| Project/Area Number |
16560100
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | Nihon University |
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Principal Investigator |
SHIRAI Kenji Nihon University, College of Engineering, Professor, 工学部, 教授 (50256814)
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| Co-Investigator(Kenkyū-buntansha) |
YOSHIKAWA Yoshio Nihon University, College of Engineering, Professor, 工学部, 教授 (00059932)
KOBAYASI Yoshikazu Nihon University, College of Engineering, lecturer, 工学部, 講師 (60277390)
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| Project Period (FY) |
2004 – 2005
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| Project Status |
Completed (Fiscal Year 2005)
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| Budget Amount *help |
¥3,600,000 (Direct Cost: ¥3,600,000)
Fiscal Year 2005: ¥600,000 (Direct Cost: ¥600,000)
Fiscal Year 2004: ¥3,000,000 (Direct Cost: ¥3,000,000)
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| Keywords | Molding / Ceramics / Die and Mold Technology / PLZT / マイクロ成型 |
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| Research Abstract |
Over the recent years, electrical, electronics, information, medical and bio related equipment are becoming increasingly high precision and miniature. Piezoelectric device (PZT) is used as one of the components of these equipment, such as actuators for high-precision positioning and rotation and transfer of the micro parts.
By applying voltage to ceramics piezoelectric device, displacement can be generated by the light PLZT(PbLaZrTiO_3) photostrictive ceramics. In this study, a shape-deforming micro type mold was proposed using PLZT as die material and a three-dimensional micro forming machine was developed. An optical system is built inside the molding machine and the PLZT is mounted onto the glass substrate through which light penetrates. The PLZT self-transforms by the light which passes the mask corresponding to the molding shape. Photocurable resin fills into this deformed cavity. The surface is then flattened by a scraper, the conformer is closed, and UV ray is irradiated from the upper die. In order to form three-dimensional shapes, several sheets of masks dividing the molding shape are prepared. Next, the closing quantity of the upper die is controlled, and the mask shape is changed according to the open/close movements of the mold and laminated. By laminating a shape to a height of several μm and maximum plane size of several mm, this machine can mold three-dimensional structures at a dimensional accuracy of several μm.
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