Atmospheric-pressure plasma process using high-density and high-purity water-derived reactive species produced by a water-vapor microwave plasma

• Project/Area Number: 16H06859
• Research Category: Grant-in-Aid for Research Activity Start-up
• Allocation Type: Single-year Grants
• Research Field: Plasma electronics
• Research Institution: Nagoya University
• Principal Investigator: SUZUKI Haruka 名古屋大学, 工学研究科, 助教 (80779356)
• Research Collaborator: SENBA Hikaru
• Project Period (FY): 2016-08-26 – 2018-03-31
• Project Status: Completed (Fiscal Year 2017)
• Budget Amount: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000); Fiscal Year 2017: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000); Fiscal Year 2016: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
• Keywords: 大気圧マイクロ波プラズマ / 水蒸気プラズマ / 大気遮蔽 / アッシング / 大気圧プラズマ / マイクロ波 / マイクロ波放電

Outline of Final Research Achievements

Atmospheric pressure plasma sources in air-shielded environment by water flow were developed for plasma process utilizing water-derived reactive species without air contamination in the atmosphere. A microwave-excited water-vapor plasma source in a space shielded by cone-shaped water flow was developed using a coaxial waveguide with a ring-shaped slot to use high-density hydroxyl radical without air contamination at atmospheric pressure. Water vapor plasma without the air was successfully realized by the pulsed microwave discharges. Production of hydroxyl radical was confirmed from the optical emission from the plasma. As an application example of the water-vapor plasma in the air shield environment, atmospheric pressure photoresist removal treatment was demonstrated.

Research Products

• [Presentation] Water-vapor Atmospheric Pressure Microwave Plasma in an Air-Shielded Environment by Water Flow (2018)
  • Author(s): Haruka Suzuki, Hikaru Senba, Hirotaka Toyoda
  • Organizer: ISPlasma2018/IC-PLANTS2018
• [Presentation] 水流により遮蔽された空間での大気圧プラズマジェット生成 (2017)
  • Author(s): 仙波 輝 , 小池 洋右 , 鈴木 陽香 , 豊田 浩孝
  • Organizer: 第64回応用物理学会春季学術講演会
  • Place of Presentation: パシフィコ横浜, 横浜, 日本
  • Year and Date: 2017-03-14
• [Presentation] マイクロ波インライン液体処理における反応領域の空間分布計測 (2017)
  • Author(s): 堤和紀，滝藤奨，藤村昇平, 鈴木陽香，豊田浩孝
  • Organizer: 第64回応用物理学会春季学術講演会
  • Place of Presentation: パシフィコ横浜, 横浜, 日本
  • Year and Date: 2017-03-14
• [Presentation] Shielding of plasma jets from ambient air by water flow certain (2017)
  • Author(s): Hikaru Senba, Yosuke Koike, Haruka Suzuki and Hirotaka Toyoda
  • Organizer: 9th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/10th International Conference on Plasma-Nano Technology & Science
  • Place of Presentation: CHUBU UNIVERSITY, Aichi, Japan
  • Year and Date: 2017-03-01
• [Presentation] インラインマイクロ波プラズマ処理の高流速化による有機物分解効率の向上 (2017)
  • Author(s): 堤和紀，滝藤奨，藤村昇平, 伊藤美智子，高島成剛，鈴木陽香，豊田浩孝
  • Organizer: 第34回プラズマプロセシング研究会／第29回プラズマ材料科学シンポジウム（合同会議）
  • Place of Presentation: 北海道大学, 札幌, 日本
  • Year and Date: 2017-01-16
  • Int'l Joint Research
• [Presentation] 高速表面処理に向けた新しい大気圧プラズマ源の開発 (2017)
  • Author(s): 鈴木陽香
  • Organizer: プラズマ材料科学第153委員会 30周年記念講演会
  • Invited
• [Presentation] 水流により遮蔽された空間での水蒸気マイクロ波プラズマ生成 (2017)
  • Author(s): 仙波輝, 小池洋右, 鈴木陽香, 豊田浩孝
  • Organizer: 第78回応用物理学会秋季学術講演会
• [Presentation] 水流遮蔽水蒸気マイクロ波プラズマの生成とその応用 (2017)
  • Author(s): 鈴木陽香, 仙波輝, 豊田浩孝
  • Organizer: Plasma Conference 2017
• [Presentation] Improvement of Liquid Treatment Efficiency using Microwave In-Line Plasma System with Narrow Flow Path (2016)
  • Author(s): Haruka Suzuki, Sho Takitou, Hirotaka Toyoda
  • Organizer: The 6th International Conference on Microelectronics and Plasma Technology (ICMAP2016)
  • Place of Presentation: Dream Center, Gyeongju, Korea
  • Year and Date: 2016-09-26
  • Int'l Joint Research