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Demonstration of high sensitive ultrasonic detection by the integration of piezoelectric MEMS and ferroelectric gate FET

Research Project

Project/Area Number 16H04353
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionOsaka Prefecture University

Principal Investigator

Yoshimura Takeshi  大阪府立大学, 工学(系)研究科(研究院), 准教授 (30405344)

Project Period (FY) 2016-04-01 – 2019-03-31
Project Status Completed (Fiscal Year 2018)
Budget Amount *help
¥16,510,000 (Direct Cost: ¥12,700,000、Indirect Cost: ¥3,810,000)
Fiscal Year 2018: ¥5,330,000 (Direct Cost: ¥4,100,000、Indirect Cost: ¥1,230,000)
Fiscal Year 2017: ¥6,110,000 (Direct Cost: ¥4,700,000、Indirect Cost: ¥1,410,000)
Fiscal Year 2016: ¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000)
Keywords圧電 / MEMS / 超音波 / 負性容量 / 急峻スイッチング / 強誘電体 / 電子デバイス・機器 / 圧電体
Outline of Final Research Achievements

In this research, a method to detect ultrasonic signals with high sensitivity was developed by integrating a transistor with steep switching characteristics and a piezoelectrics. From the theoretical analysis, mechanism of the steep switching characteristics was established, which is originated from the transition
from steady-state and non-steady-state in ferroelectric/semiconductor heterostructures. Moreover, high-performance piezoelectric thin films were developed. It was found that organic ferroelectric thin films with a thickness of several micrometers are useful for ultrasonic detection.

Academic Significance and Societal Importance of the Research Achievements

超音波画像診断は、現代医療において欠かすことができないものになっています。本研究では超音波診断装置の空間分解能の向上に向けて、高感度の超音波の受信方法の開発に取り組みました。負の静電容量という特異な性質を利用した、急峻なスイッチング特性を有するトランジスタの動作メカニズムを理論的に明らかにしました。これは超音波の高感度検出に有効であるだけでなく、低消費電力の論理演算素子の実現においても有用な知見と考えます。

Report

(4 results)
  • 2018 Annual Research Report   Final Research Report ( PDF )
  • 2017 Annual Research Report
  • 2016 Annual Research Report
  • Research Products

    (18 results)

All 2019 2018 2016

All Journal Article (4 results) (of which Peer Reviewed: 4 results,  Open Access: 1 results) Presentation (14 results) (of which Int'l Joint Research: 7 results,  Invited: 1 results)

  • [Journal Article] Time-resolved Simulation of the Negative Capacitance Stage Emerging at the Ferroelectric/Semiconductor Hetero-Junction2019

    • Author(s)
      K. Takada, T. Yoshimura, and N. Fujimura
    • Journal Title

      AIP Advances

      Volume: 9 Issue: 2 Pages: 025037-025037

    • DOI

      10.1063/1.5075516

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Direct piezoelectric response in vinylidene fluoride-trifluoroethylene copolymer films2018

    • Author(s)
      Y. Matsushita, I. Kanagawa, T. Yoshimura and N. Fujimura
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 57 Issue: 11S Pages: 11UG01-11UG01

    • DOI

      10.7567/jjap.57.11ug01

    • NAID

      210000149826

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Direct piezoelectric properties of BiFeO3 epitaxial films grown by combinatorial sputtering2018

    • Author(s)
      T. Yoshimura, K. Kariya, N. Okamoto, M. Aramaki and N. Fujimura
    • Journal Title

      Journal of Physics of Conference Series

      Volume: 印刷中

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effects of (Bi1/2,Na1/2)TiO3 on the electrical properties of BiFeO3-based thin films2016

    • Author(s)
      Jin Hong Choi, Takeshi Yoshimura, and Norifumi Fujimura
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 55 Issue: 10S Pages: 10TA17-10TA17

    • DOI

      10.7567/jjap.55.10ta17

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed
  • [Presentation] 正圧電応答顕微鏡によるP(VDF-TrFE)膜の圧電評価2019

    • Author(s)
      金川 いづる,松下 裕司,吉村 武,藤村 紀文
    • Organizer
      第66回応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] スパッタ法を用いたSi基板上へのPZTエピタキシャル薄膜の作製2019

    • Author(s)
      村瀬 幹生, 和泉 享兵, 吉村 武, 藤村 紀文
    • Organizer
      第66回応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] MEMSにおける圧電薄膜2019

    • Author(s)
      吉村 武
    • Organizer
      第31回MEMS講習会・ORIST技術セミナー
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] P(VDF-TrFE)膜におけるe31,f 圧電定数の評価2018

    • Author(s)
      金川 いづる,松下 裕司,吉村 武,藤村 紀文
    • Organizer
      第79回応用物理学会秋季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Piezoelectric properties of vinylidene fluoride-trifluoroethylene copolymer [P(VDF-TrFE)] films2018

    • Author(s)
      I. Kanagawa, Y. Matsushita, T. Yoshimura and N. Fujimura
    • Organizer
      12th Japan-Korea Conference on Ferroelectricity
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication of μm-thick P (VDF-TrFE) Films and the Electrical Properties2018

    • Author(s)
      Y. Matsushita, T. Yoshimura and N. Fujimura
    • Organizer
      2018 ISAF-FMA-AMF-AMEC-PFM (IFAAP) Joint Conference
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Observation of Ferroelectric Domain Structure by Direct Piezoelectric Effect2018

    • Author(s)
      T. Yoshimura, K. Kariya, and N . Fujimura
    • Organizer
      2017 Joint ISAF-IWATMD-PFM Conference  
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 二元同時スパッタ法による強誘電性HfxZr1-xO2/Siヘテロ構造の作製2018

    • Author(s)
      高田 賢志,鎌田 大輝, 金屋 良輔, 桐谷 乃輔, 吉村 武,藤村 紀文
    • Organizer
      第78回応用物理学会 秋季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Direct piezoelectric properties of BiFeO3 epitaxial films grown by combinatorial sputtering2018

    • Author(s)
      T. Yoshimura, K. Kariya, N. Okamoto, M. Aramaki and N. Fujimura
    • Organizer
      The 17th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (Power MEMS 2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Investigation of Doman Wall Contributions on the Piezoelectric Properties of BiFeO3 films2018

    • Author(s)
      T. Yoshimura, K. Kariya, and N . Fujimura
    • Organizer
      18th US-Japan Seminar on Dielectric and Piezoelectric Materials
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] "Microscopic characterization of direct piezoelectric response "2018

    • Author(s)
      T. Yoshimura, K. Kariya, and N . Fujimura
    • Organizer
      2018 PiezoMEMS
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 強誘電体ゲートFETにおける負性容量発現機構2018

    • Author(s)
      高田 賢志, 桐谷 乃輔 吉村 武, 芦田 淳, 藤村 紀文
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] BiFeO3薄膜の格子歪およびドメイン構造が圧電特性に及ぼす影響2018

    • Author(s)
      岡本 直樹, 苅谷 健人,吉村 武,藤村 紀文
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Synthesis and piezoelectric properties of BiFeO3-(Bi1/2Na1/2)TiO3 thin films2016

    • Author(s)
      Jin Hong Choi, Takeshi Yoshimura, and Norifumi Fujimura
    • Organizer
      11th Korea-Japan Conference on Ferroelectrics
    • Place of Presentation
      Seoul, Korea
    • Year and Date
      2016-08-07
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research

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Published: 2016-04-21   Modified: 2020-03-30  

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