Development of multi-focused ion beams for highly functional nano-dimension free processing

• Project/Area Number: 16H02093
• Research Category: Grant-in-Aid for Scientific Research (A)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Nano/Microsystems
• Research Institution: Tohoku University
• Principal Investigator: Kuwano Hiroki 東北大学, 未来科学技術共同研究センター, 教授 (50361118)
• Co-Investigator(Kenkyū-buntansha): LE VANMINH 東北大学, 未来科学技術共同研究センター, 助教 (60765098) ; 大口 裕之 東北大学, 未来科学技術共同研究センター, 准教授 (40570908)
• Project Period (FY): 2016-04-01 – 2021-03-31
• Project Status: Completed (Fiscal Year 2020)
• Budget Amount: ¥41,860,000 (Direct Cost: ¥32,200,000、Indirect Cost: ¥9,660,000); Fiscal Year 2020: ¥6,500,000 (Direct Cost: ¥5,000,000、Indirect Cost: ¥1,500,000); Fiscal Year 2019: ¥8,190,000 (Direct Cost: ¥6,300,000、Indirect Cost: ¥1,890,000); Fiscal Year 2018: ¥8,190,000 (Direct Cost: ¥6,300,000、Indirect Cost: ¥1,890,000); Fiscal Year 2017: ¥8,190,000 (Direct Cost: ¥6,300,000、Indirect Cost: ¥1,890,000); Fiscal Year 2016: ¥10,790,000 (Direct Cost: ¥8,300,000、Indirect Cost: ¥2,490,000)
• Keywords: 集束イオンビーム / マイクロ・ナノマシニング / MEMS技術 / イオン液体 / Siエッチング / イオン源アレイ / 液体イオン源 / マルチイオンビーム / イオンビームエッチング / 液体イオン / MEMS / マルチ集束イオンビーム / ナノ加工技術 / マルチビーム / ＭＥＭＳ / ナノテクノロジー / ＮＥＭＳ / マイクロ・ナノデバイス / 材料加工・プロセス / Focused ion beams / multi-ion sources / ion source / ionic liquid / ナノマシン / マイクロマシン / 半導体超微細加

Outline of Final Research Achievements

We propose and develop successfully micromachined multi-ion sources for Focused Ion Beam (FIB) integrated microfluidic channels on Si substrate by means of MEMS technology. The multi-IS was consisted of an array of micro-emitters surrounded by microfluidic channels connecting with ion liquid pool. A matrix of 10 x 10 micro-emitters in which each emitter was surrounded by four-segmented annular microfluidic channels of 10 μm in width were fabricated. The ion emission evaluation confirmed that the fabricated ion source using EMIM-BF4 ion liquid was able to operate a wide range of applied voltage from 4.7 kV to 6 kV. The maximum etching yield of 17 atoms per ion was achieved. The matrix of etching dimples with minimum diameter of 1 μm on the Si target proved the ion emission from the prototype FIB with the multi-ion sources without any residue.

Academic Significance and Societal Importance of the Research Achievements

新しいナノデバイスの研究開発および実用化のために、高機能で自由なナノレベルの３次元加工を高生産効率で行うことが求められている。ナノインプリント技術や機械加工技術、半導体微細加工技術等が存在するが、パタン形状や機能が限定的である欠点がある。本研究課題では高機能マルチ集束イオンビーム（M-FIB）を開発し、マスクレスでエッチング、ドーピング、表面修飾、高機能薄膜形成などの多種多様なナノレベルの高機能加工が自由に行える新しいナノ加工法を研究開発する。本研究の最終目的はマルチ集束イオンビーム装置を開発し高機能ナノ自由加工により新しいナノデバイスを実現し、新しい学術分野および新産業創生を図ることである。

Research Products

• [Journal Article] MICROMACHINED MULTI-ION SOURCES INTEGRATED MICRO FLUIDIC CHANNELS (2021)
  • Author(s): Nguyen-Van Chinh, Le-Van Minh, Takahito Ono, and Hiroki Kuwano
  • Journal Title: Proceedings of 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) Volume: 34 Pages: 14-17
  • DOI: 10.1109/mems51782.2021.9375217
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] A Micromachined Ionic Liquid Ion Source with Flow-Controlled Segmented Annular Channels (2019)
  • Author(s): Chinh Nguyen-Van、Minh Le-Van、Ono Takahito、Kuwano Hiroki
  • Journal Title: Proceedings of IEEE Transducers 2019 Volume: 1 Pages: 1674-1677
  • DOI: 10.1109/transducers.2019.8808471
  • Peer Reviewed
• [Journal Article] Micromachined multiple focused-ion-beam devices (2016)
  • Author(s): Ryo Yoshida, Motoaki Hara, Hiroyuki Oguchi, Hiroki Kuwano
  • Journal Title: Journal of Vacuum Science & Technology Volume: B 34 Issue: 2 Pages: 022001-022001
  • DOI: 10.1116/1.4943561
  • Peer Reviewed
• [Presentation] A Micromachined Ionic Liquid Ion Source with Flow-Controlled Segmented Annular Channels (2019)
  • Author(s): Chinh Nguyen-Van、Minh Le-Van、Ono Takahito、Kuwano Hiroki
  • Organizer: 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII
  • Int'l Joint Research
• [Presentation] Micro-fabricated multi focused ion beam source device using ionic liquid for sustainable design and manufacturing (2019)
  • Author(s): Hiroki Kuwano
  • Organizer: KES International Conference on Sustainability in Energy and buildings
  • Int'l Joint Research / Invited
• [Presentation] A micromachined ionic liquid ion source array (2019)
  • Author(s): Hiroki Kuwano
  • Organizer: The 3rd International Workshop on MEMS and Sensor System
  • Int'l Joint Research / Invited
• [Remarks] マイクロマシニングを用いたイオン源の作製
  • URL: http://www.nanosys.mech.tohoku.ac.jp/research/research.html
• [Patent(Industrial Property Rights)] マルチ集束イオンビーム (2021)
  • Inventor(s): 桑野、Minh, Chinh
  • Industrial Property Rights Holder: 桑野、Minh, Chinh
  • Industrial Property Rights Type: 特許
  • Filing Date: 2021