Development of a MEMS thermal sensor for a search of the surface effect for nano particles

Research Project

Project/Area Number	16K06140
Research Category	Grant-in-Aid for Scientific Research (C)
Allocation Type	Multi-year Fund
Section	一般
Research Field	Thermal engineering
Research Institution	National Institute of Advanced Industrial Science and Technology
Principal Investigator	Abe Haruka 国立研究開発法人産業技術総合研究所, 計量標準総合センター, 主任研究員 (70462835)
Project Period (FY)	2016-04-01 – 2019-03-31
Project Status	Completed (Fiscal Year 2018)
Budget Amount *help	¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000) Fiscal Year 2018: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000) Fiscal Year 2017: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000) Fiscal Year 2016: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Keywords	比熱容量 / 熱工学
Outline of Final Research Achievements	There is a differential scanning calorimeter as one of the thermal analysis equipment to measure the specific heat capacity of materials, but it is difficult to catch the small heat. So a differential thermal sensor using the Micro Electro Mechanical Systems (MEMS) has been developed in this research. It is possible to test the assumption of the surface effect for the specific heat capacity.
Academic Significance and Societal Importance of the Research Achievements	本研究成果により、これまで市販装置では捕らえることができなかったナノ・マイクロサイズの物質の熱的性質を観測できる可能性がある。今回開発した示差熱測定式MEMS 熱量センサーの測定の信頼性が確保できれば、多岐にわたる産業分野でのナノ材料等の熱量評価に大きく貢献できると期待される。