| Project/Area Number |
16K06270
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Electronic materials/Electric materials
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| Research Institution | Toyama Prefectural University |
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Principal Investigator |
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| Co-Investigator(Kenkyū-buntansha) |
岩田 栄之 富山県立大学, 工学部, 准教授 (80223402)
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| Project Period (FY) |
2016-04-01 – 2020-03-31
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| Project Status |
Completed (Fiscal Year 2019)
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| Budget Amount *help |
¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2018: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2017: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2016: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
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| Keywords | シリコン / MOS / 発光 / 半導体 / 希土類 / ＭＯＳ / 電気・電子材料 |
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| Outline of Final Research Achievements |
Silicon (Si)-based light-emitting devices embedded in large-scale integrated circuit (LSI) chips are expected to have various optical device applications such as signal transmission and small displays. Aiming a low-cost device of the visible and ultraviolet light emission, MOS devices with oxides on a Si substrate formed by spin coating technology with various combinations of rare earth and additive elements were fabricated and analyzed. The introduction of Gd is effective for UV/blue light emission, and the emission color can be controlled between green and red by the mixing ratio of Tb and Eu.
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| Academic Significance and Societal Importance of the Research Achievements |
シリコン（Si）は、ほとんどの大規模集積回路（LSI）の主要材料であるが、発光しにくい半導体である。本研究は、希土類元素を導入した酸化膜を持つMOS型素子をスピンコート技術によって低コストでシリコン基板上に形成している。様々な希土類元素と添加元素を組み合わせることで、青や紫外領域の発光を確認し、緑から赤までの発光色を制御する方法を示した。また、酸化膜へ注入された電子による希土類イオンのエネルギー遷移で発光するというモデルを提案した。
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