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Research on fundamental technologies for processing of electronic materials by synchrotron light-excited process

Research Project

Project/Area Number 16560012
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied materials science/Crystal engineering
Research InstitutionSaga University

Principal Investigator

NISHIO Mitsuhiro  Saga Univ., Fac. Of Sci. & Eng., Professor, 理工学部, 教授 (60109220)

Co-Investigator(Kenkyū-buntansha) OGAWA Hiroshi  Saga Univ., Synctrotron light research center, Professor, シンクロトロン応用研究センター, 教授 (10039290)
TANAKA Tooru  Saga Univ., Synctrotron light research center, Assistant, シンクロトロン応用研究センター, 助手 (20325591)
Project Period (FY) 2004 – 2006
Project Status Completed (Fiscal Year 2006)
Budget Amount *help
¥2,900,000 (Direct Cost: ¥2,900,000)
Fiscal Year 2006: ¥900,000 (Direct Cost: ¥900,000)
Fiscal Year 2005: ¥900,000 (Direct Cost: ¥900,000)
Fiscal Year 2004: ¥1,100,000 (Direct Cost: ¥1,100,000)
KeywordsSynchrotron light-excited process / Electronic material / etching / epitaxial growth / シンクロトロン光の工学的利用 / 材料加工 / 佐賀県立九州シンクロトロン光研究センター
Research Abstract

Synchrotron light-excited etching of ZnTe as an example of electronic material has been demonstrated. In the case of SF_6 gas, the ZnTe was not etched but thin film of a fluorine containing material, e.g. ZnF2, was deposited on the surface of ZnTe. On the other hand, ZnTe was etched effectively by using Ar gas under the negative sample bias to the sample. The etched pattern obtained by placing a Ni mesh showed that only the irradiated area was etched. The etching mechanism has been investigated. A new beamline for the development of advanced materials and processing has been designed and constructed in order to utilize synchrotron light source built by Saga Prefectural Government. Furthermore, the processing of electronic materials containing epitaxial growth, doping, etching and annealing procedures has been carried out in our laboratory as prelimary experiments for the processing using synchrotron light.

Report

(4 results)
  • 2006 Annual Research Report   Final Research Report Summary
  • 2005 Annual Research Report
  • 2004 Annual Research Report
  • Research Products

    (23 results)

All 2007 2006 2005 2004

All Journal Article (22 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] Design of Beamline BL9 at Saga Light Source2007

    • Author(s)
      Tooru Tanaka, Hiroshi Ogawa, Masao Kamada, Mitsuhiro Nishio, Masataka Masuda, Qixin Guo, Kazuki Hayashida, Yuzi Kondo, Teruaki Motooka, Daisuke Yoshimura, Hiroyuki Setoyama, Toshihiro Okajima
    • Journal Title

      AIP series of conference proceedings 879

      Pages: 559-559

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Study of Al thermal diffusion in ZnTe by secondary ion mass spectroscopy2007

    • Author(s)
      Tooru Tanaka, Norihiro Murata, Katsuhiko Saito, Qixin Guo, Mitsuhiro Nishio, Hiroshi Ogawa
    • Journal Title

      physica status solidi (b) (in press)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Journal Article] Effects of dopant transport rate upon photoluminescence and electrical properties of ZnTe in atmospheric pressure MOVPE using tris-dimethylaminophosphorus2007

    • Author(s)
      Tooru Tanaka, Mitsuhiro Nishio, Kazuki Hayashida, Kenji Fujimoto, Qixin Guo, Hiroshi Ogawa
    • Journal Title

      Journal of Crystal Growth 298

      Pages: 437-440

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Growth Characteristics of ZnMgTe Layer on ZnTe Substrate by Metalorganic Vapor Phase Epitaxy2007

    • Author(s)
      Katsuhiko Saito, Tetsuo Yamashita, Daisuke Kouno, Tooru Tanaka, Mitsuhiro Nishio, Qixin Guo, Hiroshi Ogawa
    • Journal Title

      Journal of Crystal Growth 298

      Pages: 449-452

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Journal Article] Low-pressure metalorganic vapor phase epitaxy growth of ZnTe2007

    • Author(s)
      Yusuke Kume, Qixin Guo, Tooru Tanaka, Mitsuhiro Nishio, Hiroshi Ogawa, Wenzhong She
    • Journal Title

      Journal of Crystal Growth 298

      Pages: 441-444

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Journal Article] Design of Beamline BL9 at Saga Light Source2007

    • Author(s)
      Tooru Tanaka, Hiroshi Ogawa, Masao Kamada, Mitsuhiro Nishio, Masataka Masuda, Qixin Guo, Kazuki Hayashida, Yuzi Kondo, Teruaki Motooka, Daisuke Yoshimura, Hiroyuki Setoyama, Toshihiro Okajima
    • Journal Title

      AIP series of conference proceedings Vol.879

      Pages: 559-562

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Effects of dopant transport rate upon photoluminescence and electrical properties of ZnTe in atmospheric pressure MOVPE using tris-dimethylaminophosphorus2007

    • Author(s)
      Tooru Tanaka, Mitsuhiro Nishio, Kazuki Hayashida, Kenji Fujimoto, Qixin Guo, Hiroshi Ogawa
    • Journal Title

      Journal of Crystal Growth Vol.298

      Pages: 437-440

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Growth Characteristics of ZnMgTe Layer on ZnTe Substrate by Metalorganic Vapor Phase Epitaxy2007

    • Author(s)
      Katsuhiko Saito, Tetsuo Yamashita, Daisuke Kouno, Tooru Tanaka, Mitsuhiro Nishio, Qixin Guo, Hiroshi Ogawa
    • Journal Title

      Journal of Crystal Growth Vol.298

      Pages: 449-452

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Low-pressure metalorganic vapor phase epitaxy growth of ZnTe2007

    • Author(s)
      Yusuke Kume, Qixin Guo, Tooru Tanaka, Mitsuhiro Nishio, Hiroshi Ogawa, Wenzhong She
    • Journal Title

      Journal of Crystal Growth Vol.298

      Pages: 441-444

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Design of Beamline BL9 at Saga Light Source2007

    • Author(s)
      Yooru Tanaka, Hiroshi Ogawa, Masao Kamada, Mitsuhiro Nishio, Masataka Masuda, Qixin Guo, Kazuki Hayashida, Yuzi Kondo, Teruaki Motooka, Daisuke Yoshimura, Hiroyuki Setoyama, Toshihiro Okajima
    • Journal Title

      AIP series of conference proceedings 879

      Pages: 559-559

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Effects of dopant transport rate upon photoluminescence and electrical properties of ZnTe in atmospheric pressure MOVPE using tris-dimethylaminophosphorus2007

    • Author(s)
      Tooru Tanak, Mitsuhiro Nishio, Kazuki Hayashida, Kenji Fujimoto, Qixin Guo, Hiroshi Ogawa
    • Journal Title

      Journal of Crystal Growth 298

      Pages: 437-440

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Effect of surface treatment on properties of ZnTe LED fabricated by Al thermal diffusion2006

    • Author(s)
      Tooru Tanaka, Kazuki Hayashida, Katsuhiko Saito, Mitsuhiro Nishio, Qixin Guo, Hiroshi Ogawa
    • Journal Title

      physica status solidi(b) Vol.243

      Pages: 959-962

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Effects of substrate temperature upon photoluminescence and electrical properties of ZnTe in atmospheric pressure MOVPE using tris-dimethlaminophosphorus2006

    • Author(s)
      Kazuki Hayashida, Tooru Tanaka, Mitsuhiro Nishio, Qixin Guo, T.Tanigawa, Hiroshi Ogawa
    • Journal Title

      physica status solidi(c) Vol.3

      Pages: 1172-1175

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Growth of Boron-Doped ZnTe Homoepitaxial Layer by Metalorganic Vapor Phase Epitaxy2006

    • Author(s)
      Katsuhiko Saito, Tetsuo Yamashita, Tooru Tanaka, Mitsuhiro Nishio, Qixin Guo, Hiroshi Ogawa
    • Journal Title

      physica status solidi(c) Vol.3

      Pages: 833-836

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Synchrotron radiation-excited etching of ZnTe using Ar gas2005

    • Author(s)
      Tooru Tanaka, Yusuke Kume, Kazuki Hayashida, Katsuhiko Saito, Mitsuhiro Nishio, Qixin Guo, Hiroshi Ogawa
    • Journal Title

      Nuclear Instruments and Methods in Physics Research B238

      Pages: 115-118

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Recovery from Dry Etching Damage in ZnTe by Thermal Annealing2005

    • Author(s)
      Qixin GUO, Yusukei KUME, Tooru TANAKA, Mitsuhiro NISHIO, Hiroshi OGAWA
    • Journal Title

      Japanese Journal of Applied Physics 44

    • NAID

      10016590990

    • Related Report
      2005 Annual Research Report
  • [Journal Article] 佐賀県立九州シンクロトロン光研究センター事業の現状と利用計画2004

    • Author(s)
      小川博司, 鎌田雅夫, 西尾光弘, 増田正孝, 郭 其新, 田中 徹, 近藤祐治, 林田和樹, 本岡輝昭
    • Journal Title

      電気学会論文誌C(IEEJ Transactions on Electronics, Information and Systems) Vol.124-C, No.7

      Pages: 1345-1351

    • NAID

      10013268018

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Synchrotron Radiation-Excited Etching of ZnTe2004

    • Author(s)
      T.Tanaka, Y.Kume, S.Tokunaga, K.Hayashida, M.Nishio, O.Guo, H.Ogawa
    • Journal Title

      AIP series of conference proceedings Vol.705

      Pages: 1154-1157

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Specific Contact Resistance of Pd Electroless to p-type ZnTe2004

    • Author(s)
      Mitsuhiro Nishio, Tooru Tanaka, Qixin Guo, Hiroshi Ogawa
    • Journal Title

      International Conference on Electrical Engineering 2004 Conference Proceedings Vol.11

      Pages: 666-669

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Selective Dry Etching of Zinc Telluride Using Aluminum Mask2004

    • Author(s)
      Q.X.Guo, Y.Matsumoto, T.Tanaka, M.Nishio, H.Ogawa
    • Journal Title

      Japanese Journal of Applied Physics Vol.43

      Pages: 4157-4158

    • NAID

      10013317081

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Growth of phosphorus-doped ZnTe layers by metalorganic vapor phase epitaxy using tris-dimethylaminophosphorus2004

    • Author(s)
      Kazuki Hayashida, Tooru Tanaka, Mitsuhiro Nishio, Qixin Guo, Hiroshi Ogawa
    • Journal Title

      physics status solidi (c) Vol.1

      Pages: 718-721

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Electroluminescence and photoluminescence characteristics in ZnTe LED fabricated by Al thermal diffusion2004

    • Author(s)
      T.Tanaka, Y.Matsuno, Y.Kume, M.Nishio, Q.Guo, H.Ogawa
    • Journal Title

      physica status solidi (c) Vol,1

      Pages: 718-721

    • Related Report
      2004 Annual Research Report
  • [Patent(Industrial Property Rights)] 半導体の製造方法2006

    • Inventor(s)
      田中徹, 小川博司, 西尾光弘, 齋藤勝彦
    • Industrial Property Rights Holder
      佐賀大学
    • Industrial Property Number
      2006-222455
    • Filing Date
      2006
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary

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Published: 2004-04-01   Modified: 2016-04-21  

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