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Develpment of a technique to transfer nanodot in lattice with homo- hetero- and nanogap

Research Project

Project/Area Number 16H03885
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Optical engineering, Photon science
Research InstitutionOsaka University

Principal Investigator

Nakata Yoshiki  大阪大学, レーザー科学研究所, 准教授 (70291523)

Co-Investigator(Kenkyū-buntansha) 坪井 泰之  大阪市立大学, 大学院理学研究科, 教授 (00283698)
奈良崎 愛子  国立研究開発法人産業技術総合研究所, エレクトロニクス・製造領域, 主任研究員 (40357687)
東海林 竜也  大阪市立大学, 大学院理学研究科, 講師 (90701699)
Research Collaborator MIYANAGA Noriaki  
Project Period (FY) 2016-04-01 – 2019-03-31
Project Status Completed (Fiscal Year 2018)
Budget Amount *help
¥10,920,000 (Direct Cost: ¥8,400,000、Indirect Cost: ¥2,520,000)
Fiscal Year 2018: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2017: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2016: ¥7,540,000 (Direct Cost: ¥5,800,000、Indirect Cost: ¥1,740,000)
Keywordsレーザー誘起ドット転写 / 金属ナノドット / 周期構造 / ナノ3Dプリンター / 超短パルスレーザー / ビーム整形 / (2)ホモ接合・ヘテロ接合・ナノギャップ構造 / ナノプリンター / 表面増強ラマン散乱 / バイオセンシング / 触媒 / プラズモニクス / 第二高調波発生 / 応用光学・量子光工学 / ナノ材料 / 分析科学 / 材料加工・処理 / レーザー誘起転写法 / 分析化学 / マイクロアレイ / 触媒・化学プロセス
Outline of Final Research Achievements

By combining laser-induced dot transfer and interfering ultra-short pulse laser processing, a new metal 3D nano-printer is proposed. Results are as follows; (1) single shot deposition of Au nanodot array, (2) fabrication of homo- and nanogap (Δl=17.4nm) by multi- generation in a single shot, (3) hetero- and alternating Au and Pt nanodots by two shots’ process, (4) ultrafine beam shaping by optimizing phase a grating and a spatial frequency filtering, (5) observation of the SERS activity of Au nanodots. New 3D nano-printer technique with better adaptability to different materials and processing speed was developed successfully.

Academic Significance and Societal Importance of the Research Achievements

レーザー誘起ドット転写法と超短パルスレーザー干渉パターン加工法の組合わせは世界初の成果であり、その性能もユニークかつ高性能である。一方、紫外から近赤外域のレーザー光に適用できるユニバーサルかつ高精度なビーム整形技術は、全てのレーザーのポテンシャルを最大限引き出す鍵となり、基礎研究から製造技術、光・電子部品、医療など多彩な分野で応用が期待される。これらの研究成果を元に2件の国内特許出願(海外は1件準備中)、国内プレスリリース及び海外配信を行った。また、11本の論文を執筆し、さらに2件のkeynote講演及び16件の招待講演を得た。また、3件の受賞を得た。

Report

(4 results)
  • 2018 Annual Research Report   Final Research Report ( PDF )
  • 2017 Annual Research Report
  • 2016 Annual Research Report
  • Research Products

    (52 results)

All 2019 2018 2017 2016

All Journal Article (10 results) (of which Peer Reviewed: 5 results,  Open Access: 2 results,  Acknowledgement Compliant: 3 results) Presentation (39 results) (of which Int'l Joint Research: 14 results,  Invited: 21 results) Book (1 results) Patent(Industrial Property Rights) (2 results)

  • [Journal Article] Utilization of the high spatial- frequency component in adaptive beam shaping by using a virtual diagonal phase grating2019

    • Author(s)
      Y. Nakata, K. Osawa, N. Miyanaga
    • Journal Title

      Scientific Reports

      Volume: 9

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] "Laser lift-off process for additive micropatterning of functional particles and films"2018

    • Author(s)
      A. Narazaki, T. Sato, H. Niino, Y. Nakata, T. Shoji, Y. Tsuboi, A. Oyane, H. Miyaji
    • Journal Title

      Proc. of the 2018 IEEE International Symposium on Micro-NanoMechatronics and Human Science (MHS2018)

      Volume: 1 Pages: 333-337

    • Related Report
      2018 Annual Research Report
  • [Journal Article] Local Melting of Gold Thin Films by Femtosecond Laser-Interference Processing to Generate Nanoparticles on a Source Target2018

    • Author(s)
      Nakata Yoshiki、Murakawa Keiichi、Miyanaga Noriaki、Narazaki Aiko、Shoji Tatsuya、Tsuboi Yasuyuki
    • Journal Title

      Nanomaterials

      Volume: 8 Issue: 7 Pages: 477-477

    • DOI

      10.3390/nano8070477

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] レーザー誘起転写法:膜転写と顕微画像レーザー分光法を用いたプロセス可視化2018

    • Author(s)
      中田芳樹、岡田龍雄
    • Journal Title

      オプトロニクス

      Volume: 433 Pages: 120-126

    • Related Report
      2017 Annual Research Report
  • [Journal Article] レーザー転写パターニング -ナノ粒子から機能性薄膜までー2018

    • Author(s)
      奈良崎 愛子
    • Journal Title

      オプトロニクス

      Volume: 433 Pages: 127-131

    • Related Report
      2017 Annual Research Report
  • [Journal Article] 空間光位相変調器とフーリエ光学系を用いたビーム整形に関する研究2018

    • Author(s)
      大澤一仁,林 英輝,吉田匡孝,中田芳樹,宮永憲明
    • Journal Title

      光・量子デバイス研究会 資料

      Volume: OQD-18 Pages: 39-42

    • Related Report
      2017 Annual Research Report
  • [Journal Article] レーザー誘起ドット転写による微粒子形成2017

    • Author(s)
      良崎 愛子、佐藤 正健、新納 弘之、中田 芳樹、東海林 竜也、坪井 泰之
    • Journal Title

      電子材料研究会資料「物質生成・材料合成を目指した高エネルギープロセス」

      Volume: EFM-17 Pages: 7-10

    • Related Report
      2017 Annual Research Report
  • [Journal Article] コヒーレント光干渉パターン加工法の進展2017

    • Author(s)
      中田芳樹
    • Journal Title

      オプトロニクス

      Volume: 4 Pages: 139-143

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Beam shaping by spatial light modulator and 4f system to square and top-flat for interference laser processing2017

    • Author(s)
      Kazuhito Osawa, Masataka Yoshida, Yoshiki Nakata, Noriaki Miyanaga, Aiko Narazaki, Tatsuya Shoji, Yasuyuki Tsuboi
    • Journal Title

      Proc. SPIE

      Volume: 10091

    • DOI

      10.1117/12.2253983

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Sub-micron period metal lattices fabricated by interfering ultraviolet femtosecond laser processing2016

    • Author(s)
      Yoshiki Nakata, Yoshiki Matsuba, Noriaki Miyanaga
    • Journal Title

      Appl. Phys. A

      Volume: 122 Issue: 5 Pages: 1-6

    • DOI

      10.1007/s00339-016-0061-4

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Presentation] レーザー加工におけるマクロとミクロのビーム整形技術2019

    • Author(s)
      中田芳樹
    • Organizer
      レーザー学会学術講演会
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] 干渉パターン加工法の近年の進展2019

    • Author(s)
      中田芳樹、小坂悠起、林英輝、斉藤哲也、宮永憲明、大澤一仁、吉田匡孝、奈良崎愛子、東海林竜也、坪井泰之
    • Organizer
      光・量子デバイス研究会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Nanostructures in lattice fabricated by interference laser processing2019

    • Author(s)
      Y. Nakata
    • Organizer
      Advanced Functional Materials
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Fabrication of chiral structures by using interference pattern of circularly polarized beams2019

    • Author(s)
      Y. Kosaka, E. Hayashi, Y. Nakata, M. Yoshida
    • Organizer
      LPM 2019; Laser precision microfabrication
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Beam shaping in macro- and micro- scale for laser processing2019

    • Author(s)
      Y. Nakata, Y. Kosaka, E. Hayashi, N. Miyanaga, A. Narazaki, T. Shoji, Y. Tsuboi, K. Osawa, M. Yoshida
    • Organizer
      International Symposium “Fundamentals of Laser Assisted Micro- and Nanotechnologies
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] マクロとミクロにビーム整形及びナノマテリアル創成2019

    • Author(s)
      中田芳樹
    • Organizer
      第91回レーザ加工学会
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] レーザー干渉パターン加工法の最近の進展2019

    • Author(s)
      中田芳樹、小坂悠起、林英輝、宮永憲明、大澤一仁、吉田匡孝、奈良崎愛子、東海林竜也、坪井泰之
    • Organizer
      2019年 電気学会 電子・情報・システム部門大会
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] Fine Beam Shaping Technique by Spatial Light Modulator and 4f System for Area Processing2019

    • Author(s)
      Y. Nakata, T. Aoyama, Y. Kosaka, E. Hayashi, N. Miyanaga
    • Organizer
      UltrafastLight-2019
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] Fabrication of nanostructures by interference laser processing and beam shaping technique2019

    • Author(s)
      Y. Nakata
    • Organizer
      ICALEO
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] レーザーパターニング&コーティングの最新技術動向2018

    • Author(s)
      奈良崎愛子
    • Organizer
      OPIE ’18(OPTICS&PHOTONICS International Exhibition)
    • Related Report
      2018 Annual Research Report
  • [Presentation] Laser lift-off process for additive micropatterning of functional particles and films2018

    • Author(s)
      A. Narazaki, T. Sato, H. Niino, Y. Nakata, T. Shoji, Y. Tsuboi, A. Oyane, H. Miyaji
    • Organizer
      MHS2018, 29th 2018 International Symposium on Micro-NanoMechatronics and Human Science
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Fine Beam Shaping Technique by Spatial Light Modulator and 4f System for Area Processing2018

    • Author(s)
      Y. Nakata, H. Hayashi, K. Osawa, M. Yoshida, N. Miyanaga
    • Organizer
      FLA 2018; Frontiers in Lasers and Applications
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Universal beam shaping technique and interference control for area processing of nanostructures in lattice2018

    • Author(s)
      Y. Nakata
    • Organizer
      LPM 2018; Laser precision microfabrication
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 干渉パターン照射を用いた周期配列カイラル構造の一括作製2018

    • Author(s)
      中田芳樹、吉田匡孝、宮永憲明
    • Organizer
      応用物理学会
    • Related Report
      2018 Annual Research Report
  • [Presentation] フェムト秒レーザー干渉加工で形成される金ナノ微粒子のドナー薄膜ターゲット上捕集2018

    • Author(s)
      中田芳樹、村川恵一、宮永憲明、奈良崎愛子、東海林竜也、坪井泰之
    • Organizer
      応用物理学会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Nanostructures in lattice fabricated by interference laser processing technique2018

    • Author(s)
      Y. Nakata, E. Hayashi, N. Miyanaga
    • Organizer
      UltrafastLight-2018
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 光のミクロとマクロの制御及び加工応用2018

    • Author(s)
      中田芳樹
    • Organizer
      第62回光波センシング技術研究会講演会
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] 空間光位相変調器とフーリエ光学系を用いたビーム整形に関する研究2018

    • Author(s)
      大澤一仁,林 英輝,吉田匡孝,中田芳樹,宮永憲明
    • Organizer
      光・量子デバイス研究会
    • Related Report
      2017 Annual Research Report
  • [Presentation] レーザー転写パターニング技術の新展開-ナノ粒子から機能性薄膜まで-2018

    • Author(s)
      奈良崎 愛子、佐藤 正健、新納 弘之
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] Fabrication of nanostructures in hexagonal lattice by using six-beam interference pattern of femtosecond laser2017

    • Author(s)
      M. Yoshida, K. Osawa, Y. Nakata, N. Miyanaga
    • Organizer
      Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII
    • Place of Presentation
      Moscone conference center, USA
    • Year and Date
      2017-01-30
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Beam shaping by spatial light modulator and 4f system to square and top-flat for interference laser processing2017

    • Author(s)
      K. Osawa, M. Yoshida, Y. Nakata, N. Miyanaga, A. Narazaki, T. Shoji, Y. Tsuboi
    • Organizer
      Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII
    • Place of Presentation
      Moscone conference center, USA
    • Year and Date
      2017-01-30
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] コヒーレントビームの干渉パターン制御とナノ周期構造の形成2017

    • Author(s)
      中田芳樹、宮永憲明
    • Organizer
      レーザー学会学術講演会第37回年次大会
    • Place of Presentation
      徳島大学
    • Year and Date
      2017-01-07
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] Periodic nano-texturing by interference femtosecond laser processing technique2017

    • Author(s)
      Y. Nakata, M. Yoshida, K. Osawa, N. Miyanaga
    • Organizer
      The 25th International Conference on Advanced Laser Technologies
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] metallic nanostructures in lattice by interference femtosecond laser processing2017

    • Author(s)
      Yoshiki Nakata
    • Organizer
      Metanano
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] コヒーレント光干渉パターン加工法の進展2017

    • Author(s)
      中田芳樹
    • Organizer
      月刊オプトロニクス特集連動特別セミナー『光波・ビーム制御技術によるレーザー加工法を考察!』
    • Related Report
      2017 Annual Research Report
  • [Presentation] コヒーレント光干渉を使ったレーザー精密加工2017

    • Author(s)
      中田芳樹
    • Organizer
      第22回光ものづくりセミナー <新しいレーザー加工の動向と中小企業への期待>
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] レーザー誘起ドット転写による微粒子形成2017

    • Author(s)
      良崎 愛子、佐藤 正健、新納 弘之,中田 芳樹、東海林 竜也、坪井 泰之
    • Organizer
      電子材料研究会 物質生成・材料合成を目指した高エネルギープロセス
    • Related Report
      2017 Annual Research Report
  • [Presentation] レーザー加工による表面機能化 ~CAEとプロセス計測で生みだす最適ソリューション~2017

    • Author(s)
      奈良崎愛子, 佐藤正健
    • Organizer
      InterOpto 2017(インターオプト2017)
    • Related Report
      2017 Annual Research Report
  • [Presentation] 超短パルスレーザー干渉加工法における近年の進展2017

    • Author(s)
      中田芳樹、吉田匡孝、大澤一仁、宮永憲明
    • Organizer
      電気学会 光・量子デバイス研究会「レーザプロセシングと先端技術」
    • Place of Presentation
      伊勢市観光文化会館
    • Related Report
      2016 Annual Research Report
  • [Presentation] レーザー転写による微細パターン付加形成技術開発2017

    • Author(s)
      奈良崎愛子、佐藤正健、新納弘之、 中田芳樹、東海林竜也、坪井泰之
    • Organizer
      産総研 材料・化学シンポジウム「21世紀の化学反応とプロセス -快適な生活を支える機能性材料の新展開-」
    • Place of Presentation
      つくば国際会議場
    • Related Report
      2016 Annual Research Report
  • [Presentation] Laser-Induced Forward Transfer of Functional Oxides2016

    • Author(s)
      A. Narazaki, T. Sato, H. Niino
    • Organizer
      第26回日本MRS年次大会
    • Place of Presentation
      横浜情報文化センター
    • Year and Date
      2016-12-19
    • Related Report
      2016 Annual Research Report
  • [Presentation] Induction of energy on nano-region by laser and material processing2016

    • Author(s)
      Y. Nakata, K. Osawa, M. Yoshida, N. Miyanaga
    • Organizer
      EMN Energy and Sustain 2016
    • Place of Presentation
      hotel mystays Shin Osaka conference center
    • Year and Date
      2016-11-29
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 超短パルスレーザーの6ビーム干渉パターンを用いた金薄膜の加工2016

    • Author(s)
      吉田 匡孝、大澤 一仁、中田 芳樹、宮永 憲明
    • Organizer
      第77回応用物理学会秋季学術講演会
    • Place of Presentation
      朱鷺メッセ
    • Year and Date
      2016-09-13
    • Related Report
      2016 Annual Research Report
  • [Presentation] 空間光位相変調器を用いたビーム強度分布の整形2016

    • Author(s)
      大澤 一仁、吉田 匡孝、中田 芳樹、宮永 憲明、奈良崎 愛子、東海林 竜也、坪井 泰之
    • Organizer
      第77回応用物理学会秋季学術講演会
    • Place of Presentation
      朱鷺メッセ
    • Year and Date
      2016-09-13
    • Related Report
      2016 Annual Research Report
  • [Presentation] On-Demand Deposition of Gold Nanodots by Laser-Induced Dot Transfer2016

    • Author(s)
      A. Narazaki, Y. Nakata, T. Shoji, Y. Tsuboi
    • Organizer
      JSAP-OSAジョイントシンポジウム
    • Place of Presentation
      朱鷺メッセ
    • Year and Date
      2016-09-13
    • Related Report
      2016 Annual Research Report
  • [Presentation] Nano-fabrication by interference pattern of coherent beam2016

    • Author(s)
      Y. Nakata, M. Yoshida, K. Osawa, N. Miyanaga
    • Organizer
      10th International conference on photoexcited processes and applications
    • Place of Presentation
      Transilvania University
    • Year and Date
      2016-08-29
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Recent progress on interference femtosecond laser processing2016

    • Author(s)
      Y. Nakata, M. Yoshida, K. Osawa, N. Miyanaga
    • Organizer
      International symposium "Fundamentals of Laser Assisted Micro-and Nanotechnologies"
    • Place of Presentation
      Kochubey Mansion hotel
    • Year and Date
      2016-06-27
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Interference femtosecond laser processing using six beams2016

    • Author(s)
      Y. Nakata, M. Yoshida, K. Osawa, N. Miyanaga
    • Organizer
      17th International symposium on laser precision microfabrication
    • Place of Presentation
      Whyndham Grand Xi'an South
    • Year and Date
      2016-05-23
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Metal droplets smaller than 100 nm radius fabricated by femtosecond laser processing of thin films2016

    • Author(s)
      Y. Nakata, N. Miyanaga
    • Organizer
      EMN meeting on Droplets 2016
    • Place of Presentation
      NH Collection Aranzazu
    • Year and Date
      2016-05-10
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research / Invited
  • [Book] 修士学位論文:空間光位相変調器とフーリエ光学系を用いた ビーム整形の精度向上と加工応用に関する研究2018

    • Author(s)
      大澤 一仁
    • Total Pages
      67
    • Publisher
      大阪大学
    • Related Report
      2017 Annual Research Report
  • [Patent(Industrial Property Rights)] ビーム整形装置2018

    • Inventor(s)
      中田芳樹、大澤一仁
    • Industrial Property Rights Holder
      中田芳樹、大澤一仁
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2018-117035
    • Filing Date
      2018
    • Related Report
      2018 Annual Research Report
  • [Patent(Industrial Property Rights)] 光渦発生方法及び光渦発生装置2018

    • Inventor(s)
      中田芳樹、吉田匡孝
    • Industrial Property Rights Holder
      中田芳樹、吉田匡孝
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2018-118906
    • Filing Date
      2018
    • Related Report
      2018 Annual Research Report

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Published: 2016-04-21   Modified: 2020-03-30  

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