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Room temperature metal bonding for highly hermetic sealing of microdevice

Research Project

Project/Area Number 16K06034
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Production engineering/Processing studies
Research InstitutionNational Institute of Advanced Industrial Science and Technology

Principal Investigator

Kurashima Yuichi  国立研究開発法人産業技術総合研究所, エレクトロニクス・製造領域, 主任研究員 (70408730)

Co-Investigator(Kenkyū-buntansha) 高木 秀樹  国立研究開発法人産業技術総合研究所, エレクトロニクス・製造領域, 副研究センター長 (00357344)
鈴木 健太  国立研究開発法人産業技術総合研究所, エレクトロニクス・製造領域, 主任研究員 (60709509)
Project Period (FY) 2016-04-01 – 2019-03-31
Project Status Completed (Fiscal Year 2018)
Budget Amount *help
¥4,810,000 (Direct Cost: ¥3,700,000、Indirect Cost: ¥1,110,000)
Fiscal Year 2018: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2017: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
Fiscal Year 2016: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Keywords常温接合 / マイクロデバイス / 実装 / MEMS / 微細加工 / MEMS / 表面平滑化 / 気密封止 / 平滑化 / 封止 / マイクロ・ナノデバイス / 電子・電気材料 / デバイス設計・製造プロセス
Outline of Final Research Achievements

We demonstrated a direct transfer technique of Au thin layer onto electroplated Au surface from a surface of atomically smooth master wafer. An atomically smooth Au surface with a root mean square surface roughness of 0.6 nm could be transferred from the master wafer. We also examined its applicability to room-temperature Au-Au bonding in atmosphere. A high bonding strength of about 225 MPa was obtained. As a result of of He leak testing, it also showed high hermeticity less than measurement limit.

Academic Significance and Societal Importance of the Research Achievements

エレクトロニクス実装分野において金属同士の接合を実現するには、高温下での接合が一般的であった。原子レベルで平滑な表面を用いることで、常温低荷重でデバイスの真空気密封止を可能にする技術を新たに確立した。この技術を用いればダメージレスのデバイスパッケージングへの実現につながる。これにより研究室レベルでしか実現出来なかった様々なデバイスが世の中に製品として広く実用化されることが期待できる。

Report

(4 results)
  • 2018 Annual Research Report   Final Research Report ( PDF )
  • 2017 Research-status Report
  • 2016 Research-status Report
  • Research Products

    (3 results)

All 2019 2018 2017

All Journal Article (1 results) (of which Peer Reviewed: 1 results) Presentation (2 results) (of which Int'l Joint Research: 1 results)

  • [Journal Article] Room-temperature Au?Au bonding in atmospheric air using direct transferred atomically smooth Au film on electroplated patterns2018

    • Author(s)
      Kurashima Yuichi、Matsumae Takashi、Takagi Hideki
    • Journal Title

      Microelectronic Engineering

      Volume: 189 Pages: 1-5

    • DOI

      10.1016/j.mee.2017.12.004

    • Related Report
      2017 Research-status Report
    • Peer Reviewed
  • [Presentation] Auメッキ封止枠を用いた常温気密封止接合 ―剥離転写法によるメッキ表面の平滑化―2019

    • Author(s)
      倉島優一 松前貴司 日暮栄治 高木秀樹
    • Organizer
      2019年度精密工学会春季大会学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Direct transfer of atomically smooth Au film onto electroplated patterns for room-temperature Au-Au bonding in atmospheric air2017

    • Author(s)
      Kurashima Yuichi、Matsumae Takashi、Takagi Hideki
    • Organizer
      2017 5th International Workshop on Low Temperature Bonding For 3d Integration
    • Related Report
      2017 Research-status Report
    • Int'l Joint Research

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Published: 2016-04-21   Modified: 2020-03-30  

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