| Project/Area Number |
16540452
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Plasma science
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| Research Institution | Tokyo Metropolitan University |
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Principal Investigator |
TOCHIKUBO Fumiyoshi Tokyo Metropolitan University, Graduate school of Science and Engineering, Associate Professor, 大学院理工学研究科, 准教授 (90244417)
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| Co-Investigator(Kenkyū-buntansha) |
UCHIDA Satoshi Tokyo Metropolitan University, Graduate School of Science and Engineering, Associate Professor, 大学院理工学研究科, 助教授 (90305417)
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| Project Period (FY) |
2004 – 2006
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| Project Status |
Completed (Fiscal Year 2006)
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| Budget Amount *help |
¥3,800,000 (Direct Cost: ¥3,800,000)
Fiscal Year 2006: ¥500,000 (Direct Cost: ¥500,000)
Fiscal Year 2005: ¥1,400,000 (Direct Cost: ¥1,400,000)
Fiscal Year 2004: ¥1,900,000 (Direct Cost: ¥1,900,000)
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| Keywords | nonthermal high pressure plasma / dielectric barrier discharge / glow discharge / metastable species / laser absorption spectroscopy / gas discharge simulation / microplasma |
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| Research Abstract |
The role of the metastable species for high pressure glow discharge formation in dielectric barrier discharge (DBD) geometry has been investigated experimentally and theoretically.
In the experiment, we carried out the electrical characteristics measurement, discharge configuration observation, optical emission spectroscopy and laser absorption spectroscopy for Ar(1s_5) measurement in high pressure Ar-based gas in DBD at various condition. Influence of Penning effect on high pressure glow discharge formation is studied in Ar with adding a small amount of C_2H_4, which has lower ionization potential than excitation potential of Ar(1S_5). In addition, the glow discharge was used for wastewater treatment.
In the numerical simulation using fluid model, the influence of Penning ionization was investigated in Ar/C_2H_4 mixtures under the same condition as the experiment. The contribution of stepwise ionization in microplasma (dc microplasma, DBD microplasma with coplanar electrode) was also investigated as well as the microplasma formation processes. In addition, we have verified how the electron avalanche from a seed electron develops into glow discharge.
The main conclusion is as follows.
1) For stable atmospheric pressure glow discharge formation without streamers, it is important to enhance the effective ionization coefficient at low E/N region by means of Penning ionization. Ar mixtures with C_2H_4, C_2F_4 and SiH_4 are expected to form atmospheric pressure glow discharge for real plasma processing.
2) Penning ionization works very effectively in positive column in atmospheric pressure microplasmas. Gas heating and ion drag force causes the strong gas flow.
3) The radial expansion of the gas discharge from a seed electron originated electron avalanche requires the sufficient diffusion of electron or metastable species.
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