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Study on the principle and experiments on the extremely downsized magnetic field sensor and application to MEMS.

Research Project

Project/Area Number 16560319
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionSalesian Polytechnic

Principal Investigator

YOSIZAWA Nobuyuki  Salesian Polytechnic, Electronic Engineering Dept., Prof., 教授 (50106134)

Co-Investigator(Kenkyū-buntansha) SHIMADA Yutaka  Tohoku University, Graduate School of Engineering, Visiting Professor, 大学院・工学研究科, 客員教授 (00006157)
Project Period (FY) 2004 – 2005
Project Status Completed (Fiscal Year 2005)
Budget Amount *help
¥3,600,000 (Direct Cost: ¥3,600,000)
Fiscal Year 2005: ¥1,500,000 (Direct Cost: ¥1,500,000)
Fiscal Year 2004: ¥2,100,000 (Direct Cost: ¥2,100,000)
Keywordsmagnetic field sensor / quartz resonator / magnetoelastic effect / amorphous ribbon / 磁気センサ / 水晶発振 / LN発振 / アモルファスリボン
Research Abstract

Development of downsizing technology for magnetic field sensors is essential for direction sensing in the IT mobile communication devices. The advantage of the sensor studied in this project is that it senses magnetic field in terms of frequency sift of magnetomechanical vibration, namely, FM (frequency modulation) is adopted in contrast to AM for the conventional sensors such as MI, fluxgate, or Hall elements. The sensor is a composite made of a crystal oscillator and highly magnetostrictive ferromagnetic layers with high sensitivity to magnetic field. For ferromagnetic layers amorphous ribbons (Fe-Si-B) and thin films of Fe-Co-Zr sputtered films were used. The composite of crystal oscillator and amorphous ribbons exhibit high sensitivity which is high enough as an earth field sensor. In case of thin films directional difference of thermal expansion coefficient in the crystal plane (18.5 X-cut) caused very high magnetic anisotropy in the film. This means search for the crystal plane with low anisotropic thermal expansion is needed. However, Si is a basic material in the MEMS technology and use of thin films is possible. Furthermore, for a very small Si reed Q factor of mechanical vibration is very high and can stand for crystal oscillators. In our experiment Si reeds with the size (500×60μm, t = 10μm) were formed in a Si wafer and sift of resonance vibration frequency was detected in a magnetic field. Although the sensitivity is not high, this experiment verified that extremely downsized sensors are possible using the MEMS technology.

Report

(3 results)
  • 2005 Annual Research Report   Final Research Report Summary
  • 2004 Annual Research Report
  • Research Products

    (11 results)

All 2006 2005 2004

All Journal Article (11 results)

  • [Journal Article] Development of Magnetic Field Sensing by an Electrostrictive/Magnetstrictive Composite Resonator (2)2006

    • Author(s)
      N.Yosihzaawa, Y.Shimada
    • Journal Title

      Bulletin of Salesian Polytechnic Vol.31

      Pages: 19-23

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] 電歪/磁歪複合振動子による磁場センサの開発(2)2005

    • Author(s)
      吉澤伸幸, 島田寛
    • Journal Title

      サレジオ高専紀要 31

      Pages: 19-23

    • NAID

      40007299596

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Annual Research Report 2005 Final Research Report Summary
  • [Journal Article] Magnetic Field Sensing by an Electrostrictive/ Magnetostrictive Composite Resonator2005

    • Author(s)
      N.Yoshizawa, Y.Shimada
    • Journal Title

      IEEE. Transactions on Magnetics 41・11

      Pages: 4359-4361

    • NAID

      10013768886

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Development of Magnetic Field Sensing by an Electrostrictive/Magnetstrictive Composite Resonator (1)2005

    • Author(s)
      Nobuyuki Yosihzaawa
    • Journal Title

      Bulletin of Salesian Polytechnic Vol.30

      Pages: 37-38

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Magnetic Field Sensing by an "Electrostrictive/Magnetstrictive Composite Resonator2005

    • Author(s)
      N.Yosihzaawa, I.Yamamoto, Y.Shimada
    • Journal Title

      IEEE Transaction on Magnetics Vol.41, No.11

      Pages: 4359-4361

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Magnetic Field Sensing by an Electrostrictive/Magnetostrictive Composite Resonator2005

    • Author(s)
      N.Yoshizawa, Y.Shimada
    • Journal Title

      IEEE.Transactions on Magnetics 41・1130

      Pages: 4359-4361

    • NAID

      10013768886

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Magnetic Field Sensing by a Piezoelectric/magnetostrictive Composite Resonator2005

    • Author(s)
      Nobuyuki Yoshizawa, Yutaka Shimada
    • Journal Title

      INTERMAG ASIA 2005 Digest of IEEE International Magnetics Conference BW-01

      Pages: 206-206

    • Related Report
      2004 Annual Research Report
  • [Journal Article] 電歪/磁歪複合振動子による磁界センサ2004

    • Author(s)
      吉澤伸幸, 島田寛
    • Journal Title

      日本応用磁気学会誌 28・4

      Pages: 589-592

    • NAID

      110002809770

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] 電歪/磁歪複合振動子による磁場センサの開発(1)2004

    • Author(s)
      吉澤伸幸
    • Journal Title

      育英高専紀要 30

      Pages: 37-38

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Magnetic Field Sensing by an Electrostrictive/Magnetstrictive Composite Resonator2004

    • Author(s)
      N.Yoshizawa, Y.Shimada, J.Hayasaka, K.Okamoto, Y.Ikeda
    • Journal Title

      J.Magn.Soc.jpn. Vol.28

      Pages: 589-592

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] 電歪/磁歪複合振動子による磁界センサ2004

    • Author(s)
      吉澤伸幸, 島田寛, 早坂淳一, 岡本幸一, 池田義秋
    • Journal Title

      日本応用磁気学会論文集 28・4

      Pages: 589-592

    • NAID

      110002809770

    • Related Report
      2004 Annual Research Report

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Published: 2004-04-01   Modified: 2016-04-21  

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