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Ion irradiated modifications on magnetostrictive thin films

Research Project

Project/Area Number 16560616
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Structural/Functional materials
Research InstitutionTokai University

Principal Investigator

MATSUMURA Yoshihito  Tokai University, Faculty of Engineering, Energy Science & Technology, Professor, 工学部, 教授 (60239085)

Co-Investigator(Kenkyū-buntansha) NISHI Yoshitake  Tokai University, School of Engineering, Professor, 工学部, 教授 (80119693)
内田 裕久  東海大学, 工学部, 教授 (20147119)
Project Period (FY) 2004 – 2006
Project Status Completed (Fiscal Year 2006)
Budget Amount *help
¥3,500,000 (Direct Cost: ¥3,500,000)
Fiscal Year 2006: ¥500,000 (Direct Cost: ¥500,000)
Fiscal Year 2005: ¥1,100,000 (Direct Cost: ¥1,100,000)
Fiscal Year 2004: ¥1,900,000 (Direct Cost: ¥1,900,000)
KeywordsIon Irradiation / Giant Magnetostriction / Thin Film / Terbium / Samarium / Iron / Aluminum / Inner Stress / 超磁歪材料 / プラズマプロセス / 照射損傷層 / 希土類 / 鉄合金 / イオンピーニング / 磁歪 / 残留応力
Research Abstract

Magnetostrictive properties of Ar ion-irradiated R-Fe(R : Tb, Sm) thin films were studied with respect to internal stress. Film samples were prepared by a magnetron sputtering. The film composition was Tb_<36>Fe_<64> and Sm_<27>Fe_<73> with amorphous structures. After the deposition, film samples were irradiated with Ar ions at 10 keV, 2.7-8.0×10^<-1> A/m^2 and doses of 1x10^<22> ions/m^2. Magnetostrictive susceptibility of the Tb_<36>Fe_<64> film decreased with increasing ion current density by 5.5x10^<-1> A/m^2, however, improved with high current density above 7.0 x10^<-1> A/m^2. Magnetostrictive susceptibility of Sm_<27>Fe_<73> increased with increasing ion current density up to 5.5 x10^<-1> A/m^2. This was caused by increase of compressive stress induced by Ar ion irradiation with low current density and stress relaxation by increased temperature during irradiation with high current density. The magnetic properties were found profoundly influenced by stresses induced by competitive factors such as irradiation damage and thermal annealing effect.

Report

(4 results)
  • 2006 Annual Research Report   Final Research Report Summary
  • 2005 Annual Research Report
  • 2004 Annual Research Report
  • Research Products

    (35 results)

All 2007 2006 2005

All Journal Article (34 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] Fe2.6Sm非晶質合金薄膜の超磁歪と磁歪感受率に及ぼす電子線照射の効果2007

    • Author(s)
      平 良夫
    • Journal Title

      日本金属学会誌 71・2

      Pages: 203-207

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Fe-PdおよびFe-Tbの複合薄膜の磁歪および磁歪感受率2007

    • Author(s)
      久保大司
    • Journal Title

      日本金属学会誌 71・2

      Pages: 199-202

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Effects of Electron Beam Irradiation on Giant Magnetostriction and Its Susceptibility of Fe2.6Sm Alloy Amorphous Films2007

    • Author(s)
      Y.Taira et al.
    • Journal Title

      J.Japan Inst.Metals 71[2]

      Pages: 203-207

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Magnetostriction and Magnetostrictive Susceptibility of Fe-Tb and Fe-Pd Composite Thin Films2007

    • Author(s)
      D.Kubo et al.
    • Journal Title

      J.Japan Inst.Metals 71[2]

      Pages: 199-202

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Fe2.6Sm非結晶質合金薄膜の超時歪と磁歪感受率に及ぼす電子線照射の効果2007

    • Author(s)
      平 良夫
    • Journal Title

      日本金属学会誌 71・2

      Pages: 203-207

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Fe-PおよびFe-Tbの複合薄膜の磁歪および磁歪感受率2007

    • Author(s)
      久保大司
    • Journal Title

      日本金属学会誌 71・2

      Pages: 199-202

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Fe-Al合金薄膜の磁歪特性2006

    • Author(s)
      森田真英
    • Journal Title

      日本金属学会誌 70・8

      Pages: 622-625

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Journal Article] 反応性スパッタ法によるSm-Fe超磁歪薄膜の作製2006

    • Author(s)
      田中丸天兵
    • Journal Title

      日本金属学会誌 70・8

      Pages: 615-617

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] 直流マグネトロンスパタリング蒸着法の基板温度制御によるFe2.45Sm合金薄膜組織変化に伴う圧縮超磁歪と磁歪感受率2006

    • Author(s)
      増田進吾
    • Journal Title

      日本金属学会誌 70・8

      Pages: 650-653

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] 銅基板の両側にFe-Pd(引張)-Fe-Sm(圧縮)磁歪薄膜を蒸着した三層運動素子の見掛けの磁歪とその感受率2006

    • Author(s)
      高橋啓介
    • Journal Title

      日本金属学会誌 70・8

      Pages: 654-657

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Journal Article] Influences of Process Condition of Magnetron Sputtering on Magnetostrictive Susceptibility of Fe2.2Sm Alloy Film2006

    • Author(s)
      Y.Nishi
    • Journal Title

      Materials Transactions 47・11

      Pages: 2852-2859

    • NAID

      130004452983

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Sm-Fe薄膜の磁歪特性に及ぼす窒素ガス添加の影響2006

    • Author(s)
      松岡範佳
    • Journal Title

      日本金属学会誌 70・3

      Pages: 243-245

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] 連動機能素子材料の最近の研究2006

    • Author(s)
      西 義武
    • Journal Title

      金属 76・12

      Pages: 1268-1273

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Effects of oblique deposition on magnetostrictive characteristics of TbFe2 films formed by ion plating2006

    • Author(s)
      K.Muramatsu
    • Journal Title

      Journal Alloys and Compounds 408-412

      Pages: 335-339

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] 正・負超磁歪薄膜で構成される高感度複合運動機能素子2006

    • Author(s)
      増田 進吾
    • Journal Title

      日本金属学会誌 70・2

      Pages: 166-168

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Magnetostrictive Characteristics of Fe-Al Films2006

    • Author(s)
      M.Morita et al.
    • Journal Title

      J.Japan Inst.Metals 70[8]

      Pages: 622-625

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Sm-Fe Thin Film Prepared by Reactive Sputtering Process2006

    • Author(s)
      T.Tanakamarru et al.
    • Journal Title

      J.Japan Inst.Metals 70[8]

      Pages: 615-617

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Influences of Morphological Change Controlled by Substrate Temperature of Direct Current Magnetron Sputtering on Giant Magnetostriction and Its Susceptibility of Fe_<2.45>Sm Alloy Thin Films2006

    • Author(s)
      S.Masuda et al.
    • Journal Title

      J.Japan Inst.Metals 70[8]

      Pages: 650-653

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Apparent Magnetostriction and Its Susceptibility of Composite Mover Device Constructed with Both Positive (Fe-Pd) and Negative (Fe-Sm) Magnetostrictive Thin Films on Each Side Surface of Copper Substrate2006

    • Author(s)
      K.Takahashi et al.
    • Journal Title

      J.Japan Inst.Metals 70[8]

      Pages: 654-657

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Influences of Process Condition of Magnetron Sputtering on Magnetostrictive Susceptibility of Fe2.2Sm Alloy Film2006

    • Author(s)
      Y.Nishi
    • Journal Title

      Materials Transactions 47 [11]

      Pages: 2852-2859

    • NAID

      130004452983

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Effects of N Addition on Magnetostrictive Property of Sm-Fe Thin Film2006

    • Author(s)
      N.Mastuoka et al.
    • Journal Title

      J.Japan Inst.Metals 70[3]

      Pages: 243-245

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] The latest initiatives in application of multi-ferroics materials and devices" Current studies of motive function materials and devices2006

    • Author(s)
      Y.Nishi et al.
    • Journal Title

      KINZOKU 76[12]

      Pages: 1268-1273

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Effects of oblique deposition on magnetostrictive characteristics of TbFe_2 films formed by ion plating2006

    • Author(s)
      K.Muramatsu et al.
    • Journal Title

      Journal Alloys and Compounds 408-412

      Pages: 335-339

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] High Responsiveness Composite Mover Device Constructed with Positive and Negative Giant Magnetostrictive Films2006

    • Author(s)
      S.Masuda et al.
    • Journal Title

      J.Japan Inst.Metals 70[2]

      Pages: 166-168

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] 反応性スパッタ法によるSn-Fe超磁歪薄膜の作製2006

    • Author(s)
      田中丸天兵
    • Journal Title

      日本金属学会誌 70・8

      Pages: 615-6179

    • Related Report
      2006 Annual Research Report
  • [Journal Article] 直流マグネトロンスパタリング蒸着法の基盤温度制御によるFe2.45Sm合金薄膜組織変化に伴う圧縮超磁歪と磁歪感受率2006

    • Author(s)
      増田進吾
    • Journal Title

      日本金属学会誌 70・8

      Pages: 650-653

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Effects of oblique deposition on magnetostrictive characteristics of TbFe_2 films formed by ion plating2006

    • Author(s)
      K.Muramatsu, T.O.Yamaki, N.Matsuoka, M.Takeuchi, Y.Matsumura, H.Uchida
    • Journal Title

      Journal of Alloys and Compounds 408-411

      Pages: 335-339

    • Related Report
      2005 Annual Research Report
  • [Journal Article] 正・負超磁歪薄膜で構成される高感度複合運動機能素子2006

    • Author(s)
      増田 進吾, 松村 義人, 西 義武
    • Journal Title

      日本金属学会誌 70・2

      Pages: 166-168

    • NAID

      10017283649

    • Related Report
      2005 Annual Research Report
  • [Journal Article] R-Fe(R : Tb,Sm)薄膜の磁歪へ及ぼすArイオン照射により誘起された残留応力の影響2005

    • Author(s)
      竹内 光明
    • Journal Title

      日本金属学会誌 69.8

      Pages: 667-670

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Effect of Residual Stress Induced by Ar Ion Irradiation on Magnetostriction of R-Fe(R : Tb, Sm) Thin Film2005

    • Author(s)
      M.Takeuchi et al.
    • Journal Title

      J.Japan Inst.Metals 69[8]

      Pages: 667-670

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] R-Fe(R : Tb, Sm)薄膜の磁歪へ及ぼすArイオン照射により誘起された残留応力の影響2005

    • Author(s)
      竹内光明, 松村義人, 内田裕久
    • Journal Title

      日本金属学会誌 69・8

      Pages: 667-670

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Composition Dependence on Compressive Magnetostriction of Fe-Sm Binary Alloy Thin Films2005

    • Author(s)
      Y.Nishi, Y.Matsumura, Atsushi, Kadowaki, Shingo Masuda
    • Journal Title

      Materials Transactions 46・12

      Pages: 3063-3066

    • NAID

      10017150842

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Sm-Fe合金薄膜の磁歪感受率に及ぼす残留ガス圧,スパッタリングガス圧,基板温度の影響2005

    • Author(s)
      高橋啓介, 増田進吾, 津嘉山 葉, 門脇 睦, 松村 義人, 西 義武
    • Journal Title

      日本金属学会誌 69・8

      Pages: 671-675

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Sm-Fe合金薄膜の超磁歪特性に及ぼすスバッタArガス圧の影響2005

    • Author(s)
      門脇 睦, 高橋 啓介, 松村 義人, 西 義武
    • Journal Title

      日本金属学会誌 69・4

      Pages: 373-376

    • Related Report
      2005 Annual Research Report
  • [Patent(Industrial Property Rights)] 磁性材料薄膜の製造方法2005

    • Inventor(s)
      竹内 光明, 松村 義人
    • Industrial Property Rights Holder
      学校法人東海大学
    • Filing Date
      2005-03-18
    • Related Report
      2004 Annual Research Report

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Published: 2004-04-01   Modified: 2016-04-21  

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