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Development of ultra-precision polishing using carbon onion abrasives with controlled molecular shape

Research Project

Project/Area Number 16H04242
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Production engineering/Processing studies
Research InstitutionTokyo Institute of Technology

Principal Investigator

Hirata Atsushi  東京工業大学, 工学院, 教授 (50242277)

Co-Investigator(Kenkyū-buntansha) 青野 祐子  東京工業大学, 工学院, 准教授 (20610033)
Research Collaborator Saito Yusuke  
Murofushi Riho  
Ota Ryuji  
Sano Ryuki  
Project Period (FY) 2016-04-01 – 2019-03-31
Project Status Completed (Fiscal Year 2018)
Budget Amount *help
¥13,520,000 (Direct Cost: ¥10,400,000、Indirect Cost: ¥3,120,000)
Fiscal Year 2018: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
Fiscal Year 2017: ¥2,600,000 (Direct Cost: ¥2,000,000、Indirect Cost: ¥600,000)
Fiscal Year 2016: ¥8,580,000 (Direct Cost: ¥6,600,000、Indirect Cost: ¥1,980,000)
Keywords精密研磨 / ナノ材料 / 機械工作・生産工学 / 材料加工・処理
Outline of Final Research Achievements

Development of the function of carbon onions as a nanoscale abrasive has been aimed by controlling its molecular shape. A furnace that can raise temperatures over 2,500 degree C was prepared, and spherical, polyhedral, and hollow polyhedral carbon onion nanoparticles were produced by heat treatment using the furnace. Although polishing experiments revealed that no obvious difference is found at higher load, polyhedral carbon onion achieves higher polishing rates at lower load. Moreover, molecular dynamics simulation was carried out to examine the behavior of carbon onion nanoparticles under compression.

Academic Significance and Societal Importance of the Research Achievements

カーボンオニオンはシリコン,石英,炭化ケイ素などに対して研磨能力を示し,最終面粗さが最大高さで数オングストロームにまで達することが明らかになった.また,スクラッチを残さずにポリシング面が原子数個分のレベルにまで平滑化されることもわかった.そして,分子形態を制御し,それに適した研磨条件を設定することで,研磨速度や最終面粗さなどの点でより高度化したポリッシングが可能であること,カーボンオニオン粒子ひとつの圧縮挙動をシミュレーションできることを示した.

Report

(4 results)
  • 2018 Annual Research Report   Final Research Report ( PDF )
  • 2017 Annual Research Report
  • 2016 Annual Research Report
  • Research Products

    (7 results)

All 2019 2018 2017

All Presentation (7 results) (of which Int'l Joint Research: 1 results)

  • [Presentation] カーボンオニオン粒子の砥粒性能に与える分子形状の影響2019

    • Author(s)
      佐野龍樹,青野祐子,平田敦
    • Organizer
      2019年度精密工学会春季大会学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 経験的分子動力学法を用いた圧縮環境下におけるカーボンオニオン粒子の変形挙動解析2019

    • Author(s)
      太田立志,青野祐子,平田敦
    • Organizer
      2019年度精密工学会春季大会学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 圧縮荷重下におけるカーボンオニオン粒子の分子動力学解析2018

    • Author(s)
      太田立志,青野祐子,平田敦
    • Organizer
      第32回ダイヤモンドシンポジウム
    • Related Report
      2018 Annual Research Report
  • [Presentation] カーボンオニオンを用いた超精密研磨の研磨速度向上2017

    • Author(s)
      齋藤雄介・青野祐子・平田 敦
    • Organizer
      2017年度精密工学会春季大会学術講演会
    • Place of Presentation
      慶応大学矢上キャンパス
    • Year and Date
      2017-03-13
    • Related Report
      2016 Annual Research Report
  • [Presentation] ナノインデンテーション装置によるナノ粒子圧縮試験における圧子形状の影響2017

    • Author(s)
      室伏梨穂・青野祐子・平田 敦
    • Organizer
      2017年度精密工学会春季大会学術講演会
    • Place of Presentation
      慶応大学矢上キャンパス
    • Year and Date
      2017-03-13
    • Related Report
      2016 Annual Research Report
  • [Presentation] カーボンオニオンによる超精密研磨における加工速度の向上2017

    • Author(s)
      平田 敦,齋藤雄介,青野祐子
    • Organizer
      第31回ダイヤモンドシンポジウム
    • Related Report
      2017 Annual Research Report
  • [Presentation] Examination of ultra-precision polishing rate using carbon onion as nanoscale abrasive2017

    • Author(s)
      A. Hirata, Y. Saito and Y. Aono
    • Organizer
      11th Conference on New Diamond and Nano Carbons
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research

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Published: 2016-04-21   Modified: 2020-03-30  

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