| Project/Area Number |
16540446
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Plasma science
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| Research Institution | Tokyo Institute of Technology |
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Principal Investigator |
AKATSUKA Hiroshi Tokyo Institute of Technology, Research Laboratory for Nuclear Reactors, Associate Professor, 原子炉工学研究所, 助教授 (50231808)
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| Co-Investigator(Kenkyū-buntansha) |
MATSUURA Haruaki Tokyo Institute of Technology, Research Laboratory for Nuclear Reactors, Assistant Professor, 原子炉工学研究所, 助手 (70262326)
SUZUKI Tatsuya Tokyo Institute of Technologh, Research Laboratory for Nuclear Reactors, Assistant Professor, 原子炉工学研究所, 助手 (70323839)
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| Project Period (FY) |
2004 – 2005
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| Project Status |
Completed (Fiscal Year 2005)
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| Budget Amount *help |
¥3,200,000 (Direct Cost: ¥3,200,000)
Fiscal Year 2005: ¥1,300,000 (Direct Cost: ¥1,300,000)
Fiscal Year 2004: ¥1,900,000 (Direct Cost: ¥1,900,000)
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| Keywords | Microwave discharge / Electron Energy Distribution Function / Excited states density / Collisional Radiative model / Druyvesteyn distribution / bi-Maxwellian distribution / Atomic line spectra of noble gases / Non-linear simultaneous equations / 分光計測 / 希ガスプラズマ / アルゴンプラズマ / 2温度分布 / 高エネルギーテール / プロセスプラズマ |
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| Research Abstract |
We discuss the effects of electron energy distribution function (EEDF) on the number densities of excited states of Ar I in a microwave discharge argon plasma in the pressure range of 0.1 to 10 Torr. We experimentally generate the microwave discharge argon plasma and find the electron temperature and density to be 5-12 eV and (1-4)×10^<11> cm^<-3>, respectively. Single probe analysis also shows that its EEDF is approximately Druyvesteynian, but with a large uncertainty. We measure the number densities of excited states of Ar I by spectroscopic examination. For numerical analysis, we obtain the number densities of, the excited states by using a collisional radiative model, substituting experimentally observed electron temperature and density. The number densities of excited states calculated by the collisional radiative model agree well with the experimental ones when we adopt the Druyvesteynian distribution as EEDF, whilst the Maxwellian distribution gives poor results.
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