| Budget Amount *help |
¥16,900,000 (Direct Cost: ¥13,000,000、Indirect Cost: ¥3,900,000)
Fiscal Year 2018: ¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000)
Fiscal Year 2017: ¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000)
Fiscal Year 2016: ¥7,540,000 (Direct Cost: ¥5,800,000、Indirect Cost: ¥1,740,000)
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| Outline of Final Research Achievements |
The technology for the inspection of the surface profilometry of the product in the manufacturing field was studied. A two-dimensional single-shot miscroscopy, which can measure the distance in the millimeter region with micrometer resolution in the depth direction, was constructed as non-contact measurement using an optical interferometer.Single-shot two-dimensional tomographic images obtained by high-order pseudo-optical comb interference fringes were observed by a CCD with a high volume sampling rate, using an optical comb that can be easily generated as a light source. On the other hand, the fundamental technology of pseudo optical comb interference was developed by developing an ultra-high-speed optical frequency scanning repetition (1 MHz). The repetition rate is faster than the imaging time of CCD and a high-speed discrete wavelength tunable laser, which performs frequency scanning discretely (200 GHz interval) as the light source.
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