Optical properties of Si nanocrystals fabricated by ion and laser beams

• Project/Area Number: 16K05013
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Quantum beam science
• Research Institution: Aichi University of Education
• Principal Investigator: Iwayama Tsutomu 愛知教育大学, 教育学部, 教授 (70223435)
• Project Period (FY): 2016-04-01 – 2020-03-31
• Project Status: Completed (Fiscal Year 2019)
• Budget Amount: ¥4,810,000 (Direct Cost: ¥3,700,000、Indirect Cost: ¥1,110,000); Fiscal Year 2018: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000); Fiscal Year 2017: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000); Fiscal Year 2016: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
• Keywords: イオン・レーザービーム / 量子ビーム / シリコン / ナノ結晶 / 可視発光 / イオン注入 / レーザーアブレーション / シリコンナノ結晶 / 光機能性デバイス / 急速加熱 / エキシマ光照射 / 機能性デバイス / 量子ドット / ナノ材料 / 先端機能デバイス / マイクロ・ナノデバイス

Outline of Final Research Achievements

In this work, the potentialities of excimer UV-light irradiation and rapid thermal annealing to enhance the photoluminescence and to achieve low temperature formation of Si nanocrystals have been investigated. The implanted samples were subsequently irradiated with an excimer-UV lamp. After the process, the samples were rapidly thermal annealed before furnace annealing. We found that the luminescence intensity is strongly enhanced with excimer-UV irradiation and RTA. We also found that the similar luminescent Si nanocrystals can be produced by reactive pulsed laser deposition (reactive-PLD) techniques.

Academic Significance and Societal Importance of the Research Achievements

電子デバイスの分野では、シリコンは極めて有用で、必要不可欠な物質である。しかしながら、シリコンは発光デバイスとしては全く実用化されていない。本研究は、この様なシリコンの新機能性の発現・高効率化とそのデバイス応用の可能性を中心とした。物質はナノオーダーのサイズになると固体とは異なる性質を示す可能性がある。本研究ではシリコンナノ結晶からの発光強度の増強、プロセスの低温化も可能となることを明らかにした。

Research Products

• [Journal Article] Optical properties of Si nanocrystals in SiO2 matrix synthesized by reactive pulsed laser deposition (2020)
  • Author(s): Iwayama Tsutomu、Ogihara Ken
  • Journal Title: Journal of Physics: Conference Series Volume: 1527 Issue: 1 Pages: 012027-012027
  • DOI: 10.1088/1742-6596/1527/1/012027
  • Peer Reviewed / Open Access
• [Presentation] Optical properties of Si nanocrystals in SiO2 matrix synthesized by reactive pulsed laser deposition. (2019)
  • Author(s): Tsutomu Iwayama
  • Organizer: The 1st European Conference on Silicon and Silica Based Materials (ec-siliconf1)
  • Int'l Joint Research / Invited
• [Presentation] Luminescent Si nanocrystals synthesized by reactive pulsed laser deposition (2018)
  • Author(s): T.S.Iwayama, K.Ogihara
  • Organizer: E-MRS 2018 Spring Meeting, Strasbourg, France
  • Int'l Joint Research
• [Presentation] Optical properties of silicon nanocrystals synthesized by reactive pulsed laser deposition (2018)
  • Author(s): T.S.Iwayama, K.Ogihara
  • Organizer: EURODIM 2018, Bydgoszcz, Poland
  • Int'l Joint Research / Invited
• [Presentation] Optical properties of silicon nanocrystals in SiO2 matrix synthesized by reactive pulsed laser deposition (2018)
  • Author(s): T.S.Iwayama
  • Organizer: SATF2018, Cesme, Izmir, Turkey
  • Int'l Joint Research / Invited
• [Presentation] Optical properties of Si nanocrystals fabricated by ion implantation and reactive PLD (2016)
  • Author(s): T.S.Iwayama
  • Organizer: EMN Nanocrystals Meeting
  • Place of Presentation: 西安（中国）
  • Year and Date: 2016-10-17
  • Int'l Joint Research / Invited
• [Presentation] Optical properties of encapsulated nano-sized Si in SiO2 fabricated by ion implantation and reactive PLD (2016)
  • Author(s): T.S.Iwayama, K.Ogihara, T.Hama
  • Organizer: Science & Applications of Thin Films
  • Place of Presentation: チェシュメ（トルコ）
  • Year and Date: 2016-09-19
  • Int'l Joint Research / Invited