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Dramatic spread of substrate materials for semiconducting layer formation by spraying ZnO nanoparticles

Research Project

Project/Area Number 16K06263
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionShimane University

Principal Investigator

Yoshida Toshiyuki  島根大学, 学術研究院理工学系, 講師 (50335551)

Co-Investigator(Kenkyū-buntansha) 藤田 恭久  島根大学, 学術研究院理工学系, 教授 (10314618)
Project Period (FY) 2016-10-21 – 2020-03-31
Project Status Completed (Fiscal Year 2019)
Budget Amount *help
¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000)
Fiscal Year 2018: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2017: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2016: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
KeywordsZnOナノ粒子 / スプレー法 / 粒子層 / 塗布型トランジスター / 酸化亜鉛 / ナノ粒子 / Gaドープ / 熱拡散 / 粒子プロセス / 薄膜トランジスタ / ZnO粒子層 / 低抵抗化 / Gaドーピング / 伝導メカニズム / ナノ粒子層 / 塗布型プロセス / 電子・電気材料 / 塗布プロセス / 基板材料
Outline of Final Research Achievements

ZnO nanoparticle layers were formed on quartz substrates and evaluated their characteristics as semiconducting layers. The particle layer was formed by spraying method and evaporation drying method using ZnO nanoparticle dispersion liquid. By comparing these two methods, we evaluated the surface structure, sheet resistance, mobility, etc., and showed the ZnO particles’ particle size dependence and conductivity type dependence. The carrier conduction in the obtained ZnO nanoparticle layers also showed a behavior that could not be explained by a general drift-diffusion model, and the results suggesting hopping conduction via defects on the particle surface were obtained. We also attempted thermal diffusion doping of Ga atoms into ZnO particles in order to lower the resistance of the particle layer, and dramatic reduction of the sheet-resistance (M- or G-Ohm/sq level → sub-k-Ohm/sq) could be achieved.

Academic Significance and Societal Importance of the Research Achievements

酸化物半導体の微粒子層を,スプレー法または蒸発乾燥法により形成した。粒子層は,高性能なエピタキシャル膜と比べると性能は劣るが,低コスト化や大面積化が容易で,何より下地基板を選ばないというメリットがある。本研究ではZnOナノ粒子層をチャネルとする薄膜トランジスタ(TFT)を形成することを目的としており,粒径や伝導型などの違いや,キャリア伝動機構について評価を進めている。またTFT性能向上において,現状最も影響を与えている低抵抗化についても一定の成果を得た。これらの成果は,電子デバイス/回路形成における下地基板の選択肢を飛躍的に広げることに貢献する。

Report

(5 results)
  • 2019 Annual Research Report   Final Research Report ( PDF )
  • 2018 Research-status Report
  • 2017 Research-status Report
  • 2016 Research-status Report
  • Research Products

    (12 results)

All 2020 2019 2018 2017 2016

All Journal Article (1 results) (of which Peer Reviewed: 1 results,  Open Access: 1 results) Presentation (11 results) (of which Int'l Joint Research: 2 results)

  • [Journal Article] Trial of Ga-doping on ZnO Nanoparticles by Thermal Treatment with Ga<sub>2</sub>O<sub>3</sub> Nanoparticles2020

    • Author(s)
      Yoshida Toshiyuki、Maruful Islam Md、Fujita Yasuhisa
    • Journal Title

      e-Journal of Surface Science and Nanotechnology

      Volume: 18 Issue: 0 Pages: 12-17

    • DOI

      10.1380/ejssnt.2020.12

    • NAID

      130007795395

    • ISSN
      1348-0391
    • Year and Date
      2020-02-06
    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access
  • [Presentation] Study on the thermal-diffusion-type Ga-doping in ZnO nanoparticles aiming for TFT channel application2020

    • Author(s)
      Md Maruful Islam, Yoshida Toshiyuki, Fujita Yasuhisa
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] ZnOナノ粒子への熱拡散型Gaドープにおける熱処理雰囲気の影響2019

    • Author(s)
      吉田俊幸, Islam Md Maruful, 藤田恭久
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] ZnOナノ粒子層の低抵抗化のための熱拡散型Gaドープにおける熱処理雰囲気の影響2019

    • Author(s)
      吉田俊幸,Islam Md Maruful,藤田恭久
    • Organizer
      第66回応用物理学会春季学術講演会
    • Related Report
      2018 Research-status Report
  • [Presentation] ZnOナノ粒子層伝導特性の向上 ~Gaドープの試み~2018

    • Author(s)
      吉田俊幸,Islam Md Maruful,藤田恭久
    • Organizer
      第79回応用物理学会秋季学術講演会
    • Related Report
      2018 Research-status Report
  • [Presentation] スプレー法および蒸発乾燥法による酸化亜鉛ナノ粒子層の形成と評価2017

    • Author(s)
      賀須井渉、糸原大貴、吉田俊幸、藤田恭久
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      (横浜市)パシフィコ横浜
    • Year and Date
      2017-03-14
    • Related Report
      2016 Research-status Report
  • [Presentation] Formation of P- and N-type Conductive ZnO Nanoparticle Layers Using Spraying and Evaporation Drying Methods2017

    • Author(s)
      Sho Kasui, Toshiyuki Yoshida, Yasuhisa Fujita
    • Organizer
      29th International Conference on Defects in Semiconductors (ICDS 2017)
    • Related Report
      2017 Research-status Report
    • Int'l Joint Research
  • [Presentation] スプレー法および蒸発乾燥法による酸化亜鉛ナノ粒子層の形成と電気伝導特性の評価2017

    • Author(s)
      賀須井渉,吉田俊幸,藤田恭久
    • Organizer
      ナノ学会 第15回大会
    • Related Report
      2017 Research-status Report
  • [Presentation] スプレー法および蒸発乾燥法により形成された酸化亜鉛ナノ粒子層の電気伝導特性評価2017

    • Author(s)
      賀須井渉,吉田俊幸,藤田恭久
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Research-status Report
  • [Presentation] Examination of Spraying Conditions for ZnO Nanoparticle Layer Formation Processes2017

    • Author(s)
      Md Maruful Islam, Shou Kasui, Toshiyuki Yoshida, Yasuhisa Fujita
    • Organizer
      Examination of Spraying Conditions for ZnO Nanoparticle Layer Formation Processes”, 第19回IEEE広島支部学生シンポジウム(HISS 19th)
    • Related Report
      2017 Research-status Report
  • [Presentation] Trial of the Ga doping to the Sprayed ZnO Nano-Particle Layers by mixing and annealing with Ga2O32017

    • Author(s)
      Islam Md Maruful, Atsuya Tabuchi, Toshiyuki Yoshida, and Yasuhisa Fujita
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Research-status Report
  • [Presentation] P-Channel and N-Channel Transistor Operations on Sprayed and Deposited ZnO Nanoparticle Layers2016

    • Author(s)
      Sho Kasui, Daiki Itohara, Toshiyuki Yoshida, and Yasuhisa Fujita
    • Organizer
      The 9th International Workshop on Zinc Oxide and Related Materials (IWZnO2016)
    • Place of Presentation
      Taipei (Taiwan)
    • Year and Date
      2016-10-30
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research

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Published: 2016-10-24   Modified: 2021-02-19  

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