• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

モノマー界面粘度の増加因子の究明に基づくサブ15nmの光ナノインプリント成形

Research Project

Project/Area Number 16J05484
Research Category

Grant-in-Aid for JSPS Fellows

Allocation TypeSingle-year Grants
Section国内
Research Field Material processing/Microstructural control engineering
Research InstitutionTohoku University

Principal Investigator

伊東 駿也  東北大学, 多元物質科学研究所, 特別研究員(PD)

Project Period (FY) 2016-04-22 – 2018-03-31
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥1,300,000 (Direct Cost: ¥1,300,000)
Fiscal Year 2017: ¥600,000 (Direct Cost: ¥600,000)
Fiscal Year 2016: ¥700,000 (Direct Cost: ¥700,000)
Keywords光ナノインプリント / 表面力・共振ずり測定 / モノマー界面粘度 / 微細加工
Outline of Annual Research Achievements

光ナノインプリント技術は従来の光リソグラフィに代わる新規ナノ加工技術 “More Moore Technology” の一つとして注目されている。我々は最近明らかになってきた固体表面間のナノギャップ中での液体粘度増加現象が光ナノインプリント時にも生じると着想し、光ナノインプリント界面での重合性モノマーの粘度増加に関して表面力・共振ずり測定により研究している。本研究では、次世代ナノ加工技術として注目を集める光ナノインプリント技術によるサブ15nm成形に向けて、ジアクリレートモノマーの界面粘度増加因子の究明とサブ15nm高分子成形体の作製実証に着手してきた。本年度はジアクリレートモノマーの反応性密着層修飾シリカ表面間での粘度増加に関して表面力・共振ずり測定により評価した。アクリロイル基末端を有する密着層間では表面間距離<15nm程度からジアクリレートモノマーの粘度が増加した一方、メタクリロイル基末端の密着層間では表面間距離<12nmから粘度が増大した。表面間距離10nm時の粘度を比較するとアクリロイル基末端密着層間の方がメタクリロイル基末端密着層間に比べて1-2桁高い粘度を示すことを明らかにした。これはモノマーと同種の末端官能基を有する密着層間において表面-モノマー間の相互作用が増加したためと考えた。表面-モノマー間相互作用の増加による界面粘度の増大が示唆された。一般的に、光ナノインプリントにおいて密着層の基板上への修飾は液体の基板上への濡れ性向上や離型時の密着性向上に有利である。一方、サブ15nm成形において残膜厚が薄くなった際には粘度増加によりアライメントを困難にする可能性が示された。

Research Progress Status

29年度が最終年度であるため、記入しない。

Strategy for Future Research Activity

29年度が最終年度であるため、記入しない。

Report

(2 results)
  • 2017 Annual Research Report
  • 2016 Annual Research Report
  • Research Products

    (19 results)

All 2018 2017 2016 Other

All Journal Article (7 results) (of which Peer Reviewed: 7 results,  Open Access: 2 results,  Acknowledgement Compliant: 1 results) Presentation (11 results) (of which Int'l Joint Research: 5 results,  Invited: 1 results) Remarks (1 results)

  • [Journal Article] Elemental depth profiles and plasma etching rates of positive-tone electron beam resists after sequential infiltration synthesis of alumina2018

    • Author(s)
      Yuki Ozaki, Shunya Ito, Nobuya Hiroshiba, Takahiro Nakamura, and Masaru Nakagawa
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 印刷中

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Development of UV-Curable Resins Suitable for Reverse-Tone Lithography for Au Metamaterials Using a Print-and-Imprint Method2018

    • Author(s)
      T. Uehara, S. Sato, S. Ito, H. Yano, T. Nakamura, M. Nakagawa
    • Journal Title

      Bulletin of the Chemical Society of Japan

      Volume: 91 Issue: 2 Pages: 178-186

    • DOI

      10.1246/bcsj.20170280

    • NAID

      130006350304

    • ISSN
      0009-2673, 1348-0634
    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Surface forces between hydrophilic silica surfaces in a moisture-sensitive oleophilic diacrylate monomer liquid2018

    • Author(s)
      Ito Shunya、Kasuya Motohiro、Kurihara Kazue、Nakagawa Masaru
    • Journal Title

      AIP Advances

      Volume: 8 Issue: 2 Pages: 025122-025122

    • DOI

      10.1063/1.4991630

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] 2.Nanometer-Resolved Fluidity of an Oleophilic Monomer between Silica Surfaces Modified with Fluorinated Monolayers for Nanoimprinting2017

    • Author(s)
      Shunya Ito, Motohiro Kasuya, Kazue Kurihara, Masaru Nakagawa
    • Journal Title

      ACS Appl. Mater. Interfaces

      Volume: 9 Issue: 7 Pages: 6591-6598

    • DOI

      10.1021/acsami.6b15139

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Silica imprint templates with concave patterns from single digit nanometers fabricated by electron beam lithography involving argon ion beam milling2017

    • Author(s)
      Shunya Ito, Eri Kikuchi, Masahiko Watanabe, Yoshinari Sugiyama, Yoshiaki Kanamori, and Masaru Nakagawa
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 印刷中

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Demolding in Ultraviolet Nanoimprinting Assisted by a Nanoscale Lubricating Fluid Layer of Condensed Alternative Chlorofluorocarbon2016

    • Author(s)
      M. Nakagawa, S. Kaneko, S. Ito
    • Journal Title

      Bull. Chem. Soc. Jpn.

      Volume: 89 Issue: 7 Pages: 786-793

    • DOI

      10.1246/bcsj.20160107

    • NAID

      130005253047

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Size-Dependent Filling Behavior of UV-Curable Di(meth)acrylate Resins into Carbon-Coated Anodic Aluminum Oxide Pores of around 20 nm2016

    • Author(s)
      M. Nakagawa, A. Nakaya, Y. Hoshikawa, S. Ito, N. Hiroshiba, T. Kyotani
    • Journal Title

      ACS Appl. Mater. Interfaces

      Volume: 8 Issue: 44 Pages: 30628-30634

    • DOI

      10.1021/acsami.6b10561

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Presentation] 反応性密着層修飾シリカ表面間での親油性モノマーのナノ流動性2018

    • Author(s)
      伊東駿也、粕谷素洋、栗原和枝、中川勝
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Surface Segregation of Fluorescent Dyes in Thin Films of Nanoimprintable UV-Cured Resins Studied by Evanescent Wave-Induced Fluorescence Microscopy and Spectroscopy2018

    • Author(s)
      Shunya Ito, Hamid Soleimaninejad, Motohiro Kasuya, Masaru Nakagawa, and Trevor A. Smith
    • Organizer
      International workshop on Mineral processing and Metallurgy 2018 (IMM2018)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] シングルナノパターニングに向けた界面分子科学からのアプローチ2017

    • Author(s)
      伊東駿也, 中川勝
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜(神奈川県横浜市)
    • Year and Date
      2017-03-14
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] 低粘度モノマーを介したシリカ表面間に生じる表面力の再現性2017

    • Author(s)
      伊東駿也、粕谷素洋、栗原和枝、中川勝
    • Organizer
      高分子・ハイブリッド材料研究センター2017 PHyM シンポジウム
    • Related Report
      2017 Annual Research Report
  • [Presentation] サブ15nm光ナノインプリント成形における界面分子科学2017

    • Author(s)
      伊東駿也、粕谷素洋、川崎健司、鷲谷隆太、島崎譲、宮内昭浩、栗原和枝、中川勝
    • Organizer
      次世代リソグラフィワークショップNGL
    • Related Report
      2017 Annual Research Report
  • [Presentation] 表面力・共振ずり測定による低粘度ジアクリレートモノマーのシリカ表面間のナノギャップでの流動性2017

    • Author(s)
      伊東駿也、粕谷素洋、栗原和枝、中川勝
    • Organizer
      第66回高分子討論会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Reproducible surface forces between VUV-exposed silica surfaces in a moisture-sensitive oleophilic diacrylate monomer liquid2017

    • Author(s)
      Shunya Ito, Morohiro Kasuya, Kazue, Kurihara, and Masaru Nakagawa
    • Organizer
      The 61th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication of Au split-ring resonator arrays by reverse-tone lithography using a print-and-imprint method2017

    • Author(s)
      Takuya Uehara, Shinya Sato, Shunya Ito, Haruna Yano, Takahiro Nakamura, and Masaru Nakagawa
    • Organizer
      The 30th International Microprocesses and Nanotechnology Conference (MNC 2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Increase in viscosity of a low-viscosity monomer in nano-gap between silica surfaces related to UV nanoimprinting2017

    • Author(s)
      Shunya Ito, Motohiro Kasuya, Kazue Kurihara, and Masaru Nakagawa
    • Organizer
      The 16th International Conference on Nanoimprint and Nanoprint Technology (NNT2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 表面力・共振ずり測定に基づく極限ナノインプリント造形2017

    • Author(s)
      伊東駿也
    • Organizer
      2017年度第1回極限ナノ造形・構造物性研究会
    • Place of Presentation
      東北大学 東京分室(東京都千代田区)
    • Related Report
      2016 Annual Research Report
  • [Presentation] Etching durability enhanced with silane-containing additives in UV nanoimprint lithography2016

    • Author(s)
      Shunya Ito, Masaru Nakagawa
    • Organizer
      2016 International Symposium on Integrated Molecular / Materials Science & Engineering (IMSE2016)
    • Place of Presentation
      Qingdao (China)
    • Year and Date
      2016-10-13
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Remarks] 東北大学多元物質科学研究所中川研究室ホームページ

    • URL

      http://www.tagen.tohoku.ac.jp/labo/nakagawa/index-j.html

    • Related Report
      2016 Annual Research Report

URL: 

Published: 2016-05-17   Modified: 2024-03-26  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi