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Development of the 3 dimensional structural multi-layer thin film preparation processes by the back side irradiation using powder target PLD method

Research Project

Project/Area Number 16K04999
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Plasma electronics
Research InstitutionSasebo National College of Technology

Principal Investigator

Kawasaki Hiroharu  佐世保工業高等専門学校, 電気電子工学科, 教授 (10253494)

Research Collaborator Ohshima Tamiko  佐世保工業高等専門学校, 電気電子工学科, 准教授 (00370049)
Yagyu Yoshihito  佐世保工業高等専門学校, 電気電子工学科, 准教授 (40435483)
Ihara Takeshi (Shinohara Masanori)  佐世保工業高等専門学校, 電気電子工学科, 講師 (30634050)
Project Period (FY) 2016-04-01 – 2019-03-31
Project Status Completed (Fiscal Year 2018)
Budget Amount *help
¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000)
Fiscal Year 2018: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2017: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2016: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
Keywords粉体ターゲット / スパッタリング成膜 / パルスレーザデポジション / プラズマプロセス / 薄膜 / 裏面照射 / プラズマ・核融合 / プラズマエレクトロニクス
Outline of Final Research Achievements

Functional thin films were deposited using a new thin-film preparation method named the back-surface irradiation pulsed laser deposition (BIPLD) method. In the BIPLD method, powder targets were used as the film source placed on a transparent target holder, and then a visible-wavelength pulsed laser was irradiated from the holder side to the substrate. Using this new method, titanium oxide thin films were deposited on the silicon substrate. Surface scanning electron microscopy (SEM) images suggest that all of the thin films can be prepared on the substrate with some large droplets irrespective of the kind of target used. X-ray photoelectron spectroscopy and X-ray diffraction (XRD) measurement results suggest that rutile and anatase TiO2 crystal peaks were observed for the films prepared using the TiO2 rutile powder target. The crystallinity of the prepared films was changed by annealing after deposition.

Academic Significance and Societal Importance of the Research Achievements

裏面照射型粉体ターゲットPLD法を用いて、機能性薄膜の作製を行った。その結果機能性薄膜が作製できることがわかった。この成果は、無限の組み合わせの多元素薄膜の作成が可能であることを示唆しており、プラズマプロセスを用いた薄膜作製の汎用性向上に大いに役立てられると考えている。また、この方法を応用できれば、2次元薄膜や、3次元多元素機能性薄膜作製システムの開発に応用できる。これによって、3次元の多元素機能性薄膜作製システムを開発し、成膜速度を向上できれば、金属の3次元プリンタへの応用も可能となる。

Report

(4 results)
  • 2018 Annual Research Report   Final Research Report ( PDF )
  • 2017 Research-status Report
  • 2016 Research-status Report
  • Research Products

    (51 results)

All 2019 2018 2017 2016

All Journal Article (16 results) (of which Peer Reviewed: 16 results,  Open Access: 15 results,  Acknowledgement Compliant: 2 results) Presentation (33 results) (of which Int'l Joint Research: 7 results,  Invited: 1 results) Book (1 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] Preparation of Sn doped SiO2 thin films by magnetron sputtering deposition using metal and metal-oxide powder targets2019

    • Author(s)
      H. Kawasaki, T. Ohshima, Y. Yagyu, T. Ihara, M. Shinohara, Y. Suda
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 58 Issue: SA Pages: SAAD04-SAAD04

    • DOI

      10.7567/1347-4065/aaea67

    • NAID

      210000135198

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Deposition of Hydrophilic Amorphous Carbon Film with Ether as a Source Molecule and Analysis of its Deposition Reaction2018

    • Author(s)
      篠原正典,冨永泰佑,下村勇登,猪原武士,柳生義人,大島多美子,川崎仁晴
    • Journal Title

      IEEJ Transactions on Fundamentals and Materials

      Volume: 138 Issue: 11 Pages: 538-543

    • DOI

      10.1541/ieejfms.138.538

    • ISSN
      0385-4205, 1347-5533
    • Year and Date
      2018-11-01
    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] IR Absorption Spectroscopy of Deposition Process of Amorphous Carbon Film due to Ethylene Plasma2018

    • Author(s)
      篠原正典,冨永泰佑,下村勇登,猪原武士,柳生義人,大島多美子,川崎仁晴
    • Journal Title

      IEEJ Transactions on Fundamentals and Materials

      Volume: 138 Issue: 11 Pages: 544-550

    • DOI

      10.1541/ieejfms.138.544

    • ISSN
      0385-4205, 1347-5533
    • Year and Date
      2018-11-01
    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Sterilization for Bacillus Subtilis var. natto by Low Pressure Sputtering and Laser Ablation Plasma using Metal Powder Target2018

    • Author(s)
      H. Kawasaki, Y. Yagyu, T. Ohshima, T. Ihara, M. Shinohara
    • Journal Title

      Transactions of the Materials Research Society of Japan

      Volume: 43 Issue: 5 Pages: 293-296

    • DOI

      10.14723/tmrsj.43.293

    • NAID

      130007491423

    • ISSN
      1382-3469, 2188-1650
    • Year and Date
      2018-10-01
    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Preparation of metal doped SiO<sub>2</sub> films by magnetron sputtering deposition using metal oxide mixture powder target2018

    • Author(s)
      H. Kawasaki, T. Ohshima,Y. Yagyu, T. Ihara, M. Shinohara, Y. Suda
    • Journal Title

      Transactions of the Materials Research Society of Japan

      Volume: 43 Issue: 1 Pages: 27-30

    • DOI

      10.14723/tmrsj.43.27

    • NAID

      130006329950

    • ISSN
      1382-3469, 2188-1650
    • Related Report
      2018 Annual Research Report 2017 Research-status Report
    • Peer Reviewed / Open Access
  • [Journal Article] Coating of inner surface of cylindrical pipe for hydrogen entry prevention using plasma process2017

    • Author(s)
      Kawasaki Hiroharu、Nishiguchi Hiroshi、Furutani Takumi、Ohshima Tamiko、Yagyu Yoshihito、Ihara Takeshi、Shinohara Masanori、Suda Yoshiaki
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 57 Issue: 1S Pages: 01AB02-01AB02

    • DOI

      10.7567/jjap.57.01ab02

    • NAID

      210000148534

    • Related Report
      2018 Annual Research Report 2017 Research-status Report
    • Peer Reviewed / Open Access
  • [Journal Article] Preparation of tris(8-hydroxyquinolinato)aluminum thin films by sputtering deposition using powder and pressed powder targets2017

    • Author(s)
      Hiroharu Kawasaki, Tamiko Ohshima, Yoshihito Yagyu, Takeshi Ihara, Rei Tanaka and Yoshiaki Suda
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 56 Issue: 6S2 Pages: 06HE01-06HE01

    • DOI

      10.7567/jjap.56.06he01

    • NAID

      210000147964

    • Related Report
      2017 Research-status Report
    • Peer Reviewed / Open Access
  • [Journal Article] Preparation of Sn doped SiO<sub>2</sub> films using SiO<sub>2</sub> and SnO<sub>2</sub> mixture powder target by magnetron sputtering deposition2017

    • Author(s)
      Hiroharu Kawasaki, Tamiko Ohshima, Yoshihito Yagyu, Takeshi Ihara, Yoshiaki Suda
    • Journal Title

      Transactions of the Materials Research Society of Japan

      Volume: 42 Issue: 3 Pages: 73-76

    • DOI

      10.14723/tmrsj.42.73

    • NAID

      130006943323

    • ISSN
      1382-3469, 2188-1650
    • Related Report
      2017 Research-status Report
    • Peer Reviewed / Open Access
  • [Journal Article] Thin-film preparation by back-surface irradiation pulsed laser deposition using metal powder targets2017

    • Author(s)
      Hiroharu Kawasaki, Tamiko Ohshima, Yoshihito Yagyu, Takeshi Ihara, Makiko Yamauchi and Yoshiaki Suda
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 56 Issue: 1S Pages: 01AB06-01AB06

    • DOI

      10.7567/jjap.56.01ab06

    • NAID

      210000147366

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Open Access
  • [Journal Article] Preparation of tris(8-hydroxyquinolinato)aluminium thin films by sputtering deposition using powder and powder pressed targets2017

    • Author(s)
      Hiroharu Kawasaki, Tamiko Ohshima, Yoshihito Yagyu, Takeshi Ihara, Rei Tanaka, Yoshiaki Suda
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 印刷中

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Optical Study of Laser Ablation Plasma Irradiation for the Bacteria Sterilization using Metal Oxide Target2016

    • Author(s)
      Hiroharu Kawasaki, Tamiko Ohshima, Yoshihito Yagyu, Takeshi Ihara, Makiko Yamauchi and Yoshiaki Suda
    • Journal Title

      Transactions of the Materials Research Society of Japan

      Volume: 41 Issue: 2 Pages: 205-208

    • DOI

      10.14723/tmrsj.41.205

    • NAID

      130005155985

    • ISSN
      1382-3469, 2188-1650
    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Open Access
  • [Journal Article] Preparation of mixed bismuth and iron thin films by pulsed laser deposition using powder targets2016

    • Author(s)
      Hiroharu Kawasaki, Tamiko Ohshima, Yoshihito Yagyu, Takeshi Ihara, Yuki Tanaka, Yoshiaki Suda
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 55 Issue: 1S Pages: 01AA14-01AA14

    • DOI

      10.7567/jjap.55.01aa14

    • NAID

      210000145930

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Open Access
  • [Journal Article] Strength of plasma coating and effect of a plasma coating on hydrogen entry2016

    • Author(s)
      Hiroshi Nishiguchi, Tamiko Ohshima, Hiroharu Kawasaki, and Takayuki Fukuda
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 55 Issue: 1S Pages: 01AF05-01AF05

    • DOI

      10.7567/jjap.55.01af05

    • NAID

      210000145992

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Open Access
  • [Journal Article] Sputtering deposition of Al-doped zinc oxide thin films using mixed powder targets2016

    • Author(s)
      Tamiko Ohshima, Takashi Maeda, Yuki Tanaka, Hiroharu Kawasaki, Yoshihito Yagyu, Takeshi Ihara, Yoshiaki Suda
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 55 Issue: 1S Pages: 01AA08-01AA08

    • DOI

      10.7567/jjap.55.01aa08

    • NAID

      210000145924

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Open Access
  • [Journal Article] Preparation of Er2O3 and TiO2 multilayer films as optical filter using magnetron sputtering deposition2016

    • Author(s)
      Hiroharu Kawasaki, Yoshiaki Suda, Tamiko Ohshima, Yoshihito Yagyu and Takeshi Ihara
    • Journal Title

      IEEE Transactions on Plasma Science

      Volume: 44 Issue: 12 Pages: 3066-3070

    • DOI

      10.1109/tps.2016.2575864

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Open Access
  • [Journal Article] In situ Analysis of Discharge Sound and I-V Characteristic on Gliding Arc Discharge for Nano Particle Preparation2016

    • Author(s)
      Shin-ichi Aoqui, Fumiaki Mitsugi, Yoshito Sonoda, Toshiyuki Nakamiya, Hiroharu
    • Journal Title

      Physics Procedia

      Volume: 85 Pages: 47-53

    • DOI

      10.1016/j.phpro.2016.11.080

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Presentation] 粉体ターゲットによる2次元薄膜の作製I2019

    • Author(s)
      川崎仁晴
    • Organizer
      第65回応用物理学会春期学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Trial of the two-dimentional functional thin film preparation by sputtering method using powder targets2019

    • Author(s)
      川崎仁晴
    • Organizer
      ISPlasma2019/IC-PLANTS2019
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 「放電プラズマの研究ネットワーク」事業2018

    • Author(s)
      川崎仁晴
    • Organizer
      平成30年度 高専フォーラム 名古屋大学
    • Related Report
      2018 Annual Research Report
  • [Presentation] レーザアブレーションプラズマによる滅菌I2018

    • Author(s)
      川崎仁晴
    • Organizer
      平成30年 79回 日本応用物理学会秋季大会、名古屋国際会議
    • Related Report
      2018 Annual Research Report
  • [Presentation] 高専における放電プラズマネットワークの形成と現状2018

    • Author(s)
      川崎仁晴
    • Organizer
      平成30年度高専技大プラズマネットワーク研究会 長岡技科大
    • Related Report
      2018 Annual Research Report
  • [Presentation] Metal doped Thin Film Preparation using Metal and Metal Oxide Powder Mixture Targets2018

    • Author(s)
      川崎仁晴
    • Organizer
      ACSIN14-ICSPM26 仙台国際センター
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Method for preventing hydrogen embrittlement using plasma process2018

    • Author(s)
      川崎仁晴
    • Organizer
      2nd Asia-Pacific Conference on Plasma Physics, The Kanazawa Chamber of Commerce and Industry 2018.11.13, AP-2
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Preparation of several kinds of elements mixed thin films by plasma process using powder targets III2018

    • Author(s)
      川崎仁晴
    • Organizer
      P-47 The 40th International Symposium on Dry Process, Toyoda Auditorium, Nagoya University
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 佐世保高専におけるプラズマプロセスを用いた薄膜作製研究2018

    • Author(s)
      川崎仁晴
    • Organizer
      2018年プラズマ核融合学会年次大会
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] Preparation of metal doped SiO2 thin film by sputtering method using powder targets II2018

    • Author(s)
      川崎 仁晴
    • Organizer
      ISPlasma2017/IC-PLANTS2017
    • Related Report
      2017 Research-status Report
  • [Presentation] 酸化物粉体ターゲットによる機能性薄膜の作製II2018

    • Author(s)
      川崎 仁晴
    • Organizer
      第64回応用物理学会春期学術講演会、早稲田大学
    • Related Report
      2017 Research-status Report
  • [Presentation] 裏面照射型粉体PLDによる機能性薄膜の作製Ⅱ2017

    • Author(s)
      川崎仁晴
    • Organizer
      第63回応用物理学会春期学術講演会
    • Place of Presentation
      パシフィコ横浜
    • Year and Date
      2017-03-14
    • Related Report
      2016 Research-status Report
  • [Presentation] 複数元素の粉体ターゲットを用いた発光素子薄膜の作製I2017

    • Author(s)
      川崎仁晴
    • Organizer
      第63回応用物理学会春期学術講演会
    • Place of Presentation
      パシフィコ横浜
    • Year and Date
      2017-03-14
    • Related Report
      2016 Research-status Report
  • [Presentation] Bacteria Sterilization by Pulsed laser ablation using several kind of Metals and Metal Oxide targets2017

    • Author(s)
      Hiroharu Kawasaki
    • Organizer
      ISPlasma2017/IC-PLANTS2017
    • Place of Presentation
      CYUBU University
    • Year and Date
      2017-03-04
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] Bacteria Sterilization by Laser Ablated Plasma using Several Metal and Metal-Oxide Targets2017

    • Author(s)
      H. Kawasaki
    • Organizer
      第34回プラズマプロセシング研究会
    • Place of Presentation
      北海道大学 学術交流会館
    • Year and Date
      2017-01-16
    • Related Report
      2016 Research-status Report
  • [Presentation] Preparation of metal doped thin film by sputtering method using some kinds of metal mixed powder target2017

    • Author(s)
      川崎 仁晴
    • Organizer
      IUMRS-ICAM2017, Yoshida Campus, Kyoto University
    • Related Report
      2017 Research-status Report
  • [Presentation] アンケートを基にした0~12歳の環境と理科離れとの関連に関する研究2017

    • Author(s)
      川崎 仁晴
    • Organizer
      電気学会教育フロンティア研究会、日本大学駿河台キャンパス
    • Related Report
      2017 Research-status Report
  • [Presentation] 高専生へのアンケートを元にした理科離れ防止策の検討II2017

    • Author(s)
      川崎 仁晴
    • Organizer
      78回 日本応用物理学会秋季大会、福岡国際会議場、5p-PB4-2
    • Related Report
      2017 Research-status Report
  • [Presentation] 粉体ターゲットによる燃料電池用多元素薄膜の作製2017

    • Author(s)
      川崎 仁晴
    • Organizer
      日本応用物理学会秋季大会、福岡国際会議場、8a-PB4-1
    • Related Report
      2017 Research-status Report
  • [Presentation] 粉体ターゲットを用いた機能性薄膜作製技術の開発2017

    • Author(s)
      川崎 仁晴
    • Organizer
      接合科学共同利用・共同研究拠点 大阪大学接合科学研究所 平成29年度 共同研究成果発表会
    • Related Report
      2017 Research-status Report
  • [Presentation] Preparing of light emitting thin films by plasma process using multi-elements powder targets I2017

    • Author(s)
      川崎 仁晴
    • Organizer
      Plasma Conference 2017, 24P-35
    • Related Report
      2017 Research-status Report
  • [Presentation] 粉体ターゲットによるSnドープSiO2薄膜の作製2017

    • Author(s)
      川崎 仁晴
    • Organizer
      平成29年度応用物理学会九州支部学術講演会 宮崎観光ホテル
    • Related Report
      2017 Research-status Report
  • [Presentation] 粉体ターゲットスパッタリング成膜による多元素酸化物薄膜の作製2017

    • Author(s)
      川崎 仁晴
    • Organizer
      平成29年度プラズマ核融合学会九州支部 D-4
    • Related Report
      2017 Research-status Report
  • [Presentation] 水素エネルギー教育のためのプラズマ応用教材開発2016

    • Author(s)
      川崎仁晴
    • Organizer
      第4回リバネス教育応援助成金Honda賞発表会
    • Place of Presentation
      TEPIA先端技術館
    • Year and Date
      2016-12-24
    • Related Report
      2016 Research-status Report
  • [Presentation] Thin Film Preparation by Plasma Processes Using Several Metal Powder Targets I2016

    • Author(s)
      Hiroharu KAWASAKI
    • Organizer
      26th Annual Meeting of MRS-J
    • Place of Presentation
      Yokohama Media & Communications Center
    • Year and Date
      2016-12-20
    • Related Report
      2016 Research-status Report
  • [Presentation] 学生実験用ビデオ教材の作製と導入の効果II2016

    • Author(s)
      川崎 仁晴
    • Organizer
      応用物理学会九州支部
    • Place of Presentation
      対馬市文化センター
    • Year and Date
      2016-12-04
    • Related Report
      2016 Research-status Report
  • [Presentation] 理系学生へのアンケートを元にした理科離れ防止策の検討I2016

    • Author(s)
      川崎仁晴
    • Organizer
      応用物理学会九州支部
    • Place of Presentation
      対馬市文化センター
    • Year and Date
      2016-12-04
    • Related Report
      2016 Research-status Report
  • [Presentation] 理系における教科書の国語表記と高専教育の関連2016

    • Author(s)
      川崎仁晴
    • Organizer
      応用物理学会九州支部
    • Place of Presentation
      対馬市文化センター
    • Year and Date
      2016-12-04
    • Related Report
      2016 Research-status Report
  • [Presentation] Preparation of several kinds of elements mixed thin films by plasma process using powder targets2016

    • Author(s)
      H. Kawasaki
    • Organizer
      The 38th International Symposium on Dry Process
    • Place of Presentation
      hokkaido Univ.
    • Year and Date
      2016-11-22
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] スパッタ法を併用したPLD 法で作製した金属ドープ酸化タングステンのNOx ガスセンサ特性2016

    • Author(s)
      川崎仁晴
    • Organizer
      第33回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      平戸文化センター
    • Year and Date
      2016-10-25
    • Related Report
      2016 Research-status Report
  • [Presentation] Bacteria sterilization by metal ablated plasma using high power laser2016

    • Author(s)
      H. Kawasaki
    • Organizer
      The First International Conference on Hybridized Agriculture
    • Place of Presentation
      Sojo University
    • Year and Date
      2016-10-22
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] プラズマプロセスによる水素脆性防止膜の作製と評価I2016

    • Author(s)
      川崎仁晴
    • Organizer
      日本応用物理学会秋季大会
    • Place of Presentation
      新潟朱鷺メッセ
    • Year and Date
      2016-09-15
    • Related Report
      2016 Research-status Report
  • [Presentation] 高専生へのアンケートを元にした理科離れ防止策の検討I2016

    • Author(s)
      川崎仁晴
    • Organizer
      日本応用物理学会秋季大会
    • Place of Presentation
      新潟朱鷺メッセ
    • Year and Date
      2016-09-14
    • Related Report
      2016 Research-status Report
  • [Book] プラズマCVDにおける成膜条件の最適化に向けた反応機構の理解とプロセス制御・成膜事例2018

    • Author(s)
      篠原正典、川崎仁晴
    • Total Pages
      328
    • Publisher
      サイエンス&テクノロジー
    • ISBN
      486428170X
    • Related Report
      2018 Annual Research Report
  • [Patent(Industrial Property Rights)] 除菌、殺菌又は減菌装置及び除菌、殺菌又は減菌方法2016

    • Inventor(s)
      川崎仁晴、大島多美子
    • Industrial Property Rights Holder
      独立行政法人国立高等専門学校機構
    • Industrial Property Rights Type
      特許
    • Filing Date
      2016
    • Acquisition Date
      2018
    • Related Report
      2018 Annual Research Report 2017 Research-status Report

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Published: 2016-04-21   Modified: 2020-03-30  

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