Low coherence interference structured illumination microscopy for high resolution measurement and inspection in manufacturing

• Project/Area Number: 16H06063
• Research Category: Grant-in-Aid for Young Scientists (A)
• Allocation Type: Single-year Grants
• Research Field: Production engineering/Processing studies
• Research Institution: Shizuoka University
• Principal Investigator: Usuki Shin 静岡大学, 電子工学研究所, 准教授 (60508191)
• Project Period (FY): 2016-04-01 – 2020-03-31
• Project Status: Completed (Fiscal Year 2019)
• Budget Amount: ¥24,180,000 (Direct Cost: ¥18,600,000、Indirect Cost: ¥5,580,000); Fiscal Year 2019: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000); Fiscal Year 2018: ¥7,800,000 (Direct Cost: ¥6,000,000、Indirect Cost: ¥1,800,000); Fiscal Year 2017: ¥7,410,000 (Direct Cost: ¥5,700,000、Indirect Cost: ¥1,710,000); Fiscal Year 2016: ¥6,500,000 (Direct Cost: ¥5,000,000、Indirect Cost: ¥1,500,000)
• Keywords: 構造化照明 / 超解像 / 表面微細パターン / 空間位相変調器 / フーリエタイコグラフィー / ライトフィールド / デコンボリューション / 低コヒーレンス干渉 / 非蛍光観察 / 空間光位相変調器 / 光学顕微鏡 / コンピューテーショナルイメージング / モアレ / スパース性 / 空間サンプリング / 位相計測 / optics / microscopy / measurement / inspection / structured illumination

Outline of Final Research Achievements

Low coherence interference structured illumination microscope was developed for high resolution beyond the diffraction limit even in an environment with vibration and thermal drift. Although high resolution non-fluorescent imaging of patterned surface was achieved, there were artifacts and pitch errors in the reconstructed image which is a fatal problem in practical measurement and inspection. The problem was resolved by introducing the reconstruction algorithm with iterative update of spatial frequency base on Fourier ptychography and by controlling the structured illumination with a spatial light modulator instead of a mirror on a piezo electric actuator.

Academic Significance and Societal Importance of the Research Achievements

振動ノイズに強く，工業利用も可能な構造化照明顕微鏡を開発した．従来の光学顕微鏡の2倍の高分解能観察が可能な構造化照明顕微鏡は，格子状照明を動かしながら取得した画像と照明の位置情報をコンピューター処理して対象物の画像を再現する．生物蛍光観察用として実用化されているが，製造現場では振動や温度変化などの影響で利用が困難であった．そこで，スーパールミネッセントダイオードという特殊な光源を用いて構造化照明を制御することで，振動や温度変化など外部環境の影響を受けない高分解能観察を可能にした．小型，高精度化が進む光学素子の検査，蛍光色素を使えない生物試料など幅広い観察対象に利用できる．

Research Products

• [Journal Article] High-resolution nonfluorescent imaging with structured illumination for patterned surface measurement (2020)
  • Author(s): Usuki Shin、Shibata Gaku、Miura Kenjiro Takai
  • Journal Title: Measurement Science and Technology Volume: - Issue: 8 Pages: 084003-084003
  • DOI: 10.1088/1361-6501/ab85d7
  • Peer Reviewed
• [Journal Article] G1 Hermite Interpolating with Discrete Log-aesthetic Curves and Surfaces (2019)
  • Author(s): Kazumichi Yagi, Sho Suzuki, Shin Usuki, Kenjiro T. Miura
  • Journal Title: Computer-Aided Design and Applications Volume: 17 Pages: 607-620
  • Peer Reviewed
• [Journal Article] A New Log-aesthetic Space Curve Based on Similarity Geometry (2019)
  • Author(s): Kenjiro T. Miura, Sho Suzuki, R.U. Gobithaasan, Shin Usuki
  • Journal Title: Computer-Aided Design and Applications Volume: 16 Pages: 79-88
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] 人工関節表層メッシュ構造の生成 -幾何形状の回転対称性を利用したABF法の改良- (2018)
  • Author(s): 中村優人, 鈴木晶, 臼杵深, 北澤弘幸, 三浦憲二郎
  • Journal Title: 精密工学会誌 Volume: 84 Pages: 731-737
  • NAID: 130006434295
  • Peer Reviewed
• [Journal Article] Acquisition of Disaster Emergency Information Using a Terrain Database by Flying Robots (2018)
  • Author(s): Yasuki Miyazaki, Takafumi Hirano, Takaaki Kobayashi, Yoshihiro Imai, Shin Usuki, Yuichi Kobayashi, Kenji Terabayashi, Kenjiro T. Miura
  • Journal Title: Journal of Robotics and Mechatronics Volume: 30 Pages: 443-452
  • NAID: 130007405722
  • Peer Reviewed
• [Journal Article] Ultrasound modulated laser confocal feedback imaging inside turbid media (2018)
  • Author(s): Kaiyi Zhu, Yueyue Lu, Shulian Zhang, Haowen Ruan, Shin Usuki, Yidong Tan
  • Journal Title: Optics Letters Volume: 43 Pages: 1207-1210
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Three-Dimensional Reconstruction by Time-Domain Optical Coherence Tomography Microscope with Improved Measurement Range (2017)
  • Author(s): S. Usuki, K. Tamaki, K. T. Miura
  • Journal Title: International Journal of Automation Technology Volume: 11 Pages: 787-794
  • NAID: 130007505954
  • Peer Reviewed
• [Journal Article] Log-aesthetic flow governed by heat conduction equations, Computer-Aided Design and Appications (2017)
  • Author(s): K. T. Miura, S. Suzuki, R.U. Gobithaasan, P. Salvi, and S. Usuki
  • Journal Title: Computer-Aided Design and Appications Volume: 14 Pages: 227-233
  • Peer Reviewed / Int'l Joint Research
• [Presentation] 構造化照明によるライトフィールド再構成-超解像と位相回復を実現するアルゴリズム- (2020)
  • Author(s): 小澤英明, 小野田寛大, 臼杵深, 關根惟敏, 三浦憲二郎
  • Organizer: 2020年度精密工学会春季大会学術講演会
• [Presentation] High-resolution non-fluorescent imaging with structured illumination for patterned surface measurement (2019)
  • Author(s): Gaku Shibata, Shin Usuki and Kenjiro T. Miura
  • Organizer: ISMTII2019
  • Int'l Joint Research
• [Presentation] Measurement of patterned surfaces with non-fluorescent structured illumination microscope (2019)
  • Author(s): Shin Usuki, Gaku Shibata and Kenjiro T. Miura
  • Organizer: SPIE Optics + Photonics 2019
  • Int'l Joint Research
• [Presentation] Light-field acquisition and super-resolution with structured illumination (2019)
  • Author(s): Shin Usuki and Kenjiro T. Miura
  • Organizer: BISC2019
  • Int'l Joint Research / Invited
• [Presentation] Microscope image matching in scope of multi-resolution observation system (2019)
  • Author(s): Evan H. E. Putranto, Shin Usuki, Kenjiro T. Miura
  • Organizer: Electronic Imaging 2019
  • Int'l Joint Research
• [Presentation] Sparse deconvolution of structured illumination microscope image (2018)
  • Author(s): Hirohito Kondo, Shin Usuki and Kenjiro T. Miura
  • Organizer: The 4th International Conference on Nano Electronics Research and Education (ICNERE) Joint Svmposium
  • Int'l Joint Research
• [Presentation] Sparse deconvolution non-fluorescent imaging with structured illumination microscopy (2018)
  • Author(s): Hirohito Kondo, Shin Usuki and Kenjiro T. Miura
  • Organizer: ICPE2018
  • Int'l Joint Research
• [Presentation] High-resolution non-fluorescent imaging with low-coherence interference structured illumination microscopy (2018)
  • Author(s): Shin Usuki, Gaku Shibata and Kenjiro T. Miura
  • Organizer: ASPE2018
  • Int'l Joint Research
• [Presentation] Computational microscopy toward light-field acquisition and super-resolution (2018)
  • Author(s): Shin Usuki and Kenjiro T. Miura
  • Organizer: ISOM2018
  • Int'l Joint Research / Invited
• [Presentation] 構造化照明顕微法における試料回転とその効果の検証 (2018)
  • Author(s): 柴田岳, 臼杵深, 三浦憲二郎
  • Organizer: 2018年度精密工学会春季大会学術講演会
• [Presentation] 測定範囲を拡張したOCT顕微鏡による反射面の立体形状計測 (2017)
  • Author(s): 臼杵深, 玉木克明, 三浦憲二郎
  • Organizer: 2017年度精密工学会春季大会学術講演会
  • Place of Presentation: 慶応義塾大学（神奈川県横浜市）
  • Year and Date: 2017-03-13
• [Presentation] ライトフィールド顕微鏡 -超解像技術との組み合わせと応用- (2017)
  • Author(s): 臼杵深
  • Organizer: 第11回NIBBバイオイメージングフォーラム
  • Place of Presentation: 自然科学研究機構基礎生物学研究所（愛知県岡崎市）
  • Year and Date: 2017-02-14
  • Invited
• [Presentation] Super-resolution light field microscope and its application (2017)
  • Author(s): Shin Usuki
  • Organizer: MSCEIS 2017
  • Int'l Joint Research / Invited
• [Presentation] Low-coherence Interference Wide-field Optical Microscopy with Improved Axial Measurement Range (2017)
  • Author(s): Shin Usuki, Katsuaki Tamaki, Kenjiro T. Miura
  • Organizer: ISMTII 2017
  • Int'l Joint Research
• [Presentation] Light Field Microscopy Combined with Super-resolution Techniques (2017)
  • Author(s): Shin Usuki, Yoshitake Tani, Kenjiro T. Miura
  • Organizer: JSAP-OSA Joint Symposia in the 78th JSAP Autumn Meeting 2017
  • Int'l Joint Research / Invited
• [Presentation] Improving spatial resolution of the light field microscope with Fourier ptychography (2017)
  • Author(s): Yoshitake Tani, Shin Usuki, Kenjiro T. Miura
  • Organizer: SPIE Optics + Photonics 2017
  • Int'l Joint Research
• [Presentation] Forming spatial resolution of intermediate level microscopy images for continuous zooming transition on multi-resolution processing system (2017)
  • Author(s): Evan H. E. Putranto, Tomohiro Suzuki, Shin Usuki, Kenjiro T. Miura
  • Organizer: SPIE Optics + Photonics 2017
  • Int'l Joint Research
• [Presentation] Low-coherence interference structured illuminationmicroscopy with a fringe measurement system (2016)
  • Author(s): Takeshi Terao, Tomohiro Takada, Shin Usuki and Kenjiro T. Miura
  • Organizer: 16th International Conference on Precision Engineering
  • Place of Presentation: アクトシティ浜松（静岡県浜松市）
  • Year and Date: 2016-11-14
  • Int'l Joint Research
• [Remarks] 静岡大学教員データベース - 教員個別情報 : 臼杵 深 （USUKI SHIN）
  • URL: https://tdb.shizuoka.ac.jp/RDB/public/Default2.aspx?id=10728&l=0
• [Patent(Industrial Property Rights)] 観察システム (2016)
  • Inventor(s): 臼杵深, 高田智裕
  • Industrial Property Rights Holder: 臼杵深, 高田智裕
  • Industrial Property Rights Type: 特許
  • Filing Date: 2016-08-19
  • Overseas