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Revolutionary heat phonon engineering based on advanced graphene NEMS technology

Research Project

Project/Area Number 16K13650
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Nano/Microsystems
Research InstitutionJapan Advanced Institute of Science and Technology

Principal Investigator

MIZUTA HIROSHI  北陸先端科学技術大学院大学, 先端科学技術研究科, 教授 (90372458)

Co-Investigator(Renkei-kenkyūsha) MURUGANATHAN Manoharan  北陸先端科学技術大学院大学, 先端科学技術研究科, 講師 (20639322)
Research Collaborator SCHMIDT Edward Marek  北陸先端科学技術大学院大学, 先端科学技術研究科, 博士研究員
HAQUE Mayeesha Masrura  北陸先端科学技術大学院大学, 先端科学技術研究科
Project Period (FY) 2016-04-01 – 2018-03-31
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000)
Fiscal Year 2017: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2016: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Keywordsグラフェン / NEMS / フォノン / フォノニック結晶 / 超微細加工 / ヘリウムイオンビーム / ナノマシン / 先端機能デバイス / マイクロ・ナノデバイス / 熱工学
Outline of Final Research Achievements

By combining graphene-based NEMS (Nano-Electro-Mechanical-System) technology and single-nanometer patterning technology using focused He+ ion beam of ~0.3 nm in diameter, we succeeded to fabricatie two-dimensional array of nanopores of 3 - 4 nm in diameter (graphene phononic crystal: GPnC) devices on doubly-clamped graphene beams of length and width ranging from 100 nm up to 1 micron. We also studied phonic bandgap formation by using large-scale finite element simulation and atom-scale phonon calculations.

Report

(3 results)
  • 2017 Annual Research Report   Final Research Report ( PDF )
  • 2016 Research-status Report
  • Research Products

    (96 results)

All 2018 2017 2016 Other

All Int'l Joint Research (2 results) Journal Article (19 results) (of which Int'l Joint Research: 19 results,  Peer Reviewed: 19 results,  Acknowledgement Compliant: 6 results,  Open Access: 3 results) Presentation (72 results) (of which Int'l Joint Research: 33 results,  Invited: 19 results) Book (2 results) Remarks (1 results)

  • [Int'l Joint Research] サウサンプトン大学(英国)

    • Related Report
      2017 Annual Research Report
  • [Int'l Joint Research] トリニティカレッジダブリン(アイルランド)

    • Related Report
      2017 Annual Research Report
  • [Journal Article] Graphene Nanomechanical Resonator Mass Sensing of Mixed H<sub>2</sub>/Ar Gas2018

    • Author(s)
      M. Muruganathan, F. Seto, and H. Mizuta
    • Journal Title

      International Journal of Automation Technology

      Volume: 12 Issue: 1 Pages: 24-28

    • DOI

      10.20965/ijat.2018.p0024

    • NAID

      130007505980

    • ISSN
      1881-7629, 1883-8022
    • Year and Date
      2018-01-05
    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Sub-10 nm graphene nano-ribbon tunnel field-effect transistor2018

    • Author(s)
      A. M. M. Hammam, M. E. Schmidt, M. Muruganathan, S. Suzuki and H. Mizuta
    • Journal Title

      Carbon

      Volume: 126 Pages: 588-593

    • DOI

      10.1016/j.carbon.2017.09.091

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Contrast Differences Between Nitrogen and Helium Ion Induced Secondary Electron Images Beyond Instrument Effects2018

    • Author(s)
      M. E. Schmidt, S. Ogawa and H. Mizuta
    • Journal Title

      MRS Advances

      Volume: 3 Issue: 10 Pages: 505-510

    • DOI

      10.1557/adv.2018.33

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Structurally Controlled Large-Area 10 nm Pitch Graphene Nanomesh by Focused Helium Ion Beam Milling2018

    • Author(s)
      M. E. Schmidt, T. Iwasaki, M. Muruganathan, M. Haque, H. Van Ngoc, S. Ogawa and H. Mizuta
    • Journal Title

      ACS Applied Materials & Interfaces

      Volume: 10 Issue: 12 Pages: 10362-10368

    • DOI

      10.1021/acsami.8b00427

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] All Two-Dimensional Materials Three-Terminal Graphene Nanoelectromechanical Switch2018

    • Author(s)
      N. Huynh Van, M. Muruganathan, J. Kulothungan and H. Mizuta
    • Journal Title

      Nanoscale

      Volume: in press Issue: 26 Pages: 12349-12355

    • DOI

      10.1039/c7nr08439k

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Controlled Fabrication of Electrically Contacted Carbon Nanoscrolls2018

    • Author(s)
      Marek E. Schmidt, Ahmed M.M. Hammam, Takuya Iwasaki, Teruhisa Kanzaki, Manoharan
    • Journal Title

      Nanotechnology

      Volume: 29 Issue: 23 Pages: 235605-235605

    • DOI

      10.1088/1361-6528/aab82c

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Study of dynamic contacts for graphene nano-electro-mechanical switches2017

    • Author(s)
      W. Wang, M. Muruganathan, J. Kulothungan and H. Mizuta
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 56 Issue: 4S Pages: 04CK05-04CK05

    • DOI

      10.7567/jjap.56.04ck05

    • NAID

      210000147632

    • Related Report
      2017 Annual Research Report 2016 Research-status Report
    • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
  • [Journal Article] Interaction study of nitrogen ion beam with silicon2017

    • Author(s)
      M. E. Schmidt, X. Zhang, Y. Oshima, L. T. Anh A. Yasaka, T. Kanzaki, M. Muruganathan, M. Akabori, T. Shimoda and H. Mizuta
    • Journal Title

      J. Vac. Sci.& Tech. B

      Volume: 35 Issue: 3

    • DOI

      10.1116/1.4977566

    • Related Report
      2017 Annual Research Report 2016 Research-status Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Nitrogen Gas Field Ion Source (GFIS) Focused Ion Beam (FIB) Secondary Electron Imaging: A First Look2017

    • Author(s)
      M. E. Schmidt, A. Yasaka, M. Akabori and H. Mizuta
    • Journal Title

      Microscopy and Microanalysis

      Volume: 23 Issue: 4 Pages: 758-768

    • DOI

      10.1017/s1431927617000502

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Sharp switching behaviour in graphene nanoribbon p-n junction2017

    • Author(s)
      A. M. M. Hammam, M.E. Schmidt, M. Muruganathan, H. Mizuta
    • Journal Title

      Carbon

      Volume: 121 Pages: 399-407

    • DOI

      10.1016/j.carbon.2017.05.097

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Partial hydrogenation induced interaction in a graphene-SiO2 interface: irreversible modulation of device characteristics2017

    • Author(s)
      Takuya Iwasaki, Manoharan Muruganathan, Marek E. Schmidt, Hiroshi Mizuta
    • Journal Title

      Nanoscale

      Volume: 9 Issue: 4 Pages: 1662-1669

    • DOI

      10.1039/c6nr08117g

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
  • [Journal Article] Local hole doping concentration modulation on graphene probed by tip-enhanced Raman spectroscopy2017

    • Author(s)
      T. Iwasaki, T. Zelai, S. Ye, Y. Tsuchiya, H. M. H. Chong, and Hiroshi Mizuta
    • Journal Title

      Carbon

      Volume: 111 Pages: 67-73

    • DOI

      10.1016/j.carbon.2016.09.068

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
  • [Journal Article] Nitrogen GFIS-FIB secondary electron imaging: A first look2017

    • Author(s)
      M. E. Schmidt, A. Yasaka, M. Akabori, and H. Mizuta
    • Journal Title

      Microscopy and Microanalysis

      Volume: 印刷中

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] 3D Finite Element Simulation of Graphene Nano-Electro-Mechanical Switches2016

    • Author(s)
      J. Kulothungan, M. Muruganathan, and H. Mizuta
    • Journal Title

      Micromachines

      Volume: 7(8) Issue: 8 Pages: 143-143

    • DOI

      10.3390/mi7080143

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Open Access / Int'l Joint Research / Acknowledgement Compliant
  • [Journal Article] Locally Actuated Graphene-Based Nano-Electro-Mechanical Switch2016

    • Author(s)
      J. Sun, M. Muruganathan, N. Kanetake and H. Mizuta
    • Journal Title

      Micromachines

      Volume: 7(7) Issue: 7 Pages: 124-124

    • DOI

      10.3390/mi7070124

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Open Access / Int'l Joint Research / Acknowledgement Compliant
  • [Journal Article] Highly Functional Graphene Nano-Electromechanical (GNEM) Devices for Advanced Switch and Sensor Applications2016

    • Author(s)
      H. Mizuta, J. Sun, M. E. Schmidt and M. Muruganathan
    • Journal Title

      the Emerging Nanomaterials and Devices issue of ECS Transactions

      Volume: 75(13) Pages: 3-9

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Precise milling of nano-gap chains in graphene with a focused helium ion beam2016

    • Author(s)
      Y. Zhou, P. Maguire, J. Jadwiszczak, M. Muruganathan, H. Mizuta and H. Zhang
    • Journal Title

      Nanotechnology

      Volume: 27(32) Issue: 32 Pages: 325302-325302

    • DOI

      10.1088/0957-4484/27/32/325302

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Strong modulation of plasmons in graphene with the use of an inverted pyramid array diffraction grating2016

    • Author(s)
      N. Matthaiakakis, H. Mizuta and M. D. B. Charlton
    • Journal Title

      Scientific Reports

      Volume: 6 Issue: 1

    • DOI

      10.1038/srep27550

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Room Temperature Detection of Individual Molecular Physisorption using Suspended Bilayer Graphene2016

    • Author(s)
      J. Sun, M. Muruganathan, and H. Mizuta
    • Journal Title

      Science Advances

      Volume: 2(4) Issue: 4

    • DOI

      10.1126/sciadv.1501518

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
  • [Presentation] Phononic bandgap formation in single nanometer graphene nanomesh2018

    • Author(s)
      M. Haque, M. E. Schmidt, M. Muruganathan, I. Katayama, J. Takeda, S. Ogawa, H. Mizuta
    • Organizer
      The 1st JAIST World Conference (JWC2018), Nomi, 27-28 February
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Recent progress of graphene-based nanoelectromechanical (GNEM) contact switches2018

    • Author(s)
      J. Kulothungan, V. H. Ngoc, M. Muruganathan, H. Mizuta
    • Organizer
      The 1st JAIST World Conference (JWC2018), Nomi, 27-28 February
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Graphene nano-electro-mechanical (NEM) devices for advanced applications2018

    • Author(s)
      H. Mizuta, M. E. Schmidt, S. Ogawa and M. Muruganathan
    • Organizer
      The 1st JAIST World Conference (JWC2018), Nomi, 27-28 February
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Graphene nano-electro-mechanical (NEM) devices: Sub-thermal switching, single-molecular sensing and heat phonon engineering2018

    • Author(s)
      H. Mizuta, M. E. Schmidt, S. Ogawa and M. Muruganathan
    • Organizer
      The 2nd Nippon-Taiwan Workshop on Innovation of Emergent Materials, Nomi, 1-2 March
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Graphene nano-electro-mechanical (GNEM) devices functionalized by using helium ion beam2018

    • Author(s)
      H. Mizuta, M. Muruganathan, S. Ogawa and M. Schmidt
    • Organizer
      2nd international HeFIB conference on Helium and emerging Focused Ion Beams (HeFIB2018), Dresden, June 11 - 13
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Phononic Bandgap Engineering in Single Nanometer Graphene Nanomesh2018

    • Author(s)
      Mayeesha M. Haque, Marek E. Schmidt, Manoharan Muruganathan, Ikufumi Katayama, Jun Takeda, Shinichi Ogawa, Hiroshi Mizuta
    • Organizer
      Phonons 2018 & PTES 2018 Joint Conference, Nanjing, China, May 30 - Jun 03
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] グラフェンNEMS: 単分子センシングから熱フォノン制御応用まで2018

    • Author(s)
      水田 博,Jian Sun, Huynh Van Ngoc, Marek E. Schmidt, 小川 真一, Manoharan Muruganathan
    • Organizer
      東海シンポジウム:機能性ナノ構造体の構築とその利用 - ;新規産業創出を目指して - 2018年1月11日・12日、名古屋国際会議場, 名古屋
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] Three-Terminal Graphene Nanoelectromechanical (NEM) Switch2018

    • Author(s)
      Manoharan Muruganathan, Huynh Van Ngoc, Jothiramalingam Kulothungan, Hiroshi Mizuta
    • Organizer
      第65回応用物理学会春季学術講演会 2018年3月17日-20日、早稲田大学西早稲田キャンパス・ベルサール高田馬場, 東京
    • Related Report
      2017 Annual Research Report
  • [Presentation] Probing graphene nanomesh fidelity by electrical transport measurement2018

    • Author(s)
      Marek Edward Schmidt, Takuya Iwasaki, Manoharan Muruganathan, Mayeesha Haque, Ngoc V. Huynh, Shinichi Ogawa, Hiroshi Mizuta
    • Organizer
      第65回応用物理学会春季学術講演会 2018年3月17日-20日、早稲田大学西早稲田キャンパス・ベルサール高田馬場, 東京
    • Related Report
      2017 Annual Research Report
  • [Presentation] グラフェンナノリボンを用いたN2/アセトン混合ガスの検出2018

    • Author(s)
      谷内 翔, 武富 康平, 酒井 啓, 齋藤 修平, ムルガナタン マノハラン, 水田 博
    • Organizer
      第65回応用物理学会春季学術講演会 2018年3月17日-20日、早稲田大学西早稲田キャンパス・ベルサール高田馬場, 東京
    • Related Report
      2017 Annual Research Report
  • [Presentation] グラフェン狭窄素子の輸送特性のメカニズム2018

    • Author(s)
      岩崎 拓哉, Wang Zhongwang, Muruganathan Manoharan, 水田 博
    • Organizer
      第65回応用物理学会春季学術講演会 2018年3月17日-20日、早稲田大学西早稲田キャンパス・ベルサール高田馬場, 東京
    • Related Report
      2017 Annual Research Report
  • [Presentation] Stacked nanocrystalline graphene-based Nano-Electro-Mechanical (NEM) contact switch architecture with low pull-in voltage2018

    • Author(s)
      Jothiramalingam Kulothungan, Marek E. Schmidt, Manoharan Muruganathan, Hiroshi Mizuta
    • Organizer
      第65回応用物理学会春季学術講演会 2018年3月17日-20日、早稲田大学西早稲田キャンパス・ベルサール高田馬場, 東京
    • Related Report
      2017 Annual Research Report
  • [Presentation] グラフェン振動子を用いたゼプトグラムレベルの質量変化検出2018

    • Author(s)
      瀬戸 文博, ムルガナタン マノハラン, 宮下 寛也, 水田 博
    • Organizer
      第65回応用物理学会春季学術講演会 2018年3月17日-20日、早稲田大学西早稲田キャンパス・ベルサール高田馬場, 東京
    • Related Report
      2017 Annual Research Report
  • [Presentation] 広帯域顕微コヒーレントフォノン分光法の開発2018

    • Author(s)
      田岡 裕貴, 神島 悠司, 奈良 脩平, 嵐田 雄介, 小川 真一, Mayeesha Haque, Marek Schmidt, Manoharan Muruganathan, 水田 博, 片山 郁文, 武田 淳
    • Organizer
      第65回応用物理学会春季学術講演会 2018年3月17日-20日、早稲田大学西早稲田キャンパス・ベルサール高田馬場, 東京
    • Related Report
      2017 Annual Research Report
  • [Presentation] Suspension of large, electrically contacted graphene for sub-15-nm phononic crystal patterning2018

    • Author(s)
      Marek Edward Schmidt, Mayeesha Haque, Manoharan Muruganathan, Ikufumi Katayama, Jun Takeda, Shinichi Ogawa, Hiroshi Mizuta
    • Organizer
      第65回応用物理学会春季学術講演会 2018年3月17日-20日、早稲田大学西早稲田キャンパス・ベルサール高田馬場, 東京
    • Related Report
      2017 Annual Research Report
  • [Presentation] アトミックカーボンチェン形成過程のその場TEM観察2017

    • Author(s)
      張 暁賓, 岩下 晋也, Marek Schmidt, Manoharan Muruganathan, 水田 博, 大島 義文
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜(神奈川県・横浜市)
    • Year and Date
      2017-03-14
    • Related Report
      2016 Research-status Report
  • [Presentation] 高アスペクト比を持つサスペンデッドグラフェンナノリボンの自発的ローリング2017

    • Author(s)
      神崎 晃悠,シュミット マレク,ムルガナタン マノハラン,水田 博
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜(神奈川県・横浜市)
    • Year and Date
      2017-03-14
    • Related Report
      2016 Research-status Report
  • [Presentation] トップゲート型グラフェンNEMS素子の作製と評価2017

    • Author(s)
      瀬戸 文博,ムルガナタン マノハラン,ワン ウェンゼン, シュミット マレク,水田 博
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜(神奈川県・横浜市)
    • Year and Date
      2017-03-14
    • Related Report
      2016 Research-status Report
  • [Presentation] グラフェン上に吸着したCO2分子が及ぼす電荷移動とクーロン散乱による電流変化への影響2017

    • Author(s)
      加藤 大貴,ムルガナタン マノハラン,水田 博
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜(神奈川県・横浜市)
    • Year and Date
      2017-03-14
    • Related Report
      2016 Research-status Report
  • [Presentation] KM Tarik Hasan, Arup Samanta, Adnan ,Afiff, Le The Anh, Muruganathan Manoharan, Masahiro Hori, Yukinori Ono, Hiroshi Mizuta, Michiharu Tabe, Daniel Moraru2017

    • Author(s)
      Study of Stability of A-few-donor Quantum Dots with Different Configurations for Room-Temperature Single-Electron Tunneling Operation
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜(神奈川県・横浜市)
    • Year and Date
      2017-03-14
    • Related Report
      2016 Research-status Report
  • [Presentation] Study of Electron Localization Effects in Donor-Acceptor Pairs in Low-Dimensional Si Tunnel Diodes2017

    • Author(s)
      Gaurang Prabhudesai, Le The Anh, Mitsuki Shibuya, Muruganathan Manoharan, Masahiro Hori, Yukinori Ono, Hiroshi Mizuta, Michiharu Tabe, Daniel Moraru
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜(神奈川県・横浜市)
    • Year and Date
      2017-03-14
    • Related Report
      2016 Research-status Report
  • [Presentation] First-principles study of inter-band tunnelling current through co-dopants in Si Nano-pn Tunnel Diodes2017

    • Author(s)
      Manoharan Muruganathan, Daniel Moraru, Michiharu Tabe, Hiroshi Mizuta
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜(神奈川県・横浜市)
    • Year and Date
      2017-03-14
    • Related Report
      2016 Research-status Report
  • [Presentation] An in-situ Annealing Study of Interlayer Conduction in Twisted Bilayer Graphene2017

    • Author(s)
      Jothiramalingam Kulothungan, Manoharan Muruganathan, Marek E. Schmidt, Hiroshi Mizuta
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜(神奈川県・横浜市)
    • Year and Date
      2017-03-14
    • Related Report
      2016 Research-status Report
  • [Presentation] 単一狭窄構造グラフェンナノリボンにおける単キャリアトランジスター操作の研究2017

    • Author(s)
      WANG Zhongwang,岩崎 拓哉,ムルガナタン マノハラン,水田 博
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜(神奈川県・横浜市)
    • Year and Date
      2017-03-14
    • Related Report
      2016 Research-status Report
  • [Presentation] 三層グラフェンのヒステリシス現象2017

    • Author(s)
      岩崎 拓哉, ムルガナタン マノハラン,水田 博
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜(神奈川県・横浜市)
    • Year and Date
      2017-03-14
    • Related Report
      2016 Research-status Report
  • [Presentation] サスペンデッドCVDグラフェンへのサブ10nmピッチ周期的ナノ孔構造の作製2017

    • Author(s)
      神崎 晃悠,シュミット マレク,ムルガナタン マノハラン,小川 真一,水田 博
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜(神奈川県・横浜市)
    • Year and Date
      2017-03-14
    • Related Report
      2016 Research-status Report
  • [Presentation] Single-nanometer patterning of graphene by HIM for advanced applications2017

    • Author(s)
      Hiroshi Mizuta, Marek Schmidt, Teruhisa Kanzaki, Shinichi Ogawa, Manoharan
    • Organizer
      第64回応用物理学会春季学術講演会 シンポジウム「GFIS(電界電離ガスイオン源)ガスイオン顕微鏡技術とその材料・デバイス研究開発への応用:現状と今後の展望」
    • Place of Presentation
      パシフィコ横浜(神奈川県・横浜市)
    • Year and Date
      2017-03-14
    • Related Report
      2016 Research-status Report
    • Invited
  • [Presentation] Interaction of gas field ionized nitrogen with silicon2017

    • Author(s)
      Marek Edward Schmidt, Xiaobin Zhang, Yoshifumi Oshima, Le The Anh, Anto Yasaka,Teruhisa Kanzaki, Manoharan Muruganathan, Masashi Akabori, Tatsuya Shimoda, Hiroshi Mizuta
    • Organizer
      第64回応用物理学会春季学術講演会 シンポジウム「GFIS(電界電離ガスイオン源)ガスイオン顕微鏡技術とその材料・デバイス研究開発への応用:現状と今後の展望」
    • Place of Presentation
      パシフィコ横浜(神奈川県・横浜市)
    • Year and Date
      2017-03-14
    • Related Report
      2016 Research-status Report
  • [Presentation] Finite Element Method Simulation of Graphene Nano-Electro-Mechanical Contact Switches with Surface Trenches2017

    • Author(s)
      K. Jothiramalingam, M. Muruganathan, M. E.Schmidt, W. Wang, H. Mizuta
    • Organizer
      IEEE Conference on Emerging Devices and Smart Systems (ICEDSS2017)
    • Place of Presentation
      マラサマドラン(インド)
    • Year and Date
      2017-03-03
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] Stress Analysis of Perforated Graphene Nanoelectromechanical (NEM) Contact Switches using 3D Finite Element Simulation for Mechanical Reliability Improvement2017

    • Author(s)
      Mohd Amir Zulkefli, Mohd Ambri Mohamed, Kim S. Siow, Burhanuddin Yeop Majlis, Jothiramalingam Kulothungan, Manoharan Muruganathan, Hiroshi Mizuta
    • Organizer
      Nanoscience and Nanotechnology
    • Place of Presentation
      シャーアラム(マレーシア)
    • Year and Date
      2017-02-24
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Single carrier transport in monolayer graphene nano-devices2017

    • Author(s)
      T. Iwasaki, M. Muruganathan, H. Mizuta
    • Organizer
      IV Bilateral Italy-Japan Seminar Innovative Solutions for Single Atom Applications in Photonics and Nanoelectronics,Colico, Lago di Como, Italy, 2-4 May
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Physisorption doping induced multiple dots behavior in graphene nanoconstrictions2017

    • Author(s)
      T. Iwasaki, Z. Wang, J. Reynolds, M. Muruganathan, H. Mizuta
    • Organizer
      Silicon Nanoelectronics Workshop, Kyoto, Japan, 4-5 June
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Multifunctional graphene nano-electromechanical (GNEM) devices for Extreme Sensing2017

    • Author(s)
      Manoharan Muruganathan, D. Kato, F. Seto, J. Sun, M. E. Schmidt, and H. Mizuta
    • Organizer
      Advances in Functional Materials International Conference, University of California, Los Angeles, USA, 14-17 August
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Graphene nano-electro-mechanical (NEM) devices for extreme sensing applications2017

    • Author(s)
      H. Mizuta, F. Seto, M. E. Schmidt, H. Van Ngoc and M. Muruganathan
    • Organizer
      Simulation of Semiconductor Processes and Devices (SISPAD 2017) Workshop 2 "Simulation of Advanced Sensors", Kamakura, 6 September
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Sub-10-nm Pitch Nanopore Array in Graphene by Helium Ion Beam Milling for Heat Phonon engineering2017

    • Author(s)
      Marek E. Schmidt, Teruhisa Kanzaki, Mayeesha Haque, Takuya Iwasaki, Manoharan Muruganathan, Shinichi Ogawa and Hiroshi Mizuta
    • Organizer
      HybridQS Workshop, Miyagi-Zao, Japan, 10-13 September
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Observation of Single Carrier Transport Behavior in Graphene Nano Constrictions2017

    • Author(s)
      Zhongwang Wang, Takuya Iwasaki, Manoharan Muruganathan and Hiroshi Mizuta
    • Organizer
      43rd International Conference on Micro and Nanoengineering (MNE 2017), Braga, Portugal, 18-22 September
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Tip-Enhanced Raman characterization of He-ion-irradiated CVD graphene channels2017

    • Author(s)
      Taharh Zelai, Takuya Iwasaki, Stuart Boden, Harold Chong, Hiroshi Mizuta, and Yoshishinge Tsuchiya
    • Organizer
      43rd International Conference on Micro and Nanoengineering (MNE 2017), Braga, Portugal, 18-22 September
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Tunable Total Optical Absorption in a Metal-Insulator-Graphene Plasmonic Device2017

    • Author(s)
      N. Matthaiakakis, H. Mizuta and M. D. B. Charlton
    • Organizer
      Graphene Week 2017, Athens, 25 - 29 September
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Single-nanometer functional graphene devices patterned with helium ion beam2017

    • Author(s)
      H. Mizuta, M. E. Schmidt, T. Kanzaki, S. Ogawa, M. Muruganathan
    • Organizer
      AVS 64th International Symposium & Exhibition, Tampa, 30 Oct - 3 Nov
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Contrast Differences Between Nitrogen and Helium Ion Induced Secondary Electron Images beyond Instrument Effects2017

    • Author(s)
      M.E. Schmidt, S. Ogawa and H. Mizuta
    • Organizer
      2017 MRS Fall Meeting & Exhibition, Boston, 26th November - 1st December
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Downscaled graphene nano-electro-mechanical (NEM) devices for extreme sensing and phonon engineering applications2017

    • Author(s)
      H. Mizuta, H. Van Ngoc, M. E. Schmidt, M. Haque, T. Iwasaki, S. Ogawa, M. Muruganathan
    • Organizer
      2nd International Carbon Materials Conference & Exhibition (Carbontech2017), Beijing, 18-19 December
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Graphene-2D Materials Nanoelectromechanical (NEM) Devices and Its Extreme Sensitivity2017

    • Author(s)
      Manoharan Muruganthan, Huynh Van Ngoc, Jothiramalingam Kulothungan, Marek E. Schmidt, Hiroshi Mizuta
    • Organizer
      Nanotech Middle East Conference, Dubai, U.A.E Dec 4 - 6
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] グラフェンNEMS上でのシングルナノスケールフォノニック結晶の作製2017

    • Author(s)
      水田 博, Marek Schmidt, Mayeesha Haque, 小川 真一, 衛藤 宏明, Manoharan Muruganathan
    • Organizer
      応用物理学会フォノンエンジニアリング研究グループ JST「微小エネ」領域合同研究会 2017年7月14日-15日 熱海
    • Related Report
      2017 Annual Research Report
  • [Presentation] グラフェン振動子を用いたアトグラムレベルの質量変化検出2017

    • Author(s)
      瀬戸 文博, マノハラン ムルガナタン, 水田 博
    • Organizer
      2017年9月5日-8日 福岡国際会議場・国際センター・福岡サンパレス, 福岡
    • Related Report
      2017 Annual Research Report
  • [Presentation] Effects of structural dimensions on phonon bandgaps in nanopatterned graphene phononic crystals2017

    • Author(s)
      Mayeesha M. Haque, Marek E. Schmidt, Takuya Iwasaki, Manoharan Muruganathan, Hiroshi Mizuta
    • Organizer
      2017年9月5日-8日 福岡国際会議場・国際センター・福岡サンパレス, 福岡
    • Related Report
      2017 Annual Research Report
  • [Presentation] Low pull-in operation and high switching endurance observed for a graphene-hBN van der Waals contact NEMS switch2017

    • Author(s)
      Huynh Van Ngoc, Jothiramalingam Kulothungan, Manoharan Muruganathan, Hiroshi Mizuta
    • Organizer
      2017年9月5日-8日 福岡国際会議場・国際センター・福岡サンパレス, 福岡
    • Related Report
      2017 Annual Research Report
  • [Presentation] Effect of surface condition on ion induced secondary electron contrast in carbon-based samples2017

    • Author(s)
      Marek E. Schmidt, Shinichi Ogawa, Hiroshi Mizuta
    • Organizer
      第78回応用物理学会秋季学術講演会 シンポジウム「GFIS(電界電離ガスイオン源)・先端イオン源顕微鏡技術とその材料・デバイス研究開発への応用」 2017年9月7日 福岡国際会議場・国際センター・福岡サンパレス, 福岡
    • Related Report
      2017 Annual Research Report
  • [Presentation] Single-nanometer graphene patterning with helium ion beam for extreme sensing and phonon engineering applications2017

    • Author(s)
      Hiroshi Mizuta, Marek E. Schmidt, Mayeesha Haque, Shinichi Ogawa, Manoharan Muruganathan
    • Organizer
      第78回応用物理学会秋季学術講演会 シンポジウム「GFIS(電界電離ガスイオン源)・先端イオン源顕微鏡技術とその材料・デバイス研究開発への応用」 2017年9月7日 福岡国際会議場・国際センター・福岡サンパレス, 福岡
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] サスペンデッドグラフェンナノリボンのデバイス構造の作製2017

    • Author(s)
      水谷 加奈子、張 暁賓、マレク シュミット、マノハラン ムルガナタン、水田 博、大島 義文
    • Organizer
      第78回応用物理学会秋季学術講演会 2017年9月5日-8日 福岡国際会議場・国際センター・福岡サンパレス, 福岡
    • Related Report
      2017 Annual Research Report
  • [Presentation] グラフェンNEMS技術の最近の展開 単分子センサーから熱フォノンエンジニアリングまで2017

    • Author(s)
      水田博, M. E. Schimidt, M. Muruganathan
    • Organizer
      ナノ粒子・構造応用研究会 第14回公開講演会 ナノ材料のNEMS/MEMSへの展開
    • Place of Presentation
      日本化学会化学会館(東京都・千代田区)
    • Related Report
      2016 Research-status Report
    • Invited
  • [Presentation] Graphene Nano-Electromechanical (GNEM) Device Technologies for Extreme Sensing and Other Advanced Applications2016

    • Author(s)
      H. Mizuta, D. Kato, F. Seto, T. Kanzaki, K. Jothiramalingam, W. Wang, J. Sun, M. E. Schmidt and M. Muruganathan
    • Organizer
      The 3rd IMEN-JAIST Joint Symposium on Nano-Bio Sensors
    • Place of Presentation
      セランゴール(マレーシア)
    • Year and Date
      2016-12-14
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Electrical Tunable Localized States in Sub-Band of Bilayer Graphene Nanoribbon2016

    • Author(s)
      J. Sun, M. Muruganathan, K. Ishibashi and H. Mizuta
    • Organizer
      The 29th International Microprocesses and Nanotechnology Conference (MNC2016)
    • Place of Presentation
      ANAクラウンプラザホテル京都(京都府・京都市)
    • Year and Date
      2016-11-08
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] Interraction of gas field ionized nitrogen with silicon2016

    • Author(s)
      M. E. Schmidt, Y. Oshima, L. T. Anh, X. Zhang, K. Teruhisa, M. Akabori, A. Yasaka, M. Muruganathan, T. Shimoda and H. Mizuta
    • Organizer
      The 63rd AVS International Symposium & Exhibition
    • Place of Presentation
      ナッシュビル(アメリカ)
    • Year and Date
      2016-11-06
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] Recent progress of graphene-based nanoelectronic devices and NEMS for challenging applications2016

    • Author(s)
      H. Mizuta, A. Hammam, J. Kulothungan, S. Suzuki, M. E. Schmidt, J. Sun and M. Muruganathan
    • Organizer
      The International Conference on Solid-State and Integrated Circuit Technology (ICSICT2016)
    • Place of Presentation
      杭州(中国)
    • Year and Date
      2016-10-25
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] High functional Graphene nano-electromechanical devices for single molecule detection2016

    • Author(s)
      Muruganathan Manoharan, Jian Sun, Tomoyuki Imamura, Hiroshi Mizuta
    • Organizer
      2D Materials and Carbon Nanotube Workshop (2DMC2016)
    • Place of Presentation
      バンギ(マレーシア)
    • Year and Date
      2016-10-17
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Highly Functional Graphene Nano-Electromechanical (GNEM) Devices for Advanced Switch and Sensor Applications2016

    • Author(s)
      H. Mizuta, J. Sun, M. E. Schmidt and M. Muruganathan
    • Organizer
      The Symposium on Emerging Nanomaterials and Devices, PRiME 2016/230th ECS Meeting
    • Place of Presentation
      ホノルル(アメリカ)
    • Year and Date
      2016-10-02
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Static and Dynamic Contacts in Graphene Nano-Electro-Mechanical (NEM) Switches2016

    • Author(s)
      W. Wang, M. Muruganathan, and H. Mizuta
    • Organizer
      The 48th Solid State Devices and Materials (SSDM2016)
    • Place of Presentation
      つくば国際会議場(茨城県・つくば市)
    • Year and Date
      2016-09-26
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] Helium ion milling of HSQ covered graphene: Control of substrate swelling and imaging disorder2016

    • Author(s)
      Marek Schmidt, Ahmed Hammam, Manoharan Muruganathan, Shinichi Ogawa and Hiroshi Mizuta
    • Organizer
      第77回応用物理学会秋季学術講演会
    • Place of Presentation
      朱鷺メッセ(新潟県・新潟市)
    • Year and Date
      2016-09-13
    • Related Report
      2016 Research-status Report
  • [Presentation] チップ増強ラマン分光法によるグラフェンの局所ドーピング変化の検出2016

    • Author(s)
      岩﨑 拓哉, Taharh Zelai, Sheng Ye, Harold M. H. Chong, 土屋 良重, 水田 博
    • Organizer
      第77回応用物理学会秋季学術講演会
    • Place of Presentation
      朱鷺メッセ(新潟県・新潟市)
    • Year and Date
      2016-09-13
    • Related Report
      2016 Research-status Report
  • [Presentation] Electrical and Mechanical Characteristics of Nanocrystalline Graphene Nano-Electro-Mechanical Switches2016

    • Author(s)
      Jothiramalingam Kulothungan, Manoharan Muruganathan, Marek Schmidt and Hiroshi Mizuta
    • Organizer
      第77回応用物理学会秋季学術講演会
    • Place of Presentation
      朱鷺メッセ(新潟県・新潟市)
    • Year and Date
      2016-09-13
    • Related Report
      2016 Research-status Report
  • [Presentation] Signature of individual Gas Molecules Absorbed on Graphene2016

    • Author(s)
      Manoharan Muruganathan, Jian Sun and Hiroshi Mizuta
    • Organizer
      第77回応用物理学会秋季学術講演会
    • Place of Presentation
      朱鷺メッセ(新潟県・新潟市)
    • Year and Date
      2016-09-13
    • Related Report
      2016 Research-status Report
  • [Presentation] 三層グラフェン電界効果トランジスタの輸送特性におけるアニール効果2016

    • Author(s)
      岩﨑 拓哉, Manoharan Muruganathan, Marek Schmidt, 水田 博
    • Organizer
      第77回応用物理学会秋季学術講演会
    • Place of Presentation
      朱鷺メッセ(新潟県・新潟市)
    • Year and Date
      2016-09-13
    • Related Report
      2016 Research-status Report
  • [Presentation] Effect of coupling of a few donor-atoms as a quantum dot for single-electron tunneling operation at room temperature2016

    • Author(s)
      Daniel Ioan Moraru, Arup Samanta, Tarik Hasan, Manoharan Muruganathan, Hiroshi Mizuta and Michiharu Tabe
    • Organizer
      第77回応用物理学会秋季学術講演会
    • Place of Presentation
      朱鷺メッセ(新潟県・新潟市)
    • Year and Date
      2016-09-13
    • Related Report
      2016 Research-status Report
  • [Presentation] グラフェンフォノニックデバイスに向けたシングルナノメータ周期的ナノ孔構造の作製2016

    • Author(s)
      神崎 晃悠, シュミット マレク, ムルガナタン マノハラン, ハマム アーメド, 水田 博
    • Organizer
      第77回応用物理学会秋季学術講演会
    • Place of Presentation
      朱鷺メッセ(新潟県・新潟市)
    • Year and Date
      2016-09-13
    • Related Report
      2016 Research-status Report
  • [Presentation] Novel suspended graphene devices for extreme sensing2016

    • Author(s)
      H. Mizuta, J. Sun and M. Muruganathan
    • Organizer
      The ESSCIRC - ESSDERC 2016
    • Place of Presentation
      ローザンヌ(スイス)
    • Year and Date
      2016-09-12
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Graphene-based nanoelectronic and nano-electro-mechanical (NEM) devices for challenging applications2016

    • Author(s)
      H. Mizuta, A. Hammam, J. Kulothungan, S. Suzuki, M. E. Schmidt, J. Sun and M. Muruganathan
    • Organizer
      Nanonet International Workshop 2016
    • Place of Presentation
      プラハ(チェコ)
    • Year and Date
      2016-08-30
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Development of a TEM holder for electronic conductance measurement of suspended graphene nanoribbons2016

    • Author(s)
      X. Zhang, Y. Oshima, S. Iwashita, Manoharan Muruganathan, M. Schmidt and H. Mizuta
    • Organizer
      20th International Vacuum Congress
    • Place of Presentation
      プサン(韓国)
    • Year and Date
      2016-08-21
    • Related Report
      2016 Research-status Report
  • [Presentation] Recent progress of graphene-based nanoelectronic and NEM device technologies for advanced applications2016

    • Author(s)
      H. Mizuta, A. Hammam, S. Suzuki, J. Kulothungan, M. E. Schmidt, J. Sun and M. Muruganathan
    • Organizer
      The 2th IEEE International Conference on Semiconductor Electronics (IEEE-ICSE2016)
    • Place of Presentation
      クアラルンプール(マレーシア)
    • Year and Date
      2016-08-17
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Simultaneous conductance measurement and TEM observation of graphene nanoribbon2016

    • Author(s)
      Xiaobin Zhang, Shinya Iwashita, Marek E. Schmidt, Manoharan Muruganathan, Hiroshi Mizuta and Yoshifumi Oshima
    • Organizer
      Japanese Society of Microscopy 2016 Meeting
    • Place of Presentation
      仙台国際センター(宮城県・仙台市)
    • Year and Date
      2016-06-14
    • Related Report
      2016 Research-status Report
  • [Presentation] Recent progress in helium-ion-based nanofabrication for advanced graphene device applications2016

    • Author(s)
      M. E. Schmidt, O. Takechi, M. Muruganatan, A. Hammam, T. Kanzaki, S. Ogawa and H. Mizuta
    • Organizer
      The 1st International Conference on Helium Ion Microscopy and Emerging Focused Ion Beam Technologies (HEFIB 2016)
    • Place of Presentation
      ルクセンブルク(ルクセンブルク)
    • Year and Date
      2016-06-08
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Graphene NEMS-based sensors and switches2016

    • Author(s)
      M. Muruganathan, J. Sun, J. Kulothungan and H. Mizuta
    • Organizer
      Nanoelectronics & Nanotechnology Group Annual Conference 2016 "Sensors"
    • Place of Presentation
      サザンプトン(イギリス)
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] Graphene tunnel transistors for ultra-low-power applications2016

    • Author(s)
      A. Hammam, M. E. Schmidt, M. Muruganathan and H. Mizuta
    • Organizer
      Nanoelectronics & Nanotechnology Group Annual Conference 2016 "Sensors"
    • Place of Presentation
      サザンプトン(イギリス)
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Book] Nitrogen Ion Microscopy, Ion Beams2018

    • Author(s)
      Marek E. Schmidt, Masashi Akabori, and Hiroshi Mizuta
    • Total Pages
      29
    • Publisher
      InTech
    • ISBN
      9789535160908
    • Related Report
      2017 Annual Research Report
  • [Book] NEMS技術とフォノンエンジニアリング 『マイクロ・ナノスケールの次世代熱制御技術 フォノンエンジニアリング』2017

    • Author(s)
      水田博, マレク シュミット, 小川真一, マノハラン ムルガナタン
    • Total Pages
      9
    • Publisher
      NTS出版
    • ISBN
      9784860435097
    • Related Report
      2017 Annual Research Report
  • [Remarks] 水田教授が文部科学大臣表彰 科学技術賞受賞

    • URL

      https://www.jaist.ac.jp/whatsnew/press/2018/04/11-1.html

    • Related Report
      2017 Annual Research Report

URL: 

Published: 2016-04-21   Modified: 2019-03-29  

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