| Project/Area Number |
16560008
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Applied materials science/Crystal engineering
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| Research Institution | Osaka University |
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Principal Investigator |
ISHIMARU Manabu Osaka University, The Institute of Scientific and Research, Associate Professor, 産業科学研究所, 助教授 (00264086)
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| Co-Investigator(Kenkyū-buntansha) |
HIROTSU Yoshihiko Osaka University, The Institute of Scientific and Research, Professor, 産業科学研究所, 教授 (70016525)
NAITO Muneyuki Osaka University, The Institute of Scientific and Research, Research Associate, 産業科学研究所, 助手 (10397721)
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| Project Period (FY) |
2004 – 2005
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| Project Status |
Completed (Fiscal Year 2005)
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| Budget Amount *help |
¥3,700,000 (Direct Cost: ¥3,700,000)
Fiscal Year 2005: ¥1,600,000 (Direct Cost: ¥1,600,000)
Fiscal Year 2004: ¥2,100,000 (Direct Cost: ¥2,100,000)
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| Keywords | Phase change recording material / Nanobeam electron diffraction / Radial distribution function / Ge-Sb-Te / ナノビーム電子回析 |
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| Research Abstract |
As-sputtered and melt-quenched amorphous structures together with the laser-induced crystallized structure of Ge-Sb-Te thin films were investigated using high-resolution electron microscopy (HREM) and nanobeam electron diffraction (NBED). Each of the Ge-Sb-Te thin films was embedded in a four-layered stack, which is the same as the layered structure of phase-change optical disks. Cross-sectional HREM revealed crystalline atomic clusters in the melt-quenched amorphous layer at a greater frequency than in the as-sputtered amorphous layer. Autocorrelation function analysis of the HREM images revealed similarity between the structures of atomic ordered regions in the amorphous phase and that of crystalline Sb. Atomic pair-distribution functions derived from halo NBED intensity analysis indicated that the atomic neighbor correlations developed more in the melt-quenched amorphous phase than in the as-sputtered phase. The development of locally ordered regions is considered to be closely related to the differences in optical properties and crystallization behaviors between these two amorphous phases.
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