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In-situ measurement of surface layer distortion and monolayer structure by Kikuchi pattern

Research Project

Project/Area Number 16K04964
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Thin film/Surface and interfacial physical properties
Research InstitutionYokohama City University

Principal Investigator

SHIGETA Yukichi  横浜市立大学, 生命ナノシステム科学研究科(八景キャンパス), 教授 (70106293)

Co-Investigator(Kenkyū-buntansha) 戸坂 亜希  横浜市立大学, 生命ナノシステム科学研究科(八景キャンパス), 助教 (20436166)
Research Collaborator NAKATA Junya  
YOSHIDA Ryuuma  
HAGIWARA Yuuto  
HIGUCHI Morio  
NAKAJIMA Syouta  
Project Period (FY) 2016-04-01 – 2019-03-31
Project Status Completed (Fiscal Year 2018)
Budget Amount *help
¥4,810,000 (Direct Cost: ¥3,700,000、Indirect Cost: ¥1,110,000)
Fiscal Year 2018: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2017: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2016: ¥3,250,000 (Direct Cost: ¥2,500,000、Indirect Cost: ¥750,000)
KeywordsRHEED / Surface Fine Structure / Kikuchi Pattern / Surface Fin Structure / 表面・界面物性
Outline of Final Research Achievements

This study, initially, the establishment of a new method using Kikuchi pattern as in situ measurement of microstructural change of the surface (in particular strain) were carried out for the purpose. The Kikuchi pattern includes information of diffraction intensity under various incident conditions in one diffraction image, and accurate structural analysis is possible by using just one image. First, it was found that the positions of the Kikuchi line and the Kikuchi envelope can be accurately reproduced by comparison with the intensity distribution of the rocking curve calculated by the kinetic diffraction theory. Therefore, we tried to measure the establishment of inelastic scattering cross section of the electron beam by comparing between the intensity distributions of the observed and calculated intensity and obtained the preliminary result.

Academic Significance and Societal Importance of the Research Achievements

ICやLSIの新機能創成には、半導体表面における材料の複合化や微細加工技術が不可欠です。その複合化や微細加工の過程で微少な歪が、接合や加工精度に影響を与え、新機能の創成を左右する要因と成ります。そのような微少歪を作成段階で観測し評価できる1つの手法として、高速電子線による回折現象を利用する方法を確立したい。高速電子線の回折像には、菊池パターンと呼ばれる線状の輝線が現れるが、これまで構造解析には用いられていなかったが、このパターンは、構造情報を多く含んでおり、量子計算と比較することで有効に利用できることが分かってきた。

Report

(4 results)
  • 2018 Annual Research Report   Final Research Report ( PDF )
  • 2017 Research-status Report
  • 2016 Research-status Report
  • Research Products

    (12 results)

All 2018 2017 2016

All Journal Article (4 results) (of which Int'l Joint Research: 1 results,  Peer Reviewed: 3 results,  Open Access: 1 results) Presentation (7 results) (of which Int'l Joint Research: 3 results) Book (1 results)

  • [Journal Article] Influence of annealing atmosphere on crystallization of amorphous Si 1-x Ge x thin film by Raman spectroscopy2018

    • Author(s)
      Makino Nobuaki、Shigeta Yukichi
    • Journal Title

      Thin Solid Films

      Volume: 658 Pages: 61-65

    • DOI

      10.1016/j.tsf.2018.04.032

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Surface morphology and structure of Ge layer on Si(111) after solid phase epitaxy2018

    • Author(s)
      Ryoma YOSHIDA, Aki TOSAKA and Yukichi SHIGETA
    • Journal Title

      Surf. Sci.

      Volume: 671 Pages: 43-50

    • DOI

      10.1016/j.susc.2017.12.016

    • Related Report
      2017 Research-status Report
    • Peer Reviewed
  • [Journal Article] Influence of Local Surface Potential on Kikuchi Envelope of High-Energy Electrons within a Reconstructed Surface Layer2017

    • Author(s)
      Yuto Hagiwara and Yukichi Shigeta
    • Journal Title

      J. Phys. Soc. Jpn.

      Volume: 86 Issue: 11 Pages: 114606-6

    • DOI

      10.7566/jpsj.86.114606

    • NAID

      40021376978

    • Related Report
      2017 Research-status Report
    • Peer Reviewed
  • [Journal Article] Application of Kikuchi pattern to precise surface structure of GaN(0001) substrates at different polishing stages2016

    • Author(s)
      Y. Shigeta , Y. Hagiwara, T. Otaka J. Namkata, A. Tosaka and K. Koyama
    • Journal Title

      Atomically Controlled Surfaces Interfaces and Nanostructures, Superstripes Press, Rome

      Volume: 1 Pages: 106-107

    • Related Report
      2016 Research-status Report
    • Open Access
  • [Presentation] Fine Analysis of Surface Structure by using Kikuchi Envelope of Reflection High-Energy Electron Diffraction2018

    • Author(s)
      Y. Shigeta, Y. Hagiwara and M. Higuchi,
    • Organizer
      15th European Vacuum Conference (EVC-15)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 菊池エンベロープを用いた表面構造解析2018

    • Author(s)
      樋口森生, 入内島大貴, 萩原裕人, 戸坂亜希, 重田諭吉
    • Organizer
      日本物理学会 第 73 回年次大会(2018 年)24pK603-10
    • Related Report
      2017 Research-status Report
  • [Presentation] 反射高速電子回折による α- Al2O3(0001)面の表面構造解析2018

    • Author(s)
      中島 翔太 ,戸坂 亜希 ,重田 諭吉
    • Organizer
      日本物理学会 第 73 回年次大会(2018 年)24pK603-11
    • Related Report
      2017 Research-status Report
  • [Presentation] Si(111) √3x√3-Ag表面に対する菊池パターンの強度計算2017

    • Author(s)
      萩原裕人, 戸坂亜希, 重田諭吉
    • Organizer
      日本物理学会 第72回年次大会
    • Place of Presentation
      大阪大学豊中キャンパス(大阪府豊中市)
    • Year and Date
      2017-03-17
    • Related Report
      2016 Research-status Report
  • [Presentation] Influence of Local Surface Potential on Kikuchi envelope and Channeling of High-Energy Electrons on Reconstructed Surface2017

    • Author(s)
      Y. Shigeta & Y. Hagiwara
    • Organizer
      The 33rd European Conference on Surface Science (ECOSS33)
    • Related Report
      2017 Research-status Report
    • Int'l Joint Research
  • [Presentation] Application of Kikuchi pattern to precise surface structure measurement of GaN(0001) substrates at different polishing stages2016

    • Author(s)
      Y. Shigeta, Y. Hagiwara, T. Otaka J.Nakata, A. Tosaka and K. Koyama
    • Organizer
      The 13th international conference on Atomically Controlled Surfaces Interfaces and Nanostructures
    • Place of Presentation
      Frascati, Rome Italy
    • Year and Date
      2016-10-09
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] 菊池パターンを用いた表面層の精密構造解析2016

    • Author(s)
      萩原裕人, 戸坂亜希, 重田諭吉
    • Organizer
      日本物理学会2016年秋季大会
    • Place of Presentation
      金沢大学角間キャンパス(金沢市角間町)
    • Year and Date
      2016-09-13
    • Related Report
      2016 Research-status Report
  • [Book] 「反射高速電子線回折法による表面構造解析」横浜市立大学論叢 自 然 科 学 系 列 第67巻 pp.17-50.2018

    • Author(s)
      重田 諭吉
    • Total Pages
      34
    • Publisher
      横浜市立大学学術研究会
    • Related Report
      2018 Annual Research Report

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Published: 2016-04-21   Modified: 2020-03-30  

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