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Quantification of electrical properties of defects in semiconductor crystals from a luminescence image

Research Project

Project/Area Number 16H03856
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Crystal engineering
Research InstitutionInstitute of Physical and Chemical Research (2018)
Nagoya University (2017)
Tohoku University (2016)

Principal Investigator

Kutsukake Kentaro  国立研究開発法人理化学研究所, 革新知能統合研究センター, 研究員 (00463795)

Co-Investigator(Kenkyū-buntansha) 原 康祐  山梨大学, 大学院総合研究部, 特任助教 (40714134)
太子 敏則  信州大学, 学術研究院工学系, 准教授 (90397307)
Research Collaborator Tanikawa Tomoyuki  
Project Period (FY) 2016-04-01 – 2019-03-31
Project Status Completed (Fiscal Year 2018)
Budget Amount *help
¥16,770,000 (Direct Cost: ¥12,900,000、Indirect Cost: ¥3,870,000)
Fiscal Year 2018: ¥3,510,000 (Direct Cost: ¥2,700,000、Indirect Cost: ¥810,000)
Fiscal Year 2017: ¥5,980,000 (Direct Cost: ¥4,600,000、Indirect Cost: ¥1,380,000)
Fiscal Year 2016: ¥7,280,000 (Direct Cost: ¥5,600,000、Indirect Cost: ¥1,680,000)
Keywords発光イメージ / 結晶工学 / 半導体結晶 / 結晶欠陥 / 機械学習 / 結晶評価 / 欠陥物性 / 定量化 / データ科学 / 格子欠陥 / 半導体物性 / 発光イメージング / イメージング / フォトルミネッセンス / Si / BaSi2 / SiC / キャリア再結合
Outline of Final Research Achievements

We worked in research and development of a method to quantify electrical properties of defects in semiconductor crystals from a luminescence image. High quality crystals of BaSi2 and SiC obtained in this research were used as measurement samples for the development. We obtained an accurate, high sensitivity, high speed, and high efficiency quantification method by combining computational methods such as carrier simulation, image processing and machine learning with fundamental physics of semiconductor and crystal defects. We work toward practical use of the obtained methods, techniques and knowledge.

Academic Significance and Societal Importance of the Research Achievements

本研究のポイントは画像として得られる発光イメージから、欠陥物性の情報をいかに抽出するかです。本研究では、半導体や欠陥の物理に基づくシミュレーション、欠陥のもつ画像特徴を検出する画像処理、大量データから有用な法則を導く機械学習を活用することで、欠陥に関する情報を高速・正確に抽出する方法を開発しました。この方法は、半導体結晶の発光イメージに限らず、多くの計測画像に適用できる技術要素を持つため、今後さまざまな応用展開を進める予定です。

Report

(4 results)
  • 2018 Annual Research Report   Final Research Report ( PDF )
  • 2017 Annual Research Report
  • 2016 Annual Research Report
  • Research Products

    (50 results)

All 2019 2018 2017 2016

All Journal Article (11 results) (of which Int'l Joint Research: 2 results,  Peer Reviewed: 8 results,  Open Access: 1 results,  Acknowledgement Compliant: 1 results) Presentation (37 results) (of which Int'l Joint Research: 11 results,  Invited: 15 results) Book (1 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] Fabrication of SnS/BaSi2 heterojunction by thermal evaporation for solar cell applications2019

    • Author(s)
      Hara Kosuke O.、Arimoto Keisuke、Yamanaka Junji、Nakagawa Kiyokazu
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 58 Issue: SB Pages: SBBF01-SBBF01

    • DOI

      10.7567/1347-4065/aaf69a

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Diffusion process in BaSi2 film formation by thermal evaporation and its relation to electrical properties2018

    • Author(s)
      Hara Kosuke O.、Arimoto Keisuke、Yamanaka Junji、Nakagawa Kiyokazu
    • Journal Title

      Journal of Materials Research

      Volume: 33 Issue: 16 Pages: 2297-2305

    • DOI

      10.1557/jmr.2018.181

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effect of the Growth Conditions on the Crystal Quality in Solution Growth of SiC Using Cr Solvent without Molten Si2018

    • Author(s)
      Suzuki Koki、Hyun Koang Yong、Taishi Toshinori
    • Journal Title

      Materials Science Forum

      Volume: 924 Pages: 35-38

    • DOI

      10.4028/www.scientific.net/msf.924.35

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Solution Growth of SiC from the Crucible Bottom with Dipping under Unsaturation State of Carbon in Solvent2018

    • Author(s)
      Taishi Toshinori、Takahashi Masaru、Tsuchimoto Naomichi、Suzuki Koki、Hyun Koang Yong
    • Journal Title

      Materials Science Forum

      Volume: 924 Pages: 51-54

    • DOI

      10.4028/www.scientific.net/msf.924.51

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Numerical simulation of carbon concentration in top-seeded solution growth of SiC2018

    • Author(s)
      Naomichi Tsuchimoto, Shingo Ehara, Toshinori Taishi
    • Journal Title

      The 8th Forum on Science and Technology of Silicon Material

      Volume: 8 Pages: 372-376

    • Related Report
      2018 Annual Research Report
  • [Journal Article] Solution growth of SiC without molten Si using concave ceramic SiC feed2018

    • Author(s)
      Koki Suzuki, Toshinori Taishi
    • Journal Title

      The 8th Forum on Science and Technology of Silicon Material

      Volume: 8 Pages: 377-381

    • Related Report
      2018 Annual Research Report
  • [Journal Article] Generation and propagation of defects in multicrystalline silicon for solar cells2018

    • Author(s)
      Kentaro Kutsukake, Yusuke Hayama, Tetsuya Matsumoto, Hiroaki Kudo, Tatsuya Yokoi, Yutaka Ohno, and Noritaka Usami
    • Journal Title

      The 8th Forum on Science and Technology of Silicon Material

      Volume: 8 Pages: 152-153

    • Related Report
      2018 Annual Research Report
  • [Journal Article] Suppression of Near-interface Oxidation in Thermally-evaporated BaSi2 Films and Its Effects on Preferred Orientation and the Rectification Behavior of n-BaSi2/p+-Si Diodes2018

    • Author(s)
      Hara Kosuke O.、Arimoto Keisuke、Yamanaka Junji、Nakagawa Kiyokazu、Usami Noritaka
    • Journal Title

      MRS Advances

      Volume: 3 Issue: 25 Pages: 1387-1392

    • DOI

      10.1557/adv.2018.31

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] BaSi2 formation mechanism in thermally evaporated films and its application to reducing oxygen impurity concentration2018

    • Author(s)
      Hara Kosuke O.、Yamamoto Chiaya、Yamanaka Junji、Arimoto Keisuke、Nakagawa Kiyokazu、Usami Noritaka
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 57 Issue: 4S Pages: 04FS01-04FS01

    • DOI

      10.7567/jjap.57.04fs01

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of BaSi2 thin films capped with amorphous Si using a single evaporation source2018

    • Author(s)
      Kosuke O. Hara, Cham Thi Trinh, Yasuyoshi Kurokawa, Keisuke Arimoto, Junji Yamanaka, Kiyokazu Nakagawa, Noritaka Usami
    • Journal Title

      Thin Solid Films

      Volume: 636 Pages: 546-551

    • DOI

      10.1016/j.tsf.2017.06.055

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Post-annealing effects on the surface structure and carrier lifetime of evaporated BaSi2 films2017

    • Author(s)
      Kosuke O. Hara, Cham Thi Trinh, Yasuyoshi Kurokawa, Keisuke Arimoto, Junji Yamanaka, Kiyokazu Nakagawa, and Noritaka Usami
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 56 Issue: 4S Pages: 04CS07-04CS07

    • DOI

      10.7567/jjap.56.04cs07

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Presentation] Generation and propagation of dislocations in multicrystalline silicon for solar cells2019

    • Author(s)
      Kentaro Kutsukake
    • Organizer
      International Symposium on Modeling of Crystal Growth Processes and Devices
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 近接蒸着によるBaSi2薄膜作製2019

    • Author(s)
      原康祐、瀧澤周平、有元圭介、山中淳二、中川清和
    • Organizer
      第66回応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] SiC 溶液成長における溶質の溶解・輸送・成長2019

    • Author(s)
      太子敏則、鈴木皓己、土本直道
    • Organizer
      日本金属学会2019 年春期(第164 回)講演大会
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] Adaptive mapping for quick material evaluation2018

    • Author(s)
      Kentaro Kutsukake, Ryota Kikuchi, Koji Shimoyama, Kenichi Inoue
    • Organizer
      10th International Workshop on Crystalline Silicon for Solar Cells
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] GaN結晶の多光子励起PL画像からの 転位の3次元配置に関する数値情報抽出2018

    • Author(s)
      沓掛健太朗、谷川智之、松岡隆志、井上憲一
    • Organizer
      第79回応用物理学会秋季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] PV研究におけるデータサイエンス活用に向けて2018

    • Author(s)
      沓掛健太朗
    • Organizer
      JSAP若手チャプター 太陽光エネルギー変換機能材料・デバイス開発研究会 第1回研究会
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] Adaptive mapping for quick material evaluation2018

    • Author(s)
      Kentaro Kutsukake
    • Organizer
      The 19th KIM-JIM Symposium
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 結晶評価へのデータ科学活用2018

    • Author(s)
      沓掛健太朗
    • Organizer
      応用物理学会東海支部 基礎セミナー「結晶成長:原理と成長法、及び、歪・欠陥の評価技術の最前線」
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] Composition control of semiconducting BaSi2 films fabricated by thermal evaporation2018

    • Author(s)
      Hara, K. O., Arimoto, K., Yamanaka, J., and Nakagawa, K.
    • Organizer
      Collaborative Conference on Materials Research (CCMR) 2018
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Formation of SnS/BaSi2 Heterojunction by Sequential Thermal Evaporation toward Solar Cell Applications2018

    • Author(s)
      Hara, K. O., Arimoto, K., Yamanaka, J., and Nakagawa, K.
    • Organizer
      2018 International Conference on Solid State Devices and Materials (SSDM2018)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 高速熱蒸着によるBaSi2薄膜作製技術の進展2018

    • Author(s)
      原康祐、瀧澤周平、有元圭介、山中淳二、中川清和
    • Organizer
      第32回シリサイド系半導体研究会
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] 連続蒸着とポストアニールによるSnS/BaSi2ヘテロ接合の作製2018

    • Author(s)
      原康祐、瀧澤周平、有元圭介、山中淳二、中川清和
    • Organizer
      第79回応用物理学会秋季学術講演会
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] 溶質供給源の形状を変化させたCr単一溶媒でのSiC溶液成長2018

    • Author(s)
      鈴木皓己、太子敏則
    • Organizer
      第47回結晶成長国内会議
    • Related Report
      2018 Annual Research Report
  • [Presentation] SiC溶液法における炭素濃度の経時変化を考慮したシミュレーションとその実測2018

    • Author(s)
      土本直道、江原槙吾、太子敏則
    • Organizer
      第47回結晶成長国内会議
    • Related Report
      2018 Annual Research Report
  • [Presentation] データ科学を活用した材料創製・材料評価に向けて2018

    • Author(s)
      沓掛健太朗、宇佐美徳隆、工藤博章、松本哲也、横井達矢
    • Organizer
      日本金属学会2018春季学術講演会
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] SiC溶液成長における溶液中の炭素濃度の経時変化および成長時の非定常解析2018

    • Author(s)
      太子敏則
    • Organizer
      日本結晶成長学会バルク成長分科会
    • Related Report
      2017 Annual Research Report
  • [Presentation] BaSi2蒸着における蒸気組成と成膜過程解析2018

    • Author(s)
      原康祐、有元圭介、山中淳二、中川清和
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 物理計測の適応的マッピング2018

    • Author(s)
      沓掛健太朗
    • Organizer
      日本金属学会東海支部、日本鉄鋼協会東海支部学術討論会
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] SiCおよび機能性バルク単結晶の育成~融液成長からのSiC溶液成長のアプローチ~2018

    • Author(s)
      太子敏則、干川圭吾
    • Organizer
      日本学術振興会第161委員会第103回研究会
    • Related Report
      2017 Annual Research Report
  • [Presentation] データ科学的手法による効率的なマッピングの検討(1)2017

    • Author(s)
      菊地亮太、沓掛健太朗、出浦桃子、大野裕、下山幸治、米永一郎
    • Organizer
      第64回 応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜、横浜
    • Year and Date
      2017-03-14
    • Related Report
      2016 Annual Research Report
  • [Presentation] データ科学的手法による効率的なマッピングの検討(2)2017

    • Author(s)
      沓掛健太朗、菊地亮太、出浦桃子、大野裕、下山幸治、米永一郎
    • Organizer
      第64回 応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜、横浜
    • Year and Date
      2017-03-14
    • Related Report
      2016 Annual Research Report
  • [Presentation] BaSi2蒸着膜中の酸素不純物に関する調査2017

    • Author(s)
      原 康祐、山本 千綾、山中 淳二、有元 圭介、中川 清和、黒川 康良、宇佐美 徳隆
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜、横浜
    • Year and Date
      2017-03-14
    • Related Report
      2016 Annual Research Report
  • [Presentation] データ科学を駆使した適応的マッピング測定2017

    • Author(s)
      沓掛健太朗
    • Organizer
      日本学術振興会第145委員会第156回研究会
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] Simple Thermal Evaporation Route to Single-Phase and Highly-Oriented BaSi2 Thin Films2017

    • Author(s)
      Kosuke O. Hara, Chiaya Yamamoto, Junji Yamanaka, Keisuke Arimoto, Kiyokazu Nakagawa, Noritaka Usami
    • Organizer
      2017 MRS Fall Meetings & Exhibit
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Development of preferred orientation in evaporated BaSi2 films on Si(100) by controlling the near-interface structure2017

    • Author(s)
      Kosuke O. Hara, Chiaya Yamamoto, Junji Yamanaka, Keisuke Arimoto, Kiyokazu Nakagawa, and Noritaka Usami
    • Organizer
      27th International Photovoltaic Science and Engineering Conference
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] TSSG法によるSiC溶液成長における溶媒中の炭素の溶解・輸送解析と結晶品質に与える影響2017

    • Author(s)
      太子敏則
    • Organizer
      第12回日本フラックス成長研究発表会
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] Microstructural Characteristics of BaSi2 Epitaxial Films Fabricated by Thermal Evaporation2017

    • Author(s)
      K. O. Hara, C. Yamamoto, J. Yamanaka, K. Arimoto, K. Nakagawa, N. Usami
    • Organizer
      2017 International Conference on Solid State Devices and Materials
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] BaSi2蒸着膜中の酸素濃度低減と結晶配向への影響2017

    • Author(s)
      原康祐、山中淳二、有元圭介、中川清和、宇佐美徳隆
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] データ科学的手法による効率的なマッピング(3):測定点移動距離の検討2017

    • Author(s)
      沓掛健太朗、菊地亮太、大野裕、下山幸治
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] BaSi2蒸着膜のa-Si被覆による表面酸化抑制2017

    • Author(s)
      原康祐,Cham Thi Trinh,黒川康良,有元圭介,山中淳二,中川清和,宇佐美徳隆
    • Organizer
      第14 回「次世代の太陽光発電システム」シンポジウム
    • Related Report
      2017 Annual Research Report
  • [Presentation] データ科学的手法を用いた 効率的なマッピングの提案2017

    • Author(s)
      沓掛健太朗、大野 裕、出浦 桃子、米永 一郎、菊地亮太、下山幸治
    • Organizer
      第14回「次世代の太陽光発電システム」シンポジウム
    • Related Report
      2017 Annual Research Report
  • [Presentation] 太陽電池用シリコンのキャスト成長における欠陥制御2017

    • Author(s)
      沓掛健太朗
    • Organizer
      学振175委員会 第6回次世代シリコン太陽電池分科会研究会
    • Place of Presentation
      九州大学、福岡
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] Fabrication of BaSi2 thin films passivated by amorphous Si using a single evaporation source2016

    • Author(s)
      Kosuke O. Hara, Cham Thi Trinh, Yasuyoshi Kurokawa, Keisuke Arimoto, Junji Yamanaka, Kiyokazu Nakagawa, and Noritaka Usami
    • Organizer
      26th Photovoltaic Science and Engineering Conference (PVSEC-26)
    • Place of Presentation
      Sands Expo and Convention Centre, Singapore
    • Year and Date
      2016-10-24
    • Related Report
      2016 Annual Research Report
  • [Presentation] Surface Modification of Evaporated BaSi2 Films by In-situ Post-annealing and Amorphous Silicon Capping2016

    • Author(s)
      K.O. Hara, C.T. Trinh, Y. Kurokawa, K. Arimoto, J. Yamanaka, K. Nakagawa, N. Usami
    • Organizer
      2016 International Conference on Solid State Devices and Materials (SSDM2016)
    • Place of Presentation
      Tsukuba International Congress Center, Tsukuba, Japan
    • Year and Date
      2016-09-26
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 単一原料の蒸着によるa-Si/BaSi2積層構造の作製2016

    • Author(s)
      原 康祐、Trinh Cham Thi、黒川 康良、有元 圭介、山中 淳二、中川 清和、宇佐美 徳隆
    • Organizer
      第77回応用物理学会秋季学術講演会
    • Place of Presentation
      朱鷺メッセ、新潟
    • Year and Date
      2016-09-13
    • Related Report
      2016 Annual Research Report
  • [Presentation] Grain boundaries in silicon crystals: Crystallographic interaction and dislocation generation during crystal growth2016

    • Author(s)
      Kentaro Kutsukake, Yutaka Ohno, Momoko Deura, and Ichiro Yonenaga
    • Organizer
      The 18th International Conference on Crystal Growth and Epitaxy
    • Place of Presentation
      Nagoya Congress Center, Nagoya, Japan
    • Year and Date
      2016-08-07
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Luminescence imaging through a spatially-resolved camera for defect characterization in silicon crystals2016

    • Author(s)
      Kentaro Kutsukake, Momoko Deura, Yutaka Ohno, and Ichiro Yonenaga
    • Organizer
      Summit of Materials Science (SMS2016) 100th Anniversary of Institute for Materials Research(Tohoku Univ. IMR)
    • Place of Presentation
      Institute for Materials Research, Tohoku University, Sendai, Japan
    • Year and Date
      2016-05-18
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Book] Chap. Growth of Crystalline Silicon for Solar Cells: Mono-Like Method, in Handbook of Photovoltaic Silicon2018

    • Author(s)
      Kutsukake Kentaro
    • Total Pages
      20
    • Publisher
      Springer
    • Related Report
      2018 Annual Research Report
  • [Patent(Industrial Property Rights)] マッピング方法および測定装置2017

    • Inventor(s)
      沓掛健太朗、菊池亮太、下山幸治
    • Industrial Property Rights Holder
      沓掛健太朗、菊池亮太、下山幸治
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2017-032950
    • Filing Date
      2017-02-24
    • Related Report
      2016 Annual Research Report

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Published: 2016-04-21   Modified: 2020-03-30  

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