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Robust Optical profiling system in Surface Texture

Research Project

Project/Area Number 16560106
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Production engineering/Processing studies
Research InstitutionTokyo metropolitan college of technology

Principal Investigator

FUKATSU Hiroya  Tokyo metropolitan college of technology, System Engineering, Assistant professor, 生産システム工学科, 助教授 (80228866)

Co-Investigator(Kenkyū-buntansha) YANAGI Kazuhisa  Nagaoka University of Technology, Engineering Department, Professor, 工学部, 教授 (80108216)
Project Period (FY) 2004 – 2005
Project Status Completed (Fiscal Year 2005)
Budget Amount *help
¥2,900,000 (Direct Cost: ¥2,900,000)
Fiscal Year 2005: ¥800,000 (Direct Cost: ¥800,000)
Fiscal Year 2004: ¥2,100,000 (Direct Cost: ¥2,100,000)
KeywordsNoncontact displacement sensor / Speckle noise / Optical stylus / Profile measurement / Two orthogonal systems
Research Abstract

Most optical styluses composed of laser diode and objective lens are troubled with signal noise when being traversed over engineering surfaces. The main cause of that signal noise can be attributed to laser speckle included in the reflected light from the object surface. It has been strongly demanded to decrease the influence of such speckle noise on the displacement signal of those optical styluses. In this research, a novel optical measurement system was proposed for a new optical stylus that has the speckle noise removal function. By using the newly developed optical stylus, surface profiles with less high frequency components were obtained for several kinds of machined surfaces with different surface textures. In order to improve further its measuring performance, we provided with an additional compensation system in the orthogonal direction and designed the selection technique between the two alternatives. Applicability of the developed optical stylus to the profile measurement of engineering surfaces was experimentally verified.

Report

(3 results)
  • 2005 Annual Research Report   Final Research Report Summary
  • 2004 Annual Research Report
  • Research Products

    (16 results)

All 2005 2004

All Journal Article (16 results)

  • [Journal Article] 光触針式輪郭測定における傾斜測定誤差の補正法2005

    • Author(s)
      深津拡也
    • Journal Title

      精密学会誌 71巻5号

      Pages: 590-594

    • NAID

      10015529669

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Annual Research Report 2005 Final Research Report Summary
  • [Journal Article] 光触針式輪郭測定センサの楕円照射化による異常値補正効果2005

    • Author(s)
      深津拡也
    • Journal Title

      精密学会誌 71巻12号

      Pages: 1590-1594

    • NAID

      110002545871

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Annual Research Report 2005 Final Research Report Summary
  • [Journal Article] Development of an optical stylus displacement sensor for surface profiling instruments2005

    • Author(s)
      Hiroya FUKATSU
    • Journal Title

      Microsystem Technologies 11巻8-10号

      Pages: 582-589

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Annual Research Report 2005 Final Research Report Summary
  • [Journal Article] Development of an optical stylus displacement sensor having a speckle noise reduction capability2005

    • Author(s)
      Hiroya FUKATSU
    • Journal Title

      5th Intemational Conference of the euspen vol.1

      Pages: 149-152

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] A practical method for compensating surface inclination effect on optical stylus profile measurement2005

    • Author(s)
      Hiroya FUKATSU, Kiyotaka MISU, Kazuhisa YANAGI
    • Journal Title

      Japan society for precision engineering 71,5

      Pages: 590-594

    • NAID

      10015529669

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Outlier compensation effect of an optical profiling sensor by elliptical spot irradiation2005

    • Author(s)
      Hiroya FUKATSU, Kazuhisa YANAGI
    • Journal Title

      Japan society for precision engineering 71,12

      Pages: 1590-1594

    • NAID

      110002545871

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Development of an optical stylus displacement sensor for surface profiling instruments2005

    • Author(s)
      Hiroya FUKATSU, Kazuhisa YANAGI
    • Journal Title

      Microsystem Technologies 11,8-10

      Pages: 582-589

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Development of an optical stylus displacement sensor having a speckle noise reduction capability2005

    • Author(s)
      Hiroya FUKATSU, Kazuhisa YANAGI
    • Journal Title

      5th International Conference of the euspen Vol.1

      Pages: 149-152

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Development of an optical stylus displacement sensor having a speckle noise reduction capability2005

    • Author(s)
      Hiroya FUKATSU
    • Journal Title

      5th International Conference of the euspen Vol.1

      Pages: 149-152

    • Related Report
      2005 Annual Research Report
  • [Journal Article] 輪郭形状測定のための光触針式変位センサーの開発2004

    • Author(s)
      深津拡也
    • Journal Title

      日本機械学会論文集 70巻694号C編

      Pages: 193-198

    • NAID

      110006263940

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] 光触針式輪郭測定機の性能向上を目的としたスペックル誤差補正システム2004

    • Author(s)
      深津拡也
    • Journal Title

      精密学会誌 70巻第5号

      Pages: 716-720

    • NAID

      110001823999

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Development of an optical stylus displacement sensor for surface profiling measurement2004

    • Author(s)
      Hiroya FUKATSU, Kazuhisa YANAGI
    • Journal Title

      Transactions of the Japan Society of Mechanical Engineering 70,694, C

      Pages: 193-198

    • NAID

      110006263940

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] A speckle error compensation system for improving measurement performance of optical stylus instrument2004

    • Author(s)
      Hiroya FUKATSU, Kazuhisa YANAGI
    • Journal Title

      Japan society for precision engineering 70,5

      Pages: 716-720

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] 輪郭形状測定のための光触針式変位センサーの開発2004

    • Author(s)
      深津拡也, 柳 和久
    • Journal Title

      日本機械学会論文集 70巻694号C編

      Pages: 193-198

    • NAID

      110006263940

    • Related Report
      2004 Annual Research Report
  • [Journal Article] 光触針式輪郭測定機の性能向上を目的としたスペックル誤差補正システム2004

    • Author(s)
      深津拡也, 柳 和久
    • Journal Title

      精密学会誌 70巻第5号

      Pages: 716-720

    • NAID

      110001823999

    • Related Report
      2004 Annual Research Report
  • [Journal Article] 楕円スポットによる光輪郭センサーの性能向上2004

    • Author(s)
      深津拡也, 柳 和久
    • Journal Title

      精密工学会秋季大会学術講演会講演論文集

      Pages: 997-998

    • NAID

      130004655872

    • Related Report
      2004 Annual Research Report

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Published: 2004-04-01   Modified: 2016-04-21  

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