| Budget Amount *help |
¥17,420,000 (Direct Cost: ¥13,400,000、Indirect Cost: ¥4,020,000)
Fiscal Year 2018: ¥3,380,000 (Direct Cost: ¥2,600,000、Indirect Cost: ¥780,000)
Fiscal Year 2017: ¥7,540,000 (Direct Cost: ¥5,800,000、Indirect Cost: ¥1,740,000)
Fiscal Year 2016: ¥6,500,000 (Direct Cost: ¥5,000,000、Indirect Cost: ¥1,500,000)
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| Outline of Final Research Achievements |
The purpose of this research is to develop a new ultra-high throughput evaluation technology that combines and integrated MEMS technology and combinatorial technology. The technology contributes to the efficient and prompt creation of new materials that lead to green / life innovation such as new energy, energy saving and environment resistant materials, medical technology and cell observation.
In this research, various thin film samples of several millimeters square and several tens of micrometers thick were excited simultaneously or separately by applying MEMS technology. By sensing the vibration state, we fabricated an integrated MEMS thin film library that can evaluate various physical properties with extremely high throughput. We demonstrated that it is possible to evaluate super high throughput of new materials contributing to innovation such as high performance magnetostrictive material for ultra-compact torque sensor.
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