| Project/Area Number |
16K05999
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | Toyama Prefectural University (2017-2018)
Tohoku University (2016) |
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Principal Investigator |
Ito So 富山県立大学, 工学部, 准教授 (00624818)
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| Project Period (FY) |
2016-04-01 – 2019-03-31
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| Project Status |
Completed (Fiscal Year 2018)
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| Budget Amount *help |
¥4,810,000 (Direct Cost: ¥3,700,000、Indirect Cost: ¥1,110,000)
Fiscal Year 2018: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2017: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2016: ¥2,600,000 (Direct Cost: ¥2,000,000、Indirect Cost: ¥600,000)
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| Keywords | 計測工学 / 超精密計測 / 精密位置決め / マイクロプローブ / 実時空間校正 / スロットダイ / メトロロジー / 機械工作・生産工学 |
|---|
| Outline of Final Research Achievements |
In this study, a micro-probing system based on the detection of local interaction force was developed for precision dimensional measurement of micro-slit gap width. All direction probing detection was achieved by employing the vertical vibrating micro-styli. Furthermore, the developed microprobing system could realize nanometer-scale resolution on the distance detection between the probe tip and the surface of the workpiece. To ensure the accuracy of the dimensional measurement, the measurement method of the probe tip ball using a rotating reference sphere was proposed.
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| Academic Significance and Societal Importance of the Research Achievements |
ミクロンオーダのスリットや開口を有する精密部品は，機能性材料のコーティングや内燃機関，化学・医薬品製造等に幅広く使用されており，マイクロ開口の形状や寸法の精度は機器や製品の性能や品質に影響を及ぼすことからナノメートル精度での測定が要求されている．本研究ではミクロンサイズの開口内部を高感度かつ精密に直接計測可能なマイクロプローブを開発し，微小溝幅のナノ精度の計測及び精度保証に取り組んだ．本研究成果は複雑な形状を有するマイクロサイズ機械部品や工具の三次元精密計測の高精度化への貢献が期待される．
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