Development of an optical interference micro accelerometer with automatic tuning system
| Project/Area Number |
16360446
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Earth system and resources enginnering
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| Research Institution | Tohoku University |
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Principal Investigator |
ASANUMA Hiroshi Tohoku University, Graduate School of Environmental Studies, Associate Professor, 大学院・環境科学研究科, 助教授 (50250717)
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| Co-Investigator(Kenkyū-buntansha) |
NIITSUMA Hiroaki Tohoku University, Graduate School of Environmental Studies, Professor, 大学院・環境科学研究科, 教授 (90108473)
ESASHI Masayoshi Tohoku University, New Industry Creation Hatchery Center, Professor, 未来科学技術共同研究センター, 教授 (20108468)
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| Project Period (FY) |
2004 – 2005
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| Project Status |
Completed (Fiscal Year 2005)
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| Budget Amount *help |
¥10,900,000 (Direct Cost: ¥10,900,000)
Fiscal Year 2005: ¥3,100,000 (Direct Cost: ¥3,100,000)
Fiscal Year 2004: ¥7,800,000 (Direct Cost: ¥7,800,000)
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| Keywords | microsensor / accelerometer / FPI / operating point / automatic tuning / MEMS |
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| Research Abstract |
This research was carried out to develop an optical interference micro accelerometer with automatic tuning system. Major results from this project are as follows :
1. Investigation of the automatic tuning system.
(1), Mechanism and logic to automatically tune the sensitivity of the sensor was theoretically and experimentally investigated. Prototype system with hardware and software was made to examine its performance.
2. Fabrication of the prototype
(1), A prototype the automatic tuning system was fabricated using the MEMS technologies. The effect of the tunig and improvement of the performance was examined.
3. Investigation on the multiplexing
(1), Methods for multisensor measurement system and multiplex transmission of the optical signal was investigated and prototype system was manufactured. (2), Its performance was investigated in borehole, water and subsurface
4. Summary.
(1), Design methodology, MEMS process, software, optical system was summarized for future industrial production. (2), The main results from this project were submitted to appropriate international journal.
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Report
(3 results)
Research Products
(5 results)
