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Effects of residual stress on the properties of relaxer ferroelectric thin films prepared by CSD method on Si

Research Project

Project/Area Number 16H07400
Research Category

Grant-in-Aid for Research Activity Start-up

Allocation TypeSingle-year Grants
Research Field Inorganic materials/Physical properties
Research InstitutionNumazu National College of Technology

Principal Investigator

Arai Takashi  沼津工業高等専門学校, 物質工学科, 助教 (80781244)

Project Period (FY) 2016-08-26 – 2018-03-31
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
Fiscal Year 2017: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2016: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
KeywordsPMN-PT / 薄膜 / 溶液合成 / 応力制御 / 誘電体 / 強誘電体膜 / 機能性セラミックス
Outline of Final Research Achievements

LaNiO3(LNO) with 200 nm thickness was deposited on a Si substrate as orientation control and electrode layer, and (La,Sr)CoO3(LSCO) with various thickness was introduced on the structure as a residual stress control layer. As a result, as increasing the number of laminated layers of LSCO from 0 to 8, both the remnant polarization value and the saturated polarization value of the PMN-PT thin films were enhanced. on the other hand, there were no changes in ferroelectric properties of PMN-PT thin films when the number of LSCO stacks was 8 and 10 layers. These results mean that, it was found that a polarization value of a PMN-PT thin film does not increase any more when a compressive stress value exceeds a certain limit, or a compressive stress above a certain value is not applied to the PMN-PT thin film.

Report

(3 results)
  • 2017 Annual Research Report   Final Research Report ( PDF )
  • 2016 Annual Research Report
  • Research Products

    (4 results)

All 2017 2016

All Presentation (4 results) (of which Int'l Joint Research: 1 results,  Invited: 1 results)

  • [Presentation] Effect of composition on CSD-derived PMN-PT thin films on Si2017

    • Author(s)
      Takashi Arai, Tomoya Ohno, Naonori Sakamoto, Naoki Wakiya, Hisao Suzuki
    • Organizer
      The 34th International Japan- Korea Seminar on Ceramics
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 強誘電体薄膜の結晶構造と電気特性の関係2017

    • Author(s)
      新井貴司, 大野智也, 坂元尚紀, 松田剛, 脇谷尚樹,鈴木久男
    • Organizer
      第46回結晶成長国内会議
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] セラミックス薄膜の溶液法による作製2016

    • Author(s)
      新井貴司・大野智也・坂元尚紀・脇谷尚樹・松田剛・鈴木久男
    • Organizer
      富士山麓 A&Sフェア 2016
    • Place of Presentation
      富士市産業交流展示場「ふじさんめっせ」
    • Year and Date
      2016-12-02
    • Related Report
      2016 Annual Research Report
  • [Presentation] Si基板上にCSD法で作製したPMN-PT薄膜の電気特性に与える電極構造の影響2016

    • Author(s)
      新井貴司・鈴木久男・坂元尚紀・脇谷尚樹・大野智也・松田剛
    • Organizer
      日本セラミックス協会関東支部若手研究発表交流会
    • Place of Presentation
      慶応大学
    • Year and Date
      2016-11-19
    • Related Report
      2016 Annual Research Report

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Published: 2016-09-02   Modified: 2019-03-29  

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