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Development of 10Gfps ultra-high speed silicon image sensor

Research Project

Project/Area Number 16H04358
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionRitsumeikan University

Principal Investigator

Shimonomura Kazuhiro  立命館大学, 理工学部, 教授 (80397679)

Co-Investigator(Kenkyū-buntansha) 安藤 妙子  立命館大学, 理工学部, 准教授 (70335074)
江藤 剛治  大阪大学, 工学研究科, 招へい教授 (20088412)
Research Collaborator NGUYAN Anh Quang  
DAO Vu Truong Son  
KAMAKURA Yoshinari  
CHARBON Edoardo  
ZHANG Chao  
Project Period (FY) 2016-04-01 – 2019-03-31
Project Status Completed (Fiscal Year 2018)
Budget Amount *help
¥15,600,000 (Direct Cost: ¥12,000,000、Indirect Cost: ¥3,600,000)
Fiscal Year 2018: ¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000)
Fiscal Year 2017: ¥5,720,000 (Direct Cost: ¥4,400,000、Indirect Cost: ¥1,320,000)
Fiscal Year 2016: ¥6,240,000 (Direct Cost: ¥4,800,000、Indirect Cost: ¥1,440,000)
Keywords超高速撮像 / 撮像素子 / マルチ電荷収集ゲートイメージセンサ / マルチ電荷収集ゲート構造 / マルチ電荷収集ゲート / 超高速撮影 / モンテカルロシミュレーション / 超高速イメージング
Outline of Final Research Achievements

(1) The highest frame rate of photoelectron conversion layers is theoretically derived. For silicon image sensors, the limit is 11.1 ps. (2) Based on the analysis, practical ultra-high-speed image sensor structures are proposed. They can achieve the temporal resolution of 50 ps to 100 ps. (3) The resolution of 10 ns has been achieved with a backside-illuminated multi-collection-gate image sensor and applied to light-in-flight imaging. Since Abramson in 1976, many scientists have challenged the topic. Our achievement is the first success in the world as light-in-flight imaging with a silicon image sensor. (4) A driver circuit to decrease the resolution to 1 ns stacked to the sensor was designed and fabricated. (5) An algorithm to suppress the spatio-temporal crosstalk is developed. (6) An ultra-high-speed image signal accumulation sensor is developed, which stores very weak image signals of high-speed objects by accumulating image signals in each pixel, keeping the order of the frames.

Academic Significance and Societal Importance of the Research Achievements

(1)超高速現象の撮影ができる。シリコンイメージセンサはレーザやホログラフィ、ストリークカメラ等を使った撮像装置より遅いが、用いたディジタルカメラは利便性が格段に高いので、広い応用がある。実利用においては大きな利点である。(2)蛍光の減衰特性やイオンや光の飛行時間を利用する時間計測型先端計測機器(FLIM, TOF-MS, LIDER等)が時空間計測型になり、面的に同時に高速度計測できるようになる。(3)高速ファイバ通信のセンサになる。

Report

(4 results)
  • 2018 Annual Research Report   Final Research Report ( PDF )
  • 2017 Annual Research Report
  • 2016 Annual Research Report
  • Research Products

    (25 results)

All 2018 2017 2016

All Journal Article (4 results) (of which Int'l Joint Research: 4 results,  Peer Reviewed: 4 results,  Open Access: 4 results,  Acknowledgement Compliant: 1 results) Presentation (21 results) (of which Int'l Joint Research: 10 results,  Invited: 1 results)

  • [Journal Article] Toward the ultimate-high-speed image sensor: from 10 ns to 50 ps2018

    • Author(s)
      Anh Quang Nguyen, Vu Truong Son Dao, Kazuhiro Shimonomura, Kohsei Takehara, Takeharu Goji Etoh
    • Journal Title

      Sensors

      Volume: 18 Issue: 8 Pages: 1-11

    • DOI

      10.3390/s18082407

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] An image signal accumulation multi-collection-gate image sensor operating at 25 Mfps with 32x32 pixels and 1,220 in-pixel frame memory2018

    • Author(s)
      Vu Truon Son Dao, Nguyen Ngo, Anh Quang Nguyen, Kazuhiro Morimoto, Kazuhiro Shimonomura, Paul Goetschalckx, Luc Haspeslagh, Piet De Moor, Kohsei Takehara, Takeharu Goji Etoh
    • Journal Title

      Sensors

      Volume: 18 Issue: 9 Pages: 1-11

    • DOI

      10.3390/s18093112

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] The theoretical highest frame rate of silicon image sensors2017

    • Author(s)
      Takeharu Goji Etoh, Anh Quang Nguyen, Yoshinari Kamakura, Thi Yen Le, Kazuhiro Shimonomura, Nobuya Mori
    • Journal Title

      Sensors

      Volume: 17, no. 3 Issue: 3 Pages: 483-483

    • DOI

      10.3390/s17030483

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Crosstalk analysis and a cancellation method for an image sensor operating at 1Gfps2016

    • Author(s)
      Anh Quang Nguyen, Vu Truong Son Dao, Kazuhiro Shimonomura, Yoshinari Kamakura, Takeharu Goji Etoh
    • Journal Title

      Mechanical Engineering Journal

      Volume: 3

    • NAID

      130005250609

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research / Acknowledgement Compliant
  • [Presentation] Evolution of ultra-high-speed image sensors- Light-in-Flight imaging to Ultra-fast X-ray imaging2018

    • Author(s)
      Kazuhiro Morimoto, Nguyen Ngo, Kazuhiro Shimonomura, Takeharu Goji Etoh
    • Organizer
      4th International Workshop on Image Sensors and Imaging Systems
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] On a BSI Image Signal Accumulation Sensor of 100 Mfps2018

    • Author(s)
      Nguyen Ngo, Kazuhiro Morimoto, Kazuhiro Shimonomura, Takeharu Goji Etoh
    • Organizer
      4th International Workshop on Image Sensors and Imaging Systems
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 極限時間分解能を目指した超高速イメージセンサの新展開2018

    • Author(s)
      下ノ村和弘,竹原幸生,江藤剛治
    • Organizer
      電子情報通信学会超高速光エレクトロニクス研究会
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] 開口率100%の裏面照射マルチ電荷収集ゲートイメージセンサ2018

    • Author(s)
      江藤剛治,クアン グエン アン,下ノ村和弘
    • Organizer
      映像情報メディア学会情報センシング研究会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 裏面照射マルチ電荷収集ゲート超高速撮像素子の設計と評価2018

    • Author(s)
      森本一大,Ngo Nguyen Hoai, 江藤剛治,下ノ村和弘
    • Organizer
      映像情報メディア学会年次大会
    • Related Report
      2018 Annual Research Report
  • [Presentation] The "Light-in-Flight" Imaging with a Silicon Image Sensor operating at 10 ns2018

    • Author(s)
      Takeharu Etoh, Hitoshi Nakano, Kohsei Takehara, Kazuhiro Shimonomura
    • Organizer
      第79回応用物理学会秋季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 100 Mfps image sensor for biological applications2018

    • Author(s)
      Takeharu Goji Etoh, Kazuhiro Shimonomura, Quang A. Nguyen, Kosei Takehara, Yoshinari Kamakura, Paul Goetschalckx, Luc Haspeslagh, Piet De Moor, Vu Truong Son Dao, Dzung H. Nguyen, Naoki Hayashi, Yo Mitsui, Hideo Inumaru
    • Organizer
      SPIE Photonics West 2018
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 究極の時間分解能のイメージセンサを目指して―10 nsから50 psへ―2018

    • Author(s)
      江藤剛治,下ノ村和弘,竹原幸生,犬丸秀夫,林直樹,三井鷹,井口昭彦,三原勉
    • Organizer
      映像情報メディア学会情報センシング研究会
    • Related Report
      2017 Annual Research Report
  • [Presentation] The Temporal Resolution Limit of the Silicon Image Sensors2017

    • Author(s)
      Takeharu Goji Etoh, Anh Quang Nguyen, Yoshinari Kamakura, Kazuhiro Shimonomura, Yen Le Thi and Nobuya Mori
    • Organizer
      2017 International Image Sensor Workshop (IISW)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 限界時間分解能の理論に基づく50 psのシリコンイメージセンサの設計2017

    • Author(s)
      江藤剛治,Anh Quang Nguyen,鎌倉良成,下ノ村和弘
    • Organizer
      映像情報メディア学会情報センシング研究会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 5千万枚/秒の超高感度ビデオカメラ用イメージセンサーの原理実証2017

    • Author(s)
      三井鷹,下ノ村和弘,竹原幸生,江藤剛治
    • Organizer
      高速度イメージングとフォトニクスに関する総合シンポジウム2017(JCHSIP2017)
    • Related Report
      2017 Annual Research Report
  • [Presentation] 1枚の撮像素子で1億枚/秒の超高速撮影ができるマルチフレーミング撮像素子2017

    • Author(s)
      林直樹,下ノ村和弘,竹原幸生,江藤剛治
    • Organizer
      高速度イメージングとフォトニクスに関する総合シンポジウム2017(JCHSIP2017)
    • Related Report
      2017 Annual Research Report
  • [Presentation] 多孔永久磁石による収束電子ビームアレイの実現可能性2017

    • Author(s)
      平岡一毅, 津野勝重, 白神宏之,下ノ村和弘, 江藤剛治
    • Organizer
      高速度イメージングとフォトニクスに関する総合シンポジウム2017(JCHSIP2017)
    • Related Report
      2017 Annual Research Report
  • [Presentation] シリコンイメージセンサの理論的限界速度を目指して2017

    • Author(s)
      江藤剛治,Anh Quang Nguyen,鎌倉良成,下ノ村和弘
    • Organizer
      高速度イメージングとフォトニクスに関する総合シンポジウム2017(JCHSIP2017)
    • Related Report
      2017 Annual Research Report
  • [Presentation] Simulation-based Feasibility Assessment of an Electron-Beam Array made with Multi-hole Permanent Magnets2017

    • Author(s)
      Takeharu Goji Etoh, Kazuhiro Shimonomura, Katsushige Tsuno, Kazuki Hiraoka
    • Organizer
      11th International Symposium on Atomic Level Characterizations for New Materials and Devices'17(ALC17)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Ultra-high-speed CCD image sensors for Imaging TOFMS2017

    • Author(s)
      Kazuhiro Shimonomura, Anh Quang Nguyen, Kohsei Takehara, Luc Haspeslagh, Paul Goetschalckx, Piet De Moor, Naoki Hayashi, You Mitsui, Tomohiro Takahashi, Akihiko Iguchi, Tsutomu Mihara, Takeharu Goji Etoh
    • Organizer
      11th International Symposium on Atomic Level Characterizations for New Materials and Devices'17(ALC17)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] The Upper-bound Frame Rate of Silicon Image Sensors2016

    • Author(s)
      T.G.Etoh, Q.A.Nguyen, K.Shimonomura, Y.Le Thy, Y.Kamakura
    • Organizer
      The 31st International Congress on High-Speed Imaging and Photonics (ICHSIP31)
    • Place of Presentation
      ホテル阪急エキスポパーク(大阪府・吹田市)
    • Year and Date
      2016-11-07
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Simulation analysis of temporal resolution in BSI MCG image sensor2016

    • Author(s)
      K.Shimonomura, Q.A.Nguyen, T.Y.Le, Y.Kamakura, T.G.Etoh
    • Organizer
      The 31st International Congress on High-Speed Imaging and Photonics (ICHSIP31)
    • Place of Presentation
      ホテル阪急エキスポパーク(大阪府・吹田市)
    • Year and Date
      2016-11-07
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Crosstalk in multi-collection-gate image sensors and its improvement2016

    • Author(s)
      A.Q.Nguyen, V.T.S.Dao, K.Shimonomura, Y.Kamakura, T.G.Etoh
    • Organizer
      The 31st International Congress on High-Speed Imaging and Photonics (ICHSIP31)
    • Place of Presentation
      ホテル阪急エキスポパーク(大阪府・吹田市)
    • Year and Date
      2016-11-07
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] マルチ電荷収集ゲート構造をもつ超高速撮像素子のクロストーク解析2016

    • Author(s)
      Anh Quang Nguyen, Vu Truing Son Dao, 下ノ村和弘,鎌倉良成,江藤剛治
    • Organizer
      応用物理学会シリコンテクノロジー分科会第193回研究集会
    • Place of Presentation
      機械振興会館(東京都・港区)
    • Year and Date
      2016-07-29
    • Related Report
      2016 Annual Research Report
  • [Presentation] Crosstalk analysis of an image sensor operating at 1Gfps2016

    • Author(s)
      Anh Quang Nguyen, Vu Truong Son Dao, Kazuhiro Shimonomura, Yoshinari Kamakura, Takeharu Goji Etoh
    • Organizer
      2016 IEEE Sixth International Conference on Communications and Electronics (ICCE2016)
    • Place of Presentation
      Ha Long (Vietnam)
    • Year and Date
      2016-07-27
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research

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Published: 2016-04-21   Modified: 2020-03-30  

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