Evaluation of physical properties of nano-scale structures by combination of MEMS and in-situ TEM observation

• Project/Area Number: 16H03819
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Nanostructural physics
• Research Institution: Ritsumeikan University
• Principal Investigator: ANDO Taeko 立命館大学, 理工学部, 准教授 (70335074)
• Co-Investigator(Kenkyū-buntansha): 鳥山 寿之 立命館大学, 理工学部, 教授 (30227681) ; 中島 正博 名古屋大学, 工学研究科, 招へい教員 (80377837)
• Project Period (FY): 2016-04-01 – 2019-03-31
• Project Status: Completed (Fiscal Year 2018)
• Budget Amount: ¥19,500,000 (Direct Cost: ¥15,000,000、Indirect Cost: ¥4,500,000); Fiscal Year 2018: ¥3,510,000 (Direct Cost: ¥2,700,000、Indirect Cost: ¥810,000); Fiscal Year 2017: ¥7,540,000 (Direct Cost: ¥5,800,000、Indirect Cost: ¥1,740,000); Fiscal Year 2016: ¥8,450,000 (Direct Cost: ¥6,500,000、Indirect Cost: ¥1,950,000)
• Keywords: 単結晶シリコン / 引張変形 / ピエゾ抵抗 / TEM / 高倍率観察 / 引張試験 / ピエゾ抵抗効果 / 結晶方位依存性 / マイクロ・ナノデバイス / マイクロマシン / ナノ材料 / ナノ物性 / 電子顕微鏡 / 高分解能観察

Outline of Final Research Achievements

In this study, a tensile testing device is designed for magnified-view observation of tensile deformation of nano-scale structures in TEM. The device concept is that a center of the nano-scale specimen doesn't move in both x and y direction when external load was applied to the device. We conducted tensile tests in TEM by using fabricated tensile-testing device. The deformation of single-crystal-silicon specimen is observed through the interference stripes and fracture surface of the specimen is observed after tensile fracture.

Academic Significance and Societal Importance of the Research Achievements

ナノ構造における変形・破壊挙動を明確にする手法として引張試験は最も適した実験方法の一つであるが，通常バルク材の試験結果では平均化されたデータしか得られない．本研究ではMEMS技術とTEMその場観察を組み合わせることで，原子レベルで局所的なひずみ場のふるまいを直接観測しながら物性計測を行うといった従来困難であった計測が可能となる．とくに構造材料として必要な機械的な特性だけでなく，ナノ構造の電気特性や熱特性評価，これらの複合評価などへ展開することができる．

Research Products

• [Journal Article] Description of New Piezoresistance Tensor Equation for Cubic Single Crystal and Its Application to Multiaxial Stress (2018)
  • Author(s): Ando Taeko、Toriyama Toshiyuki
  • Journal Title: Sensors and Materials Volume: 30 Issue: 9 Pages: 2101
  • DOI: 10.18494/SAM.2018.1959
  • ISSN: 0914-4935, 2435-0869
  • Year and Date: 2018-09-28
  • Peer Reviewed / Open Access
• [Journal Article] Role of Preferential Crystallographic Orientation in Piezoresistance Anisotropy for Cubic Polycrystalline Aggregates (2018)
  • Author(s): Ando Taeko、Toriyama Toshiyuki
  • Journal Title: Sensors and Materials Volume: 30 Issue: 9 Pages: 2125
  • DOI: 10.18494/SAM.2018.1960
  • ISSN: 0914-4935, 2435-0869
  • Year and Date: 2018-09-28
  • Peer Reviewed / Open Access
• [Journal Article] Description of Piezoresistance in Polycrystalline Aggregates by Crystallites Orientation Distribution Function (2018)
  • Author(s): 安藤 妙子, 鳥山 寿之
  • Journal Title: IEEJ Transactions on Sensors and Micromachines Volume: 138 Issue: 5 Pages: 214-219
  • DOI: 10.1541/ieejsmas.138.214
  • NAID: 130006729820
  • ISSN: 1341-8939, 1347-5525
  • Year and Date: 2018-05-01
  • Peer Reviewed
• [Presentation] Tensile Testing Silicon Device in Transmission Electron Microscope for High-Magnification in-situ Observation (2018)
  • Author(s): Kohei Okada, Masahiro Nakajima, and Taeko Ando
  • Organizer: The 9-th Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2018)
  • Int'l Joint Research
• [Presentation] Fabrication of High-Aspect Nanoscale Hole in Si with Photo-Electro-Chemical Etching (2018)
  • Author(s): Taeko Abdi, Jyunya Touno, Noriyuki Tamura
  • Organizer: The 35th Sensor Sympojium on Sensors, Micromachines and Applied Systems
• [Presentation] In-Situ Observation of Fracture Behavior of Silicon in a Transmission Electron Microscope (2018)
  • Author(s): Kohei Okada, Syugo Tanaka, Kensuke Nakata, Masahiro Nakajima and Taeko Ando
  • Organizer: 29th 2018 International Symposium on Micro-NanoMechatronics and Human Science (MHS 2018)
  • Int'l Joint Research
• [Presentation] ナノ構造の機械物性と評価 (2017)
  • Author(s): 安藤妙子
  • Organizer: 平成29年電気学会全国大会
  • Place of Presentation: 富山大学（富山県・富山市）
  • Year and Date: 2017-03-17
  • Invited
• [Presentation] Piezoresistance for Polycrystalline Aggregates Represented by Crystallite Orientation Distribution Function (2017)
  • Author(s): Taeko Ando and Toshiyuki Toriyama
  • Organizer: The 19th International Conference on Solid-State Sensors, Actuators and Microsystems
  • Int'l Joint Research
• [Presentation] 結晶方位分布関数による多結晶集合組織のピエゾ抵抗表記 (2017)
  • Author(s): 安藤妙子，鳥山寿之
  • Organizer: 電気学会 マイクロマシン・センサシステム研究会
• [Presentation] 単結晶シリコンのき裂治癒による破壊強度変化 (2017)
  • Author(s): 安藤妙子
  • Organizer: 日本機械学会2017年度年次大会
• [Presentation] 不純物濃度によるエッチング速度の違いを利用したシリコン 3 次元 構造体の製作 (2017)
  • Author(s): 田村 宣通，安藤 妙子
  • Organizer: 第34 回センサ・マイクロマシンと応用システムシンポジウム
• [Presentation] 異なる形状の切欠きを持つナノスケールシリコンのき裂進展挙動 (2017)
  • Author(s): 中村 真也，岡田 光平，安藤 妙子
  • Organizer: 第34 回センサ・マイクロマシンと応用システムシンポジウム
• [Presentation] Size Effect on Crack Propagation of Nano-scale Silicon with Different Type of Nothes (2017)
  • Author(s): Kohei Okada, Shinya Nakamura and Taeko Ando
  • Organizer: 28th 2017 International Symposium on Micro-NanoMechatronics and Human Science
  • Int'l Joint Research
• [Presentation] 薄膜シリコンの破断における切り欠き形状がき裂進展に与える影響 (2016)
  • Author(s): 中村真也，安藤妙子，上野晃平
  • Organizer: 電気学会センサ・マイクロマシン部門総合研究会
  • Place of Presentation: 金沢市文化ホール（石川県・金沢市）
  • Year and Date: 2016-06-29
• [Presentation] Piezoresistive Rosette Gauge Taking into Account of Silicon Cubic Crystal Anisotropy (2016)
  • Author(s): T. Ando and T. Toriyama
  • Organizer: Asia-Pacific Conference of Transducers and Micro-Nano Technology 2016
  • Place of Presentation: Kanazawa Bunka Hall (石川県・金沢市)
  • Year and Date: 2016-06-28
  • Int'l Joint Research
• [Presentation] Compliant MEMS Structure for Observation of Fixed Point under Tensile Deformation (2016)
  • Author(s): T. Ando, K. Ueno, and M. Nakajima
  • Organizer: The 11th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems
  • Place of Presentation: Taikanso (宮城県・宮城郡)
  • Year and Date: 2016-04-20
  • Int'l Joint Research
• [Remarks] スマホで大活躍！超小型マイクロマシンが壊れないのは、なんで？
  • URL: http://www.ritsumei.ac.jp/tanq/349293/