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Study on crystal growth and dislocation control for wide band optical sensing devices

Research Project

Project/Area Number 16K06305
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionUniversity of Miyazaki

Principal Investigator

Arai Masakazu  宮崎大学, 工学部, 准教授 (90522003)

Research Collaborator Maeda Koji  
Project Period (FY) 2016-04-01 – 2019-03-31
Project Status Completed (Fiscal Year 2018)
Budget Amount *help
¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000)
Fiscal Year 2018: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2017: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2016: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Keywords電子デバイス / レーザ / 中赤外波長 / センシング / 結晶成長 / 光センシング / 半導体
Outline of Final Research Achievements

There are many absorption lines of gases such as carbon oxide, carbon dioxide and hydrocarbon gasses corresponding to the molecular vibration in the mid-infrared range from 2 to 5 μm in wavelength. Therefore optical gas sensing is possible using mid infrared lasers and detectors. We investigated the growth condition of InAs/GaSb type II superlattice using metalorganic vapor phase epitaxy. We tested the x-ray diffraction of various fabricated samples and determined the time constant of residual gasses in reactor. Also, we optimized growth condition of InAs buffer on GaAs substrate and realized flat virtual InAs substrate. Clear photoluminescence peak in 3 micron rage was observed on GaAs substrate, successfully.

Academic Significance and Societal Importance of the Research Achievements

本研究では量産性に優れた有機金属気相成長法で超格子構造を作製する際のV族材料の混入を推定し、抑制する方法を提案した。これにより、波長2.5から5ミクロン帯のレーザ、受光素子の大量生産が可能となる。高い精度で組成変化を制御できるため、超格子の歪を低減し、信頼性の高いデバイス作製が可能となる。また、高価なInAs基板ではなく、GaAs基板上にも超格子を作製するためのバッファ層の高品質化も行った。これにより低価格化が可能となる。これらの技術はガス漏れや一酸化炭素中毒などを防止する小型のセンサ実現に有望と考えられる。

Report

(4 results)
  • 2018 Annual Research Report   Final Research Report ( PDF )
  • 2017 Research-status Report
  • 2016 Research-status Report
  • Research Products

    (16 results)

All 2018 2017 2016 Other

All Journal Article (2 results) (of which Peer Reviewed: 2 results) Presentation (12 results) (of which Int'l Joint Research: 8 results) Remarks (2 results)

  • [Journal Article] GaAsSb layer thickness dependence of arsenic incorporation on InAs/GaAsSb superlattice on InAs substrate grown by metalorganic vapor phase epitaxy for mid-infrared device2018

    • Author(s)
      Arai Masakazu、Takahashi Kakeru、Yamagata Yuya、Inoue Yuki、Wakaki Ryosuke、Maeda Koji
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 57 Issue: 8S2 Pages: 08PD05-08PD05

    • DOI

      10.7567/jjap.57.08pd05

    • NAID

      210000149469

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 中赤外発光受光素子用III-V(Sb)系材料の結晶成長と評価2017

    • Author(s)
      荒井昌和,高橋翔, 井上裕貴, 藤原由生,吉元圭太,山形勇也,西岡賢祐,前田幸治
    • Journal Title

      レーザー研究

      Volume: 45 Pages: 768-772

    • NAID

      130007957357

    • Related Report
      2017 Research-status Report
    • Peer Reviewed
  • [Presentation] Metalorganic Precursors Dependence of Impurity Concentration in AlGaAsSb and Optical Characteristics of InAs/GaAsSb Superlattice2018

    • Author(s)
      Kakeru Takahashi, Yuya Yamagata, Yuki Fujiwara, Koji Maeda, Masakazu Arai
    • Organizer
      19th Internatinal Conference on Metalorganic Vapor Phase Epitaxy
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Sn Concentration and Surface Morphology of GeSn Layer on GaAs (311)B Substrate Grown by MOVPE2018

    • Author(s)
      Yuki Fujiwara, Kakeru Takahashi, Takaeshi Fujisawa, Koji Maeda, and Masakazu Arai
    • Organizer
      19th Internatinal Conference on Metalorganic Vapor Phase Epitaxy
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] MOVPE Growth of AlGaInP Distributed Bragg Reflector on GaAs (311)B for Resonant Cavity Photovoltaic Receiver for Laser Light2018

    • Author(s)
      Masakazu Arai, Shinnosuke Tsuboyama, Kensuke Hiwada, Masaya Kamikado, Ryosuke Wakaki, and Koji Maeda
    • Organizer
      19th Internatinal Conference on Metalorganic Vapor Phase Epitaxy
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Layer Thickness Dependence of Lattice Mismatch and Emission Wavelength on MOVPE Grown InAs/GaSb Superlattice for Mid-infrared Photonic Devices2018

    • Author(s)
      Masakazu Arai, Yuya Yamagata, Ryosuke Wakaki
    • Organizer
      23rd Micro Optics Conference
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] MOVPE法によるInAs基板上AlGaAsSb成長におけるAl材料依存性2017

    • Author(s)
      山形 勇也、吉元 圭太、今村 優雅、荒井 昌和
    • Organizer
      応用物理学会学術講演会
    • Place of Presentation
      横浜市
    • Year and Date
      2017-03-14
    • Related Report
      2016 Research-status Report
  • [Presentation] MOVPE法を用いたInAs基板上InAsSb量子井戸の歪補償障壁層検討2017

    • Author(s)
      吉元 圭太、山形 勇也、荒井 昌和
    • Organizer
      応用物理学会学術講演会
    • Place of Presentation
      横浜市
    • Year and Date
      2017-03-14
    • Related Report
      2016 Research-status Report
  • [Presentation] MOVPE Growth of Lattice Matched InAs/GaAsSb Superlattice on InAs Substrate for Mid-Infrared Sensing Devices2017

    • Author(s)
      Kakeru Takahashi, Yuki Fujiwara, Yuya Yamagata, Keita Yoshimoto, Yuki Inoue, Ryosuke Wakaki, Koji Maeda, Masakazu Arai
    • Organizer
      Micro Optics Conference 2017
    • Related Report
      2017 Research-status Report
    • Int'l Joint Research
  • [Presentation] Emission Spectrum Evaluation of 0.8 - 1.1 µm Range Chirped Multiple Quantum Wells for Optical Sensing2017

    • Author(s)
      Masaya Kamikado, Yuga Imamura and Masakazu Arai
    • Organizer
      Micro Optics Conference 2017
    • Related Report
      2017 Research-status Report
    • Int'l Joint Research
  • [Presentation] Design and Growth of Metamorphic Sb-based materials on GaAs substrate for Mid-Infrared Photonic Devices2017

    • Author(s)
      Keita Yoshimoto, Yuya Yamagata,Yuga Imamura and Masakazu Arai
    • Organizer
      CLEO Pacific Rim 2017
    • Related Report
      2017 Research-status Report
    • Int'l Joint Research
  • [Presentation] Wavelength Range Extension by Chirped and Nitrogen Incorporated InGaAs(N) Quantum Wells for Super Luminescent Diode2017

    • Author(s)
      Yuga Imamura, Keita Yoshimoto, Masakazu Arai
    • Organizer
      CLEO Pacific Rim 2017
    • Related Report
      2017 Research-status Report
    • Int'l Joint Research
  • [Presentation] 光センシング用SLDの利得波長帯域を拡大するInGaAs, InGaAsN 量子井戸の複合構造の検討2016

    • Author(s)
      今村 優雅、神門 雅也、荒井 昌和
    • Organizer
      応用物理学会学術講演会
    • Place of Presentation
      新潟市
    • Year and Date
      2016-09-13
    • Related Report
      2016 Research-status Report
  • [Presentation] 中赤外帯域InAsSb量子井戸成長における障壁層材料依存性2016

    • Author(s)
      吉元 圭太、今村 優雅、荒井 昌和
    • Organizer
      応用物理学会学術講演会
    • Place of Presentation
      新潟市
    • Year and Date
      2016-09-13
    • Related Report
      2016 Research-status Report
  • [Remarks] 研究室ウェブサイト

    • URL

      https://www.cc.miyazaki-u.ac.jp/arai/

    • Related Report
      2018 Annual Research Report
  • [Remarks] 宮崎大学 工学部 荒井研究室 ウェブサイト

    • URL

      http://www.cc.miyazaki-u.ac.jp/arai/

    • Related Report
      2016 Research-status Report

URL: 

Published: 2016-04-21   Modified: 2020-03-30  

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