• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

光共振性能に及ぼすサブサーフェスダメージの影響解明による高Q値微小光共振器の開発

Research Project

Project/Area Number 16J03359
Research Category

Grant-in-Aid for JSPS Fellows

Allocation TypeSingle-year Grants
Section国内
Research Field Production engineering/Processing studies
Research InstitutionKeio University

Principal Investigator

水本 由達  慶應義塾大学, 理工学研究科, 特別研究員(DC2)

Project Period (FY) 2016-04-22 – 2018-03-31
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥1,300,000 (Direct Cost: ¥1,300,000)
Fiscal Year 2017: ¥600,000 (Direct Cost: ¥600,000)
Fiscal Year 2016: ¥700,000 (Direct Cost: ¥700,000)
Keywords微小光共振器 / 超精密切削 / 単結晶蛍石 / 結晶異方性 / サブサーフェスダメージ / 超精密加工
Outline of Annual Research Achievements

本研究では単結晶蛍石の超精密加工における加工特性解析,サブサーフェスダメージの低減ならびに除去法の開発に取り組み,従来の性能を超える微小光共振器開発を目的としている.
最終年度である平成29年度は当初の計画通り,
1サブサーフェスダメージと光の共振現象の関連性解析
2微小光共振器性能の最適化
に取り組んだ.
1に関しては,サブサーフェスダメージ除去のため,切削加工した蛍石側面に対し前年度用いたナノオーダ非接触研磨法であるノズル型EEM(Elastic Emission Machining)を施し,被削材加工面下の材料転位状態を観察した.切削加工後の加工表面下には10~30nmほどのダメージ層が存在するのに対し,研磨した加工表面下にはほとんどダメージ層がなかった.これはEEMにより,材料表面下にダメージが除去されたことを示唆している.また切削により作製した微小光共振器に対しEEMを施したところ,切削加工後には10の6乗オーダだった共振性能(Q値)が7乗へと向上した.EEMにより加工表面の切削痕及びサブサーフェスダメージを除去したことで,光の表面散乱損失,材料吸収損失が低減されたと考えられる.2に関しては,共振器部分の形状を変えることで,共振性能の形状依存性について実験的に評価した.具体的には共振器断面形状を三角形型,台形型,円形型と変えて共振性能を測定したところ,Q値は10の5乗から6乗のオーダで変化し,三角型にした際に最も共振性能が高くなった.これは断面形状を三角形にすることで共振器先端が鋭利になり,光が共振器の内側に閉じこもることで表面性状の影響を受けにくくなるからであると推察される.以上,2年間を通して,当初の目的である光共振性能に及ぼすサブサーフェスダメージの影響を明らかにし,微小光共振器を高Q値できる可能性を確認できた.

Research Progress Status

29年度が最終年度であるため、記入しない。

Strategy for Future Research Activity

29年度が最終年度であるため、記入しない。

Report

(2 results)
  • 2017 Annual Research Report
  • 2016 Annual Research Report
  • Research Products

    (12 results)

All 2018 2017 2016

All Journal Article (6 results) (of which Peer Reviewed: 6 results,  Acknowledgement Compliant: 3 results,  Open Access: 1 results) Presentation (6 results) (of which Int'l Joint Research: 4 results)

  • [Journal Article] Revisit of the anisotropic deformation behavior of single-crystal CaF2 in orthogonal cutting2018

    • Author(s)
      Yuta Mizumoto, Yasuhiro Kakinuma
    • Journal Title

      Precision Engineering

      Volume: 印刷中 Pages: 9-16

    • DOI

      10.1016/j.precisioneng.2018.01.011

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Development of CaF<sub>2</sub>-brass hybrid WGM microcavity by using ultra-precision machining2018

    • Author(s)
      Yuta Mizumoto, Hiroki Itobe, Hiroi Kangawa, Mika Fuchida, Takasumi Tanabe, Yasuhiro Kakinuma
    • Journal Title

      Mechanical Engineering Letters

      Volume: 4 Issue: 0 Pages: 17-00491-17-00491

    • DOI

      10.1299/mel.17-00491

    • NAID

      130006334366

    • ISSN
      2189-5236
    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] On the improvement of subsurface quality of CaF2 single crystal machined by boron-doped nano-polycrystalline diamond tools2017

    • Author(s)
      Yuta Mizumoto, Hikaru Amano, Hiroi Kangawa, Katsuko Harano, Hitoshi Sumiya, Yasuhiro Kakinuma
    • Journal Title

      Precision Engineering

      Volume: 印刷中 Pages: 73-83

    • DOI

      10.1016/j.precisioneng.2017.11.005

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Influence of crystal anisotropy on subsurface damage in ultra-precision cylindrical turning of CaF22017

    • Author(s)
      Yuta Mizumoto, Hiroi Kangawa, Hiroki Itobe, Takasumi Tanabe, Yasuhiro Kakinuma
    • Journal Title

      Precision Engineering

      Volume: 未定 Pages: 104-114

    • DOI

      10.1016/j.precisioneng.2017.01.017

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Dispersion tailoring of a crystalline whispering galley mode microcavity for a wide-spanning optical Kerr frequency comb2016

    • Author(s)
      Y. Nakagawa, Y. Mizumoto, T. Kato, T. Kobatake, H. Itobe, Y. Kakinuma, and T. Tanabe
    • Journal Title

      J. Opt. Soc. Amer. B

      Volume: 33 Issue: 9 Pages: 1913-1920

    • DOI

      10.1364/josab.33.001913

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Bi-material crystalline whispering gallery mode microcavity structure for thermo-opto-mechanical stabilization2016

    • Author(s)
      H. Itobe, Y. Nakagawa, Y. Mizumoto, H. Kangawa, Y. Kakinuma, and T. Tanabe
    • Journal Title

      AIP Advances

      Volume: 6 Issue: 5 Pages: 055116-055116

    • DOI

      10.1063/1.4952405

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Presentation] Evaluation of shape dependency of CaF2 optical micro-cavity on cavity performance, manufactured by using ultra-precision cylindrical turning2017

    • Author(s)
      Yuta Mizumoto, Hiroi Kangawa, Hiroki Itobe, Mika Fuchida, Takasumi Tanabe, Yasuhiro Kakinuma
    • Organizer
      AAID 2017
    • Place of Presentation
      慶應義塾大学(神奈川県・横浜市)
    • Year and Date
      2017-03-09
    • Related Report
      2016 Annual Research Report
  • [Presentation] Influence of tool geometry on single-crystal CaF2 in an ultra-precision machining2017

    • Author(s)
      Yuta Mizumoto, Hikaru Amano, Mika Fuchida, Takasumi Tanabe, Yasuhiro Kakinuma
    • Organizer
      euspen’s 17th International Conference & Exhibition
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Basic study on the Elastic Emission Machining of CaF2 single crystal2017

    • Author(s)
      Hikaru Amano, Yuta Mizumoto, Yoshinori Takei, Satoru Egawa, Hidekazu Mimura, Yasuhiro Kakinuma
    • Organizer
      10th MIRAI Conference
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 微小光共振器のためのEEM加工特性評価2017

    • Author(s)
      天野光,水本由達,武井良憲,江川悟,三村秀和,柿沼康弘
    • Organizer
      2017年度精密工学会秋季大会学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Influence of nose radius on surface integrity in ultra-precision cylindrical turning of single-crystal calcium fluoride2016

    • Author(s)
      Yuta Mizumoto, Hiroi Kangawa, Yosuke Nakagawa, Hiroki Itobe, Takasumi, Tanabe, Yasuhiro Kakinuma
    • Organizer
      3rd CIRP Conference on Surface Integrity
    • Place of Presentation
      Charlotte (USA)
    • Year and Date
      2016-06-09
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Influence of micro-cracks using optical micro-resonator processing of single-crystal calcium flouride, manufactured by ultra-precision cylindrical turning2016

    • Author(s)
      Yuta Mizumoto, Hiroi Kangawa, Yosuke Nakagawa , Hiroki Itobe, Takasumi Tanabe and Yasuhiro Kakinuma
    • Organizer
      euspen’s 16th International Conference & Exhibition
    • Place of Presentation
      Nottingham (UK)
    • Year and Date
      2016-05-30
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research

URL: 

Published: 2016-05-17   Modified: 2024-03-26  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi