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Development of High Precision Profiler

Research Project

Project/Area Number 16360073
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Production engineering/Processing studies
Research InstitutionHigh Energy Accelerator Research Organization (KEK)

Principal Investigator

HIGASHI Yasuo  High Energy Accelerator Organization, Assistant professor, 機械工学センター, 助教授 (70208742)

Co-Investigator(Kenkyū-buntansha) UENO Kenji  High Energy Accelerator Organization, Assistant Professor, 機械工学センター, 教授 (40370069)
KUME Tatsuya  High Energy Accelerator Organization, Assistant Engineer, 機械工学センター, 助手 (40353362)
ENAMI Kazuhiro  High Energy Accelerator Organization, Assistant Engineer, 機械工学センター, 助手 (00370073)
ENDO Katuyoshi  Graduate of Osaka University, Assistant Professor, 大学院・工学研究科, 教授 (90152008)
YAMAUCHI Kazuto  Graduate of Osaka University, Professor, 大学院・工学研究科, 教授 (10174575)
森 勇蔵  大阪大学, 大学院・工学研究科, 客員教授 (00029125)
山村 和也  大阪大学, 大学院・工学研究科, 助教授 (60240074)
佐野 恭久  大阪大学, 大学院・工学研究科, 助教授 (40252598)
Project Period (FY) 2004 – 2005
Project Status Completed (Fiscal Year 2005)
Budget Amount *help
¥14,200,000 (Direct Cost: ¥14,200,000)
Fiscal Year 2005: ¥4,200,000 (Direct Cost: ¥4,200,000)
Fiscal Year 2004: ¥10,000,000 (Direct Cost: ¥10,000,000)
KeywordsSynchrotron radiation optics / EUV / surface figuring / slope error / normal vector / goniometers / asymmetric aspheric figure / 放射光 / 集効用ミラー / 非球面形状 / 法線ベクトル計測 / 非基準面 / 大型ミラー / X線光学素子 / 非球面ミラー / 法線ベクトル測定 / 基準面
Research Abstract

A new ultra-precision profiler has been developed in order to measure such as asymmetric and aspheric profiles. In the present study, the normal vectors at each points on the surface are determined by the reflected light beam goes back exactly on the same path as the incident beam. The surface gradients at each point are calculated from the normal vector and the surface profile is obtained by integrating the gradient. The measuring instrument was designed according to the above principle of the measuring method. In the design, four ultra-precision goniometers were applied to the adjustment of the light axis for the normal vector measurement. The angle positioning resolution and accuracy of each goniometer are respectively 0.018μrad and 0.2μrad. In the measuring instrument, the most important item is the measuring accuracy of the normal vectors by the goniometers. Therefore, the rotating angle positioning errors were measured and calibrated. A SiC flat mirror 25.4mm in diameter and an elliptical profile mirror for nanometer hard X-ray focusing were measured. and compared to the measured profile using a Zygo Mark IVxp phase-measuring interferometer. The absolute measurement accuracy of approximately 5 nm (peak-to-valley) was achieved. Then the measurement of a spherical shape and 460mm, 1m long plane mirrors were demonstrated.

Report

(3 results)
  • 2005 Annual Research Report   Final Research Report Summary
  • 2004 Annual Research Report
  • Research Products

    (16 results)

All 2006 2005 2004

All Journal Article (16 results)

  • [Journal Article] Surface Gradient Integrated Profiler for X-ray and EUV Optics -Calibration of the rotational angle error of the rotary encoders-2006

    • Author(s)
      Yasuo Higashi, Yuichi Takaie, Katsuyoshi Endo, Tatsuya Kume, Kazuhiro Enami, Kazuto Yamauchi, Kazuya Yamamura, Yasuhisa Sano, Kenii Ueno, Yuzo mori
    • Journal Title

      SR12006, Proc. of the Ninth International Conference on Synchrotron Radiation Instrumentation, May28-June2, 2006, DAEGU, EXCO, KOREA (In printing)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Surface Gradient Integrated Profiler for X-ray and EUV Optics2006

    • Author(s)
      Yasuo Higashi, Yuichi Takaie, Katsuyoshi Endo, Tatsuya Kume, Kazuhiro Enami, Kazuto Yamauchi, Kazuya Yamamura, Yasuhisa Sano, Kenii Ueno, Yuzo mori
    • Journal Title

      SR12006, Proc. of the Ninth International Conference on Synchrotron Radiation Instrumentation, May28-June2, 2006, DAEGU, EXCO, KOREA (In printing)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] シンクロトロン放射光用ミラーのための超精密非球面形状測定装置の開発2006

    • Author(s)
      森勇蔵, 遠藤勝義, 宮脇崇, 瀬戸口大輔, 鷹家優一, 東保男, 久米達哉, 江並和宏
    • Journal Title

      2006年精密工学会春季大会学術講演会講演論文集

    • NAID

      130005027107

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Surface Gradient Integrated Profiler for X-ray and EUV Optics-Calibration of the rotational angle error of the rotary encoders-2006

    • Author(s)
      Y.Higashi, Y.Takaie, K.Endo, T.Kume, K.Enami, K.Yamauchi, K.Yamamura, K.Ueno, Y.Mori
    • Journal Title

      SR12006, Proc.of the Ninth International Conference on Synchrotron Radiation Instrumentation (May28-June2, 2006, DAEGU, EXCO, KOREA)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Surface Gradient Integrated Profiler for X-ray and EUV Optics2006

    • Author(s)
      Y.Higashi, Y.Takaie, K.Endo, T.Kume, K.Enami, K.Yamauchi, K.Yamamura, K.Ueno, Y.Mori
    • Journal Title

      SR12006, Proc.of the Ninth International Conference on Synchrotron Radiation Instrumentation (May28-June2, 2006, DAEGU, EXCO, KOREA)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] A New Designed Ultra-high Precision Profiler2006

    • Author(s)
      Y.HIGASHI^a, Y.TAKAIE^b, K.ENDO^b, T.KUME^a, K.ENAMI^a, K.YAMAUCHI^c, K.YAMAMURA^c, H.SANO^c, K.UENO^a, Y.MORI^c
    • Journal Title

      Proc of SPIE : Advances in Mirror Technology for X-ray, EUV Lithography, laser, and Other Applications, 3 August 2005, Sandiego, CA, USA Vol.# 5921(In printing)

    • Related Report
      2005 Annual Research Report
  • [Journal Article] A New Designed Ultra-high Precision Profiler - Study on Slope Error Measurement of a Mandrel for Wolter type-I mirror Fabrication -2006

    • Author(s)
      Yasuo.HIGASHI^<*a>.Yuichi.TAKAIE^b, Katsuyoshi.ENDO^b, Tatsuya.KUME^a, Kazuhiro.ENAMI^a, Kazuto.YAMAUCHI^c, Kazuya.YAMAMURA^c, Toshihisa.SANO^c, Kenji.UENO^a, Yuzo.MORI^c
    • Journal Title

      Proc.Of the 8^<th> International Conference on X-ray Microscopy ; 26-30, July, at Egret Himeji 2006.6月発行(In printing)

    • Related Report
      2005 Annual Research Report
  • [Journal Article] A new Designed High-Precision Profiler2005

    • Author(s)
      Y.Higashi, Y.Takaie, K.Endo, T.Kume, K.Enami, K.Yamauchi, K.Yamamura, K.Ueno, Y.Mori
    • Journal Title

      SPIE Annual Meeting (Opto photonics) Proceedings, San Diego, USA, in printing (2005) (In printing)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] A new Designed High-Precision Profiler - Study on Mandrel measurement-2005

    • Author(s)
      Y.Higashi, Y.Takaie, K.Endo, T.Kume, K.Enami, K.Yamauchi, K.Yamamura, K.Ueno, Y.Mori
    • Journal Title

      XRM2005 International Meeting Proceedings Hirneji, Japan, in printing (2005) (In printing)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] A new Designed High-Precision Profiler2005

    • Author(s)
      Y.Higashi, Y.Takaie, K.Endo, T.Kume, K.Enami, K.Yamauchi, K.Yamamura, K.Ueno, Y.Mori
    • Journal Title

      SPIE Annual Meeting (Opto photonics) Proceedings, San Diego, USA (in printing)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] A new Designed High-Precision Profiler-Study on Mandrel measurement-2005

    • Author(s)
      Y.Higashi, Y.Takaie, K.Endo, T.Kume, K.Enami, K.Yamauchi, K.Yamamura, K.Ueno, Y.Mori
    • Journal Title

      XRM2005 International Meeting Proceedings Himeji, Japan (in printing)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] シンクロトロン放射光用ミラーのための超精密非球面形状測定装置の開発 □形状測定機上のゴニオメータの較正-2005

    • Author(s)
      東 保男 他
    • Journal Title

      2004年度精密工学会春季大会学術講演会講演論文集(慶応義塾大,3月),2005

    • Related Report
      2004 Annual Research Report
  • [Journal Article] グラウンドモーションのナノメータ計測法2005

    • Author(s)
      東 保男 他
    • Journal Title

      2004年度精密工学会春季大会学術講演会講演論文集(慶応義塾大,3月),2005

    • NAID

      130004657423

    • Related Report
      2004 Annual Research Report
  • [Journal Article] A new designed ultra-precision profiler2005

    • Author(s)
      Y.Higashi et al.
    • Journal Title

      SPIE-The International Society for Optical Engineering (To be submitted)

    • Related Report
      2004 Annual Research Report
  • [Journal Article] A new designed ultra-precision profiler-Study of slope error measurement of a mandrel for Wolter type-1 mirrors fabrication-2005

    • Author(s)
      Y.Higashi et al.
    • Journal Title

      第8回X線顕微鏡国際会議(XRM2005) (To be submitted)

    • Related Report
      2004 Annual Research Report
  • [Journal Article] シンクロトロン放射光用ミラーのための超精密非球面形状測定装置の開発 □測定装置の検討-2004

    • Author(s)
      東 保男 他
    • Journal Title

      2004年度精密工学会秋季大会学術講演会講演論文集(島根大,9月),2004

    • Related Report
      2004 Annual Research Report

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Published: 2004-04-01   Modified: 2016-04-21  

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