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Innovation in manufacturing technology using electrostatic adsorption devices with surface flexibility derived from fine hair structure

Research Project

Project/Area Number 16H04297
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Intelligent mechanics/Mechanical systems
Research InstitutionTokyo Institute of Technology

Principal Investigator

Shigeki Saito  東京工業大学, 環境・社会理工学院, 教授 (30313349)

Co-Investigator(Kenkyū-buntansha) 高橋 邦夫  東京工業大学, 環境・社会理工学院, 教授 (70226827)
鞠谷 雄士  東京工業大学, 物質理工学院, 教授 (70153046)
山本 貴富喜  東京工業大学, 工学院, 准教授 (20322688)
Project Period (FY) 2016-04-01 – 2020-03-31
Project Status Completed (Fiscal Year 2019)
Budget Amount *help
¥17,290,000 (Direct Cost: ¥13,300,000、Indirect Cost: ¥3,990,000)
Fiscal Year 2019: ¥3,380,000 (Direct Cost: ¥2,600,000、Indirect Cost: ¥780,000)
Fiscal Year 2018: ¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2017: ¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2016: ¥5,590,000 (Direct Cost: ¥4,300,000、Indirect Cost: ¥1,290,000)
Keywordsマイクロ・ナノメカトロにクス / 生産技術 / 生体模倣 / マイクロロボティクス / 静電チャック / 微細毛構造 / 表面柔軟性 / ウォータージェット加工 / 3Dプリンター / 双極型 / 静電吸着 / リソグラフィー
Outline of Final Research Achievements

In this study, we have created a "micro-electrostatic electrostatic chuck device" that can attract /grasp and detach an object by electrostatic force, inspired by the micro-hair structure of the gecko fingertip. As a result, we have developed a technology that enables handling/manipulating of objects that was difficult in the past. Specifically, we have synthesized a large-area device that is fabricated by stacking electrostatic chuck modules with fine hairs having a conductive core, and proposed a mass-production method that can be reliable with a view to industrialization. The proposed technology of manipulation system that can easily grasp and release an object such as fragile minute parts, metal foil, paper, plastic film, cloth, and others could become the fundamental key technology of for the future dexterous manipulation.

Academic Significance and Societal Importance of the Research Achievements

「微細毛静電吸着デバイス」は,これまでの申請者らの研究成果蓄積をベースにしており,次世代のフレキシブルエレクトロニクスを含めた多くの分野での自動化生産技術の基盤をなりうる潜在的な可能性を持っている.研究成果を社会に実装することにより,次世代情報化社会の基盤構築に大きく貢献することが可能である.

Report

(5 results)
  • 2019 Annual Research Report   Final Research Report ( PDF )
  • 2018 Annual Research Report
  • 2017 Annual Research Report
  • 2016 Annual Research Report
  • Research Products

    (19 results)

All 2020 2019 2018 2017

All Journal Article (6 results) (of which Peer Reviewed: 6 results,  Open Access: 2 results) Presentation (13 results) (of which Int'l Joint Research: 4 results,  Invited: 1 results)

  • [Journal Article] Adhesional Contact between Rigid Sphere and Elastic Plane Covered with Thin Liquid Film Considering Contact-Angle Hysteresis2020

    • Author(s)
      Iguchi Yoji、Baek Dooyoung、Momozono Satoshi、Hemthavy Pasomphone、Saito Shigeki、Takahashi Kunio
    • Journal Title

      Tribology Online

      Volume: 15 Issue: 1 Pages: 1-8

    • DOI

      10.2474/trol.15.1

    • NAID

      130007785067

    • ISSN
      1881-218X, 1881-2198
    • Year and Date
      2020-01-15
    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Compliant bipolar electrostatic gripper using 3D-printed-layered elastic probes2020

    • Author(s)
      Hemthavy Pasomphone、Kudo Kenta、Kawano Kento、Takahashi Kunio、Saito Shigeki
    • Journal Title

      Engineering Research Express

      Volume: 2 Issue: 1 Pages: 015013-015013

    • DOI

      10.1088/2631-8695/ab67ed

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Force evaluation of electrostatic gripper with arrayed fibers consisting of parallel and coaxial electrodes2019

    • Author(s)
      Saito Shigeki、Kawamura Kazuteru、Dhelika Radon、Hemthavy Pasomphone、Takahashi Kunio、Takarada Wataru、Kikutani Takeshi
    • Journal Title

      Smart Materials and Structures

      Volume: 28 Issue: 9 Pages: 095018-095018

    • DOI

      10.1088/1361-665x/ab3243

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Analytical solution of elastic deformations inside and outside circular contact area between tilted rigid punch and elastic half space2019

    • Author(s)
      Yoji Iguchi, Pasomphone Hemthavy, Shigeki Saito & Kunio Takahashi
    • Journal Title

      Acta Mechanica

      Volume: 230 Issue: 12 Pages: 4311-4320

    • DOI

      10.1007/s00707-019-02505-9

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Development of a bipolar electrostatic chuck module with a beam-array assembly using the multiple etching process2018

    • Author(s)
      Seungman Choi Kazuki Wakabayashi, Kunio Takahashi and Shigeki Saito
    • Journal Title

      Journal of Micromechanics and Microengineering

      Volume: Vol. 28 No. 12 Issue: 12 Pages: 125011-125011

    • DOI

      10.1088/1361-6439/aae8ca

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 微細毛構造による表面柔軟性を持つ静電チャック2017

    • Author(s)
      齊藤滋規
    • Journal Title

      静電気学会誌

      Volume: Vol. 41, No.3 Pages: 134-138

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Presentation] 転がり抵抗測定および接触面観察による凝着を考慮した転がり現象の解明2020

    • Author(s)
      渡邊太平,田岡祐樹,ヘムタビーパソムポーン,高橋邦夫,齊藤滋規
    • Organizer
      2020年度精密工学会春季大会学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 微小円筒操作のための双極型静電吸着ツ ールの開発2020

    • Author(s)
      工藤健太,田岡祐樹,ヘムタビーパソムポーン,高橋邦夫,齊藤滋規
    • Organizer
      2020年度精密工学会春季大会学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 複合材のウォータージェット加工による微細毛静電チャックの製造手法の開発2020

    • Author(s)
      凌智寛,田岡祐樹,ヘムタビーパソムポーン,高橋邦夫,齊藤滋規
    • Organizer
      2020年度精密工学会春季大会学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Development of a Compliant Bipolar Electrostatic Chuck Having 3D-Printed Elastically-Deformable Beams for Handling Large Film2019

    • Author(s)
      Terumichi Hayashi, Yuki Taoka, Pasomphone Hemthavy, Kunio Takahashi, Shigeki Saito
    • Organizer
      2019 MRS Fall Meeting & Exhibit
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 集合梁構造により表面柔軟性を有する双極型静電吸着デザイスの大面積化2019

    • Author(s)
      林輝道, HEMTHAVY PASOMPHONE, 高橋邦夫, 齋藤滋規.
    • Organizer
      2019年度精密工学会春季大会
    • Related Report
      2018 Annual Research Report
  • [Presentation] A 3D-Printed-Layered Module of Compliant Electrostatic Gripper Consisting of Elastically Deformable Bipolar Micro-probes for Manipulation of Thin Film/Textile Objects2018

    • Author(s)
      Kenta KUDO, Shigeki SAITO
    • Organizer
      2018 Materials Research Society Fall meeting (MRS 2018)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 微細毛構造を用いた静電チャック2018

    • Author(s)
      齋藤滋規
    • Organizer
      第42回静電気学会全国大会
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] 表面に凹凸形状を有する誘電体の把持・離脱を目的とした微細毛構造を持つ双極型静電吸着装置の配列密度に関する実験的検討2018

    • Author(s)
      児玉理央, 若林一貴, HEMTHAVY PASOMPHONE, 高橋邦夫, 齋藤滋規
    • Organizer
      2018年度精密工学会春季大会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 集合梁構造を持つ双極型静電吸着装置による対象物離脱のための手先軌道の実験的検討2018

    • Author(s)
      工藤健太, 若林一貴, HEMTHAVY PASOMPHONE, 高橋邦夫, 齋藤滋規
    • Organizer
      2018年度精密工学会春季大会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 微細毛構造を持つ双極型静電チャックの吸着部平滑化による把持性能向上2017

    • Author(s)
      河野 健人, ヘムタビー パソムポーン,高橋 邦夫, 齊藤 滋規
    • Organizer
      2017年度精密工学会春季大会学術講演会
    • Place of Presentation
      慶應義塾大学(矢上キャンパス)
    • Year and Date
      2017-03-13
    • Related Report
      2016 Annual Research Report
  • [Presentation] リソグラフィ技術を用いた梁集合体を有する双極型静電チャックモジュールの開発2017

    • Author(s)
      崔 勝萬,河野 健人,ヘムタビー パゾムポーン,高橋 邦夫,齋藤 滋規
    • Organizer
      2017年度精密工学会春季大会学術講演会
    • Place of Presentation
      慶應義塾大学(矢上キャンパス)
    • Year and Date
      2017-03-13
    • Related Report
      2016 Annual Research Report
  • [Presentation] Development of Bipolar Electrostatic Chuck Module Having Array of Beam Assembly Using Lithography Technique2017

    • Author(s)
      Seungman Choi, Kazuki Wakabayashi, Shigeki SAITO
    • Organizer
      2017 Materials Research Society Fall meeting (MRS 2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] A 3D-printed-Layered Module of Compliant Electrostatic Gripper Consisting of Elastically Deformable Bipolar Micro-Probes,2017

    • Author(s)
      Kazuki Wakabayashi, Kento Kawano, KUNIO TAKAHASHI, Shigeki SAITO
    • Organizer
      2017 Materials Research Society Fall meeting (MRS 2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research

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Published: 2016-04-21   Modified: 2021-02-19  

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