • Journal Title

      Photonics Europe, Proceedings of SPIE 5456

      Pages: 19-27

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Femtosecond Laser Driven Shock Quenching of the High-Pressure Phase of Iron2004

    • Author(s)
      Tomokazu Sano
    • Journal Title

      Symp.Laser Precision Microfabrication (LPM2004), Proc.of SPIE 5662

      Pages: 678-683

    • NAID

      110003827716

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Fabrication of Microspike-Arrays on Tungsten Surface Using Femtosecond Laser2004

    • Author(s)
      Tomokazu Sano
    • Journal Title

      Symp.Laser Precision Microfabrication (LPM2004), Proc.of SPIE 5662

      Pages: 760-765

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Chromium Thin Film Ablartion with Double Pulse of Femtosecond Laser2004

    • Author(s)
      Etsuji Ohmura
    • Journal Title

      Proceedings of ICALEO2004 (CD-ROM)

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Advanced dicing technology for semiconductor wafer -Stealth Dicing-

    • Author(s)
      Masayoshi Kumagai
    • Journal Title

      IEEE Transactions on Semiconductor Manufacturing (印刷中)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Advanced dicing technology for semiconductor wafer-Stealth Dicing-

    • Author(s)
      M.Kumagai et al.
    • Journal Title

      IEEE Trans. on Semiconductor Manuf. (to be published)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Finite Element Analysis on Laser Drilling of Printed Circuit Board Considering Evaporation of Resin

    • Author(s)
      S.Noguchi et al.
    • Journal Title

      Proc. 2006 Int.Symp. on Flexible Automation (2006ISFA)

      Pages: 303-310

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Analysis on Resin Removal in Laser Drilling of Printed Circuit Board Considering Diffraction in Image Formation Optical System

    • Author(s)
      S.Noguchi et al.
    • Journal Title

      Online Proc. 4th Int.Cong. on Laser Advanced Mater.Processing (LAMP2006)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Analysis of second harmonic generation considering laser absorption with repetitive irradiation of focused beam

    • Author(s)
      K.Nomura et al.
    • Journal Title

      Online Proc. 4th Int.Cong. on Laser Advanced Mater.Processing (LAMP2006)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] The Mechanism of Semiconductor Wafer Dicing by Stealth Dicing Technology

    • Author(s)
      K.Fukumitsu et al.
    • Journal Title

      Online Proc. 4th Int.Cong. on Laser Advanced Mater.Processing (LAMP2006)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Thermo-Elastic-Plastic Analysis on Internal Processing Phenomena of Single-Crystal Silicon by Nanosecond Laser

    • Author(s)
      T.Monodane et al.
    • Journal Title

      Online Proc. 4th Int.Cong. on Laser Advanced Mater.Processing (LAMP2006)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Book] 光技術動向調査報告書2007

    • Author(s)
      大村悦二
    • Publisher
      光産業技術振興協会
    • Related Report
      2006 Annual Research Report

URL: 

Published: 2004-04-01   Modified: 2016-04-21  

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