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Study on electron emission from nanocrystalline silicon

Research Project

Project/Area Number 16560306
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionHachinohe Institute of Technology

Principal Investigator

SHIMAWAKI Hidetaka  Hachinohe Institute of Technology, Department of Engineering, Associate Professor, 工学部, 助教授 (80241587)

Co-Investigator(Kenkyū-buntansha) MIMURA Hidenori  Shizuoka University, Research Institute of Electronics, Professor, 電子工学研究所, 教授 (90144055)
Project Period (FY) 2004 – 2005
Project Status Completed (Fiscal Year 2005)
Budget Amount *help
¥3,100,000 (Direct Cost: ¥3,100,000)
Fiscal Year 2005: ¥1,000,000 (Direct Cost: ¥1,000,000)
Fiscal Year 2004: ¥2,100,000 (Direct Cost: ¥2,100,000)
Keywordselectron emission / nanocrystalline silicon / cold cathode / vacuum nanoelectronics / 平面型冷陰極 / トンネル放射 / 電界電子放射
Research Abstract

We have fabricated planar-type cathodes based on nanocrystalline silicon thin films deposited by using a pulsed laser ablation technique and examined their emission characteristics. Though the emission current was observed at the gate voltage as low as the work function of the gate material, the emission efficiency was 0.5% at the maximum. The emission current fluctuation was the oder of fifty percent for average emission current. The energy distribution was considerably broad, indicating that electrons were strongly scattered inside the nc-Si layer and the gate electrode. These results are not enough at present. However, we believe that the emission characteristics and reliability will be improved by optimizing the conditions of the laser ablation and the gate electrode, because a laser ablation is an appropriate technique is for fabricating nanocrsytalline Si covered with a thin oxide layer.

Report

(3 results)
  • 2005 Annual Research Report   Final Research Report Summary
  • 2004 Annual Research Report
  • Research Products

    (10 results)

All 2006 2005

All Journal Article (10 results)

  • [Journal Article] シリコン微結晶構造を用いた平面型冷陰極の電子放射特性2006

    • Author(s)
      嶋脇秀隆
    • Journal Title

      第53回応用物理学関係連合講演会予稿集 2

      Pages: 796-796

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Electron emission from planar-type cathodes based on nanocrystalline silicon thin films2006

    • Author(s)
      H.Shimawaki
    • Journal Title

      J. Vac. Sci. Technol. B 24

      Pages: 971-973

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Emission characteristics of planar-type cathodes based on nanocrystalline silicon thin films2006

    • Author(s)
      H.Shimawaki, Y.Masuda, Y.Neo, H.Mimura
    • Journal Title

      Ext.Abstracts of the 53rd Spring Meeting ; JSAP and Related Soc.

      Pages: 796-796

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Electron emission from planar-type cathodes based on nanocrystalline silicon thin films2006

    • Author(s)
      H.Shimawaki, Y.Neo, H.Mimura
    • Journal Title

      J.Vac.Sci.Technol. B 24

      Pages: 971-973

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] シリコン微結晶構造を用いた平面型冷陰極の電子放射特性2006

    • Author(s)
      嶋脇秀隆, 増田陽一郎, 根尾陽一郎, 三村秀典
    • Journal Title

      第53回応用物理学関係連合講演会予稿集 2

    • Related Report
      2005 Annual Research Report
  • [Journal Article] ELECTRON EMISSION FROM PLANAR-TYPE CATHODE BASED ON NANOCRYSTALLINE SILICON THIN FILMS2005

    • Author(s)
      Hidetaka Shimawaki
    • Journal Title

      Tech. Digest of the 18th Int. Vacuum Microelectronics Conf.

      Pages: 227-228

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Energy distributions of field emission electrons from silicon emitters2005

    • Author(s)
      H.Shimawaki
    • Journal Title

      J. Vac. Sci. Technol. B 23

      Pages: 687-690

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] ELECTRON EMISSION FROM PLANAR-TYPE CATHODE BASED ON NANOCRYSTALLINE SILICON THIN FILMS2005

    • Author(s)
      H.Shimawaki, Y.Neo, H.Mimura, K.Yokoo
    • Journal Title

      Tech.Digest of the 18th Int.Vacuum Microelectronics Conf., Oxford, UK

      Pages: 227-228

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Energy distributions of field emission electrons from silicon emitters2005

    • Author(s)
      H.Shimawaki, Y.Suzuki, K.Sagae, Y.Neo, H.Mimura
    • Journal Title

      J.Vac.Sci.Technol. B 23

      Pages: 687-690

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] ELECTRON EMISSION FROM PLANAR-TYPE CATHODE BASED ON NANOCRYSTALLINE SILICON THIN FILMS2005

    • Author(s)
      H.Shimawaki, Y.Neo, H.Mimura, K.Yokoo
    • Journal Title

      Tech.Digest of the 18th Int.Vacuum Microelectronics Comf.

      Pages: 227-228

    • Related Report
      2005 Annual Research Report

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Published: 2004-04-01   Modified: 2016-04-21  

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