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Gas permeable mold in nanoimprint lithography

Research Project

Project/Area Number 16K04920
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Nano/Microsystems
Research InstitutionToyama Prefectural University

Principal Investigator

TAKEI SATOSHI  富山県立大学, 工学部, 教授 (90580069)

Research Collaborator Hanabata Makoto  富山県立大学, 客員教授
Project Period (FY) 2016-04-01 – 2019-03-31
Project Status Completed (Fiscal Year 2018)
Budget Amount *help
¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000)
Fiscal Year 2018: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2017: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2016: ¥3,120,000 (Direct Cost: ¥2,400,000、Indirect Cost: ¥720,000)
Keywordsインプリント / 成形加工 / セルロース / 植物 / 金型 / モールド / ガス透過 / 多孔質 / ナノパターニング / レジスト / 機能材料 / 電子材料 / 糖鎖 / リソグラフィ / 植物高度利用 / 次世代農資源活用 / ガス透過性金型 / ポーラス材料 / 多孔質化 / ナノインプリント / 微細加工 / 分析シート
Outline of Final Research Achievements

An approach to nanoimprint lithography using biomass-based porous mold was investigated for the reduction of air trapping and template damage caused by gases such as nitrogen and oxygen generated from imprinted materials. The accuracy of the printed pattern using nanoimprint lithography with the porous transparent mold was improved because of enhanced material adsorption and increased permeability to gaseous species. The use of volatile solvents in the imprinted materials for nanoimprint lithography has been limited because of
high pattern failure rates. The pimprinted materials with a 10 wt. % volatile solvent exhibited well-defined nanoscale patterns. Based on this study, acceptable chemistries for the imprinted materials have been expanded, which will be beneficial for future device applications using UV nanoimprint lithography.

Academic Significance and Societal Importance of the Research Achievements

ナノメートルの空孔部分を有する分子の水酸基に光反応基を化学修飾させたナノインプリント用ガス透過性モールド材料の開発により、ナノインプリントモールドが巻き込む空気のかみ込みによる成形不良が改善できる目的がある。ナノインプリント被転写材に揮発性溶媒の使用が可能となり、被転写材料の分子系選択性が広がる結果、機能性フィルム等の新製品の高付加価値化が可能となる利点もある。既存の石英や金属等の非ガス透過性モールド材料と異なり、ガス透過性を空孔部分の利用により新たに付与する光硬化性モールド材料は、学術・産業界にとって意義がある。

Report

(4 results)
  • 2018 Annual Research Report   Final Research Report ( PDF )
  • 2017 Research-status Report
  • 2016 Research-status Report
  • Research Products

    (51 results)

All 2019 2018 2017 2016 Other

All Int'l Joint Research (9 results) Journal Article (16 results) (of which Peer Reviewed: 16 results,  Open Access: 3 results,  Acknowledgement Compliant: 6 results) Presentation (22 results) (of which Int'l Joint Research: 22 results) Book (2 results) Remarks (1 results) Patent(Industrial Property Rights) (1 results)

  • [Int'l Joint Research] IMEC(ベルギー)

    • Related Report
      2018 Annual Research Report
  • [Int'l Joint Research] NNIN(米国)

    • Related Report
      2018 Annual Research Report
  • [Int'l Joint Research] IME(シンガポール)

    • Related Report
      2018 Annual Research Report
  • [Int'l Joint Research] 最先端微細加工機関(ベルギー)

    • Related Report
      2017 Research-status Report
  • [Int'l Joint Research] テキサス大学(米国)

    • Related Report
      2017 Research-status Report
  • [Int'l Joint Research] 半導体加工機関(シンガポール)

    • Related Report
      2017 Research-status Report
  • [Int'l Joint Research] テキサス大学/NNIN(米国)

    • Related Report
      2016 Research-status Report
  • [Int'l Joint Research] IME(シンガポール)

    • Related Report
      2016 Research-status Report
  • [Int'l Joint Research] IMEC(ベルギー)

    • Related Report
      2016 Research-status Report
  • [Journal Article] Fabrication of moth-eye gold nanostructures by nanoimprint lithography using solvent-permeable porous cross-link molds derived from hydroxypropyl-cyclodextrin2019

    • Author(s)
      Satoshi Takei
    • Journal Title

      Appl. Phys. Express

      Volume: 12 Pages: 1-5

    • NAID

      210000135639

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Gas permeable microimprint template derived from cellulose nanofiber derivatives for mechanical properties2019

    • Author(s)
      Seigo Murayama, Ikuo Motono, Kento Mizui, Kenji Kondoh, Makoto Hanabata, Satoshi Takei
    • Journal Title

      Journal of Nanomaterials

      Volume: 5180460 Pages: 1-7

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Safety-oriented photolithography of water soluble resist using water-coating and water-developable processes for edible pharmaceutical polymer films2018

    • Author(s)
      Satoshi Takei
    • Journal Title

      Appl. Phys. Express

      Volume: 11 Pages: 1-4

    • NAID

      210000136326

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Ultraviolet nanoimprint gas-permeable templates derived from cellulose with acrylate and methacrylate groups to reduce void defects2018

    • Author(s)
      Shinya Nakajima, Satoshi Takei, Soichiro Takamatsu, Kento Mizui, Toshitaka Oka, Yoko Matsumoto, Atsushi Sekiguchi, Makoto Hanabata
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 57 Pages: 1-6

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Characterization of gas permeability of gas permeable metal plate in photo-imprint lithography2018

    • Author(s)
      Naoto Sugino, Shinya Nakajima, Kento Mizui, Makoto Hanabata, Satoshi Takei
    • Journal Title

      Journal of Photopolymer Science and Technology

      Volume: 31 Pages: 575-580

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Reduction of defect for imprinted UV curable resin including volatile solvents using gas permeable mold derived from cellulose2018

    • Author(s)
      Kento Mizui, Kazuho Kurematsu, Shinya Nakajima, Makoto Hanabata, Satoshi Takei
    • Journal Title

      Journal of Photopolymer Science and Technology

      Volume: 31 Pages: 289-294

    • NAID

      130007481512

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 水・アルコール現像性植物由来レジストを用いた環境配慮型極端紫外光と電子線リソグラフィ2018

    • Author(s)
      竹井敏
    • Journal Title

      放射線化学会誌

      Volume: 106 Pages: 17-20

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Ecofriendly ethanol-developable processes of electron beam lithography using positive-tone dextrin resist material2017

    • Author(s)
      Satoshi Takei, Naoto Sugino, Makoto Hanabata, Akihiro Oshima, Miki Kashiwakura, Takahiro Kozawa, Seiichi Tagawa
    • Journal Title

      Appl. Phys. Express

      Volume: 10 Pages: 0765021-4

    • Related Report
      2017 Research-status Report
    • Peer Reviewed
  • [Journal Article] High-resolution patterning of silver nanopaste containing volatile solvents achieved with gas-permeable mold2017

    • Author(s)
      Satoshi Takei, Shinya Nakajima, Makoto Hanabata
    • Journal Title

      Microelectronic Engineering

      Volume: 190 Pages: 68-72

    • Related Report
      2017 Research-status Report
    • Peer Reviewed
  • [Journal Article] Characterization of gas permeable template material for nanoimprinting2017

    • Author(s)
      Naoto Sugino, Satoshi Takei, Shinya Nakajima, Makoto Hanabata, Takao Kameda, Atsushi Sekiguchi
    • Journal Title

      Journal of Photopolymer Science and Technology

      Volume: 3 Pages: 275-280

    • NAID

      130005950266

    • Related Report
      2017 Research-status Report
    • Peer Reviewed / Open Access
  • [Journal Article] High-resolution nanopatterning of biodegradable polylactide by thermal nanoimprint lithography using gas permeable mold2017

    • Author(s)
      Satoshi Takei and Makoto Hanabata
    • Journal Title

      AIP adv.

      Volume: 7 Pages: 035110-035110

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] One-colour control of activation, excitation and deactivation of a fluorescent diarylethene derivative in super-resolution microscopy2017

    • Author(s)
      Yuhei Arai, Syoji Ito, Hajime Fujita, Yusuke Yoneda, Takahiro Kaji, Satoshi Takei, Ryota Kashihara, Masakazu Morimoto, Masahiro Irie, Hiroshi Miyasaka
    • Journal Title

      Chemical Communications

      Volume: 53 Issue: 29 Pages: 4066-4069

    • DOI

      10.1039/c6cc10073b

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Sub-70nm resolution patterning of high etch-resistant epoxy novolac resins using gas permeable templates in ultraviolet nanoimprint lithography2016

    • Author(s)
      Satoshi Takei and Makoto Hanabata
    • Journal Title

      Appl. Phys. Express

      Volume: 9 Pages: 056501-056501

    • NAID

      210000137909

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Gas-permeable cellulose template for reduction of template damage and gas trapping in microimprint lithography of high volume manufacturing2016

    • Author(s)
      Satoshi Takei, Shinya Nakajima, Kigen Sugahara, Makoto Hanabata, Yoko Matsumoto, and Atsushi Sekiguchi
    • Journal Title

      Macromolecular Materials and Engineering

      Volume: 301 Pages: 902-902

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Green lithography using water-developable sugar-based negative resist materials2016

    • Author(s)
      Satoshi Takei, Makoto Hanabata, Kigen Sugahara, Naoto Sugino, Takao Kameda, and Jiro Fukushima
    • Journal Title

      MRS Advances

      Volume: May Pages: 1-1

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Development of nanoimprint lithography template materials using biomass2016

    • Author(s)
      Shinya Nakajima, Satoshi Takei, Ziqi Zhou, Hirotaka Maki, Kigen Sugahara, Makoto Hanabata, Yoko Matsumoto, and Atsushi Sekiguchi
    • Journal Title

      Journal of Photopolymer Science and Technology

      Volume: 29 Pages: 189-189

    • NAID

      130005256594

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Presentation] Gas permeable mold for defect reduction in nanoimprint lithography2019

    • Author(s)
      Kento Mizui, Haruo Sato, Makoto Hanabata, Satoshi Takei
    • Organizer
      Proc. SPIE (2019) 10958-43
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] High volume manufacturing of optical MEMS devices using biomass nanopatterning materials and ecofriendly water-developable lithography processes2018

    • Author(s)
      Satoshi Takei
    • Organizer
      Proc. SPIE (2018) 10787-28
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Internal structure of metal material with gas permeability function related to MEMS devices2018

    • Author(s)
      Naoto Sugino, Takao Kameda, Satoshi Takei
    • Organizer
      Proc. SPIE (2018) 10787-28
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Utilization of gas permeable metal plate for the purpose of reduction of transfer defect in MEMS electronic device2018

    • Author(s)
      Takao Kameda, Naoto Sugino, Satoshi Takei
    • Organizer
      Proc. SPIE (2018) 10787-29
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Green ethanol-developable lithography processes using positive tone biomass resist material2018

    • Author(s)
      Satoshi Takei
    • Organizer
      Proc. SPIE (2018) 10584-39
    • Related Report
      2017 Research-status Report
    • Int'l Joint Research
  • [Presentation] Nanoimprint lithography using gas-permeable template2018

    • Author(s)
      Makoto Hanabata, Satoshi Takei, Shinya Nakajima, Naoto Sugino, Yoko Matsumoto, Atsushi Sekiguchi
    • Organizer
      Proc. SPIE (2018) 10584-40
    • Related Report
      2017 Research-status Report
    • Int'l Joint Research
  • [Presentation] Ultraviolet nanoimprint gas permeable template derived from cellulose with acrylate and methacrylate groups for reduction of void defect2018

    • Author(s)
      77.Shinya Nakajima, Naoto Sugino, Satoshi Takei, Makoto Hanabata
    • Organizer
      Proc. SPIE (2018) 10584-41
    • Related Report
      2017 Research-status Report
    • Int'l Joint Research
  • [Presentation] Nanoimprint lithography using gas-permeable template2017

    • Author(s)
      Makoto Hanabata, Satoshi Takei, Shinya Nakajima, Naoto Sugino, Yoko Matsumoto, Atsushi Sekiguchi
    • Organizer
      Proc. SPIE (2017) 10146-54
    • Place of Presentation
      サンノゼ米国
    • Year and Date
      2017-02-28
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] Effects of phenolic compound addition to fractionated Novolak-based resists to improve resolution capability2017

    • Author(s)
      Atsushi Sekiguchi, Yoko Matsumoto, Yoshihisa Sensu, Satoshi Takei, Makoto Hanabata
    • Organizer
      Proc. SPIE (2017) 10146-52
    • Place of Presentation
      サンノゼ米国
    • Year and Date
      2017-02-28
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] Extreme-ultraviolet and electron beam lithography processing using water developable resist material2017

    • Author(s)
      Satoshi Takei, Naoto Sugino, Makoto Hanabata
    • Organizer
      Proc. SPIE (2017) 1035414.1-1035414.7
    • Related Report
      2017 Research-status Report
    • Int'l Joint Research
  • [Presentation] Organic-inorganic hybrid resist materials in advanced lithography2017

    • Author(s)
      Satoshi Takei, Naoto Sugino, Makoto Hanabata
    • Organizer
      Proc. SPIE (2017) 103541Q.1-103541Q.6
    • Related Report
      2017 Research-status Report
    • Int'l Joint Research
  • [Presentation] High resolution patterning of ultraviolet cross-linked resins using gas permeable mold derived from cellulose in nanoimprint lithography2017

    • Author(s)
      Shinya Nakajima, Satoshi Takei, Makoto Hanabata, Naoto Sugino, Takao Kameda, Yoko Matsumoto, Atsushi Sekiguchi
    • Organizer
      Proc. SPIE (2017) 103541B.1-103541B.6
    • Related Report
      2017 Research-status Report
    • Int'l Joint Research
  • [Presentation] Temperature dependence of viscoelasticity of crystalline cellulose with different molecular weights added to silicone elastomer2017

    • Author(s)
      Takao kameda, Naoto Sugino, Satoshi Takei and Makoto Hanabata
    • Organizer
      Proc. SPIE (2017) 103541E.1-103541E.6
    • Related Report
      2017 Research-status Report
    • Int'l Joint Research
  • [Presentation] Temperature dependency of mechanical properties for crystalline cellulose added to silicone elastomer2017

    • Author(s)
      Naoto Sugino, Shinya Nakajima, Takao kameda, Satoshi Takei and Makoto Hanabata
    • Organizer
      Proc. SPIE (2017) 103541F.1-103541F.6
    • Related Report
      2017 Research-status Report
    • Int'l Joint Research
  • [Presentation] Water developable cellulose resist material in electron beam lithography2016

    • Author(s)
      Satoshi Takei, Makoto Hanabata, Akihiro Oshima, Miki Kashiwakura Takahiro Kozawa, and Seiichi Tagawa
    • Organizer
      RadTech Asia 2016
    • Place of Presentation
      東京
    • Year and Date
      2016-10-24
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] ater-Soluble Resist Polymers in Eco-Friendly Electron Beam Lithography2016

    • Author(s)
      Satoshi Takei, Makoto Hanabata, Akihiro Oshima, Miki Kashiwakura, Syoji Ito, Takahiro Kozawa, Seiichi Tagawa, and Hiroshi Miyasaka
    • Organizer
      10th Asia-Pacific Conference on Fracture and Strength
    • Place of Presentation
      富山
    • Year and Date
      2016-09-19
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] Fundamental study of inedible cellulose-based polymer for disposable thermal crosslinkable template in micro-imprint lithography2016

    • Author(s)
      Shinya Nakajima, Satoshi Takei, Makoto Hanabata, Yoko Matsumoto, and Atsushi Sekiguchi
    • Organizer
      0th Asia-Pacific Conference on Fracture and Strength
    • Place of Presentation
      富山
    • Year and Date
      2016-09-19
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] Fundamental study of green EUV lithography using natural polysaccharide for the use of pure water in developable process2016

    • Author(s)
      Satoshi Takei
    • Organizer
      Proc. SPIE 9985
    • Place of Presentation
      サンノゼ米国
    • Year and Date
      2016-09-12
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] Approach of UV nanoimprint lithography using template with gas-permeable and gaseous adsorption for reduction of air-trapping issue2016

    • Author(s)
      Satoshi Takei, Naoto Sugino, Takao Kameda, Shinya Nakajima, and Makoto Hanabata
    • Organizer
      Proc. SPIE 9985
    • Place of Presentation
      サンノゼ米国
    • Year and Date
      2016-09-12
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] Evaluation of the properties of the permeability film material using cellulose nanofibers2016

    • Author(s)
      Naoto Sugino, Satoshi Takei and Makoto Hanabata
    • Organizer
      Proc. SPIE 9985
    • Place of Presentation
      サンノゼ米国
    • Year and Date
      2016-09-12
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] Production and evaluation of measuring equipment for share viscosity of polymer melts included nanofiller with injection molding machine2016

    • Author(s)
      Takao kameda, Naoto Sugino, Satoshi Takei and Makoto Hanabata
    • Organizer
      Proc. SPIE 9985
    • Place of Presentation
      サンノゼ米国
    • Year and Date
      2016-09-12
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] Development of nanoimprint lithography template materials using biomass2016

    • Author(s)
      Shinya Nakajima, Satoshi Takei, Ziqi Zhou, Hirotaka Maki, Kigen Sugahara, Makoto Hanabata, Yoko Matsumoto, and Atsushi Sekiguchi
    • Organizer
      33rd International Conference of Photopolymer Science and Technology
    • Place of Presentation
      東京
    • Year and Date
      2016-06-22
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Book] ナノインプリント技術ハンドブック2019

    • Author(s)
      竹井 敏
    • Publisher
      オーム社
    • Related Report
      2018 Annual Research Report
  • [Book] 光化学フロンティア2018

    • Author(s)
      竹井 敏
    • Publisher
      化学同人
    • Related Report
      2018 Annual Research Report
  • [Remarks] 分子・物質合成プラットフォーム: 水溶性レジスト材料を開発~環境に優しい微細加工技術を確立~

    • URL

      https://mms-platform.com/archives/voice/no14/

    • Related Report
      2017 Research-status Report
  • [Patent(Industrial Property Rights)] テンプレート複合材料形成組成物の製造方法2017

    • Inventor(s)
      竹井 敏、花畑 誠、林 蓮貞
    • Industrial Property Rights Holder
      竹井 敏、花畑 誠、林 蓮貞
    • Industrial Property Rights Type
      特許
    • Filing Date
      2017-03-03
    • Related Report
      2016 Research-status Report

URL: 

Published: 2016-04-21   Modified: 2020-03-30  

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