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Fabrication of an ultra-wide-band-gap semiconductor having a 7-eV band gap

Research Project

Project/Area Number 16K13673
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Crystal engineering
Research InstitutionSaga University

Principal Investigator

Oshima Takayoshi  佐賀大学, 理工学部, 准教授 (60583151)

Co-Investigator(Renkei-kenkyūsha) IMURA Masataka  物質材料研究機構, 主任研究員 (80465971)
TAKAHASHI Kazutoshi  佐賀大学, シンクロトロン光応用研究センター, 准教授 (30332183)
Research Collaborator KATO Yuji  佐賀大学, 理工学部
Project Period (FY) 2016-04-01 – 2018-03-31
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000)
Fiscal Year 2017: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2016: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Keywords酸化ガリウム / 混晶 / 超格子 / 酸化アルミニウムガリウム / 超ワイドギャップ半導体 / 結晶成長 / 半導体物性 / ワイドギャップ半導体
Outline of Final Research Achievements

(1) Growth of γ-(Al,Ga)2O3 single crystalline alloy films with entire alloy compositions were using MgAl2O4 substrates. The band gap of the alloy can be tuned in a wide range between 5.0 and 7.0 eV. (2)α-, and γ-Ga2O3/Al2O3 superlattices were fabricated on sapphire and MgAl2O4 substrates, respectively. Both superlattices revealed to have coherent interfaces, which is desirable for heterojunciton device applications. These results will encourage the studies on meta-stable phase (Al,Ga)2O3-based electronics.

Report

(3 results)
  • 2017 Annual Research Report   Final Research Report ( PDF )
  • 2016 Research-status Report
  • Research Products

    (36 results)

All 2018 2017 2016 Other

All Int'l Joint Research (2 results) Journal Article (7 results) (of which Peer Reviewed: 7 results,  Acknowledgement Compliant: 3 results,  Open Access: 2 results) Presentation (26 results) (of which Int'l Joint Research: 10 results,  Invited: 10 results) Patent(Industrial Property Rights) (1 results)

  • [Int'l Joint Research] マサチューセッツ工科大学 Palacios氏(米国)

    • Related Report
      2017 Annual Research Report
  • [Int'l Joint Research] ベルリン工科大学 Wagner氏(Germany)

    • Related Report
      2017 Annual Research Report
  • [Journal Article] α-Al2O3/Ga2O3 superlattices coherently grown on r-plane sapphire2018

    • Author(s)
      Takayoshi Oshima, Yuji Kato, Masataka Imura, Yoshiko Nakayama, Masaki Takeguchi
    • Journal Title

      Applied Physics Express

      Volume: 印刷中

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Crystal defects observed by the etch-pit method and their effects on Schottky-barrier-diode characteristics on (-201) β-Ga2O32017

    • Author(s)
      Makoto Kasu, Takayoshi Oshima, Kenji Hanada, Tomoya Moribayashi, Akihiro Hashiguchi, Toshiyuki Oishi, Kimiyoshi Koshi, Kohei Sasaki, Akito Kuramata, and Osamu Ueda
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 56 Issue: 9 Pages: 091101-091101

    • DOI

      10.7567/jjap.56.091101

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Electrical properties of Schottky barrier diodes fabricated on (001) β-Ga2O3 substrates with crystal defects2017

    • Author(s)
      Oshima Takayoshi、Hashiguchi Akihiro、Moribayashi Tomoya、Koshi Kimiyoshi、Sasaki Kohei、Kuramata Akito、Ueda Osamu、Oishi Toshiyuki、Kasu Makoto
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 56 Issue: 8 Pages: 086501-086501

    • DOI

      10.7567/jjap.56.086501

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Epitaxial growth of γ-(AlxGa1-x)O3 alloy films for band-gap engineering2017

    • Author(s)
      Takayoshi Oshima, Yuji Kato, Masaya Oda, Toshimi Hitora, and Makoto Kasu
    • Journal Title

      Applied Physics Express

      Volume: 印刷中

    • NAID

      210000135835

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Carrier confinement observed at modulation-doped β-(AlxGa1-x)2O3/Ga2O3 heterojunction interface2017

    • Author(s)
      Takayoshi Oshima, Yuji Kato, Naoto Kawano, Akito Kuramata, Shigenobu Yamakoshi, Shizuo Fujita, Toshiyuki Oishi, and Makoto Kasu
    • Journal Title

      Applied Physics Express

      Volume: 10 Issue: 3 Pages: 035701-035701

    • DOI

      10.7567/apex.10.035701

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Formation of indium-tin oxide ohmic contacts for β-Ga2O32016

    • Author(s)
      T. Oshima, R. Wakabayashi, M. Hattori, A. Hashiguchi, N. Kawano, K. Sasaki, T. Masui, A. Kuramata, S. Yamakoshi, K. Yoshimatsu, A. Ohtomo, T. Oishi, M. Kasu
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 55 Issue: 12 Pages: 1202B7-1202B7

    • DOI

      10.7567/jjap.55.1202b7

    • NAID

      210000147267

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Open Access
  • [Journal Article] Epitaxial growth and electric properties of γ-Al2O3 (110) films on β-Ga2O3 (010) substrates2016

    • Author(s)
      M. Hattori, T. Oshima, R. Wakabayashi, K. Yoshimatsu, K. Sasaki, T. Masui, A. Kuramata, S. Yamakoshi, K. Horiba, H. Kumigashira, A. Ohtomo
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 55 Issue: 12 Pages: 1202B6-1202B6

    • DOI

      10.7567/jjap.55.1202b6

    • NAID

      210000147266

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Presentation] MBE grown coherent alpha-Al2O3/Ga2O3 superlattices2018

    • Author(s)
      Takayoshi Oshima
    • Organizer
      European Materials Research Society
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] High voltage operation of Ga2O3 MOS photodiodes2018

    • Author(s)
      Takayoshi Oshima
    • Organizer
      Lester Eastman Conference
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Ga2O3-based metal-insulator-semiconductor photodiodes2018

    • Author(s)
      Takayoshi Oshima
    • Organizer
      SPIE Photonics West
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] コヒーレントα-Al2O3/Ga2O3超格子の作製2018

    • Author(s)
      加藤勇次,井村将隆,中山佳子,竹口雅樹,大島孝仁
    • Organizer
      2018年第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Band-gap engineering of metastable γ-(AlxGa1-x)2O3 alloy system2017

    • Author(s)
      Takayoshi Oshima, Yuji Kato, Masaya Oda, Toshimi Hitora, and Makoto Kasu
    • Organizer
      Compound Semiconductor Week 2017
    • Place of Presentation
      Berlin, Germany
    • Year and Date
      2017-05-14
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] Successful modulation-doping for β-(AlxGa1-x)2O3/β-Ga2O3 system2017

    • Author(s)
      Takayoshi Oshima, Yuji Kato, Naoto Kawano; Akito Kuramata, Shigenobu Yamakoshi; Shizuo Fujita; Toshiyuki Oishi, and Makoto Kasu
    • Organizer
      Compound Semiconductor Week 2017
    • Place of Presentation
      Berlin, Germany
    • Year and Date
      2017-05-14
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] Growth and characterization of (Al,Ga)2O3-based alloy and heterostructures2017

    • Author(s)
      Takayoshi Oshima
    • Organizer
      The 5th International Conference on Light-Emitting Devices and Their Industrial Applications
    • Place of Presentation
      Yokohama, Japan
    • Year and Date
      2017-04-19
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] (001)β-Ga2O3ショットキーバリアダイオードのリーク電流と結晶欠陥との関係2017

    • Author(s)
      橋口明広,森林朋也,大島孝仁,大石敏之,輿公祥,佐々木公平,倉又朗人,上田修,嘉数誠
    • Organizer
      2017年第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜,神奈川県
    • Year and Date
      2017-03-14
    • Related Report
      2016 Research-status Report
  • [Presentation] (-201)β-Ga2O3ショットキーバリアダイオードのリーク電流と結晶欠陥との関係2017

    • Author(s)
      森林朋也,橋口明広,大島孝仁,花田賢志,大石敏之,輿公祥,佐々木公平,倉又朗人,上田修,嘉数誠
    • Organizer
      2017年第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜,神奈川県
    • Year and Date
      2017-03-14
    • Related Report
      2016 Research-status Report
  • [Presentation] γ-(AlxGa1-x)2O3混晶系におけるバンドギャップ制御2017

    • Author(s)
      加藤勇次,大島孝仁,織田真也,人羅俊実,嘉数誠
    • Organizer
      2017年第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜,神奈川県
    • Year and Date
      2017-03-14
    • Related Report
      2016 Research-status Report
  • [Presentation] β-(AlxGa1-x)2O3/β-Ga2O3ヘテロ接合界面におけるキャリア閉じ込めの観察2017

    • Author(s)
      加藤勇次,大島孝仁,河野直士,倉又朗人,山腰茂伸,藤田静雄,大石敏之,嘉数誠
    • Organizer
      2017年第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜,神奈川県
    • Year and Date
      2017-03-14
    • Related Report
      2016 Research-status Report
  • [Presentation] 酸化ガリウム系ヘテロ接合界面におけるキャリア閉じ込めの観察2017

    • Author(s)
      大島孝仁,加藤勇次,河野直士,倉又朗人,山腰茂伸,藤田静雄,大石敏之,嘉数誠
    • Organizer
      電気学会 電子デバイス研究会 次世代化合物半導体デバイスの機能と応用
    • Place of Presentation
      絹の渓谷碧流,栃木県
    • Year and Date
      2017-03-09
    • Related Report
      2016 Research-status Report
    • Invited
  • [Presentation] EFG法β型酸化ガリウムの結晶欠陥とSBD素子特性との関連2017

    • Author(s)
      嘉数誠,花田賢志,大島孝仁
    • Organizer
      日本学術振興会結晶成長の科学と技術第161委員会第98回委員会
    • Place of Presentation
      長浜ロイヤルホテル,滋賀県
    • Year and Date
      2017-01-12
    • Related Report
      2016 Research-status Report
  • [Presentation] Electrical properties of Schottky diodes fabricated on a (001) β-Ga2O3 single crystal substrate having line-shaped voids and small defects2017

    • Author(s)
      Takayoshi Oshima, Akihiro Hashiguchi, Tomoya Moribayashi, Kimiyoshi Koshi, Kohei Sasaki, Akito Kuramata, Osamu Ueda, Toshiyuki Oishi, and Makoto Kasu
    • Organizer
      2nd International Workshop on Gallium Oxide and Related Materials
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Bandgap, excitons, phonons, and thermal conductivity of alpha-, beta-, gamma- and epsilon-Ga2O32017

    • Author(s)
      N. Jankowski, R. Gillen, G. Callsen, C. Nenstiel, F. Nippert, A. Hoffmann, J. S. Reparaz, P. O. Vaccaro, A. R. Go, M. Campoy-Quiles, M. Bosi, R. Fornari, J. Schurmann, M. Kracht, A. Karg, M. Eickhoff, T. Oshima, et al
    • Organizer
      2nd International Workshop on Gallium Oxide and Related Materials
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] (Al,Ga)2O3混晶系の現状について2017

    • Author(s)
      大島孝仁
    • Organizer
      2017年第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] 異なるキャリア濃度のβ-Ga2O3ダイオードを用いたレクテナ回路動作の検討2017

    • Author(s)
      深見成, 河野直士, 荒木幸二, 大島孝仁, 大石敏之
    • Organizer
      2017年第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] 低暗電流酸化ガリウムMIS光検出素子2017

    • Author(s)
      大島孝仁,橋川誠,富澤三世,佐々木公平,倉又 朗人,大石 敏之,嘉数 誠
    • Organizer
      2017年第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] β-Ga2O3ショットキーバリアダイオードのリーク電流と結晶欠陥との関係2016

    • Author(s)
      橋口明広,森林朋也,花田賢志,大島孝仁,大石敏之,輿公祥,佐々木公平,倉又朗人,上田修,嘉数誠
    • Organizer
      2016年第77回応用物理学会秋季学術講演会
    • Place of Presentation
      朱鷺メッセ,新潟県
    • Year and Date
      2016-09-13
    • Related Report
      2016 Research-status Report
  • [Presentation] 酸化ガリウムダイオードを用いたレクテナ回路動作2016

    • Author(s)
      河野直士,大島孝仁,嘉数誠,大石敏之
    • Organizer
      2016年第77回応用物理学会秋季学術講演会
    • Place of Presentation
      朱鷺メッセ,新潟県
    • Year and Date
      2016-09-13
    • Related Report
      2016 Research-status Report
  • [Presentation] β-Ga2O3用ITOオーミック電極2016

    • Author(s)
      大島孝仁,若林諒,服部真依,橋口明広,河野直士,佐々木公平,増井建和,倉又朗人,山腰茂伸,吉松公平,大友明,大石敏之,嘉数誠
    • Organizer
      2016年第77回応用物理学会秋季学術講演会
    • Place of Presentation
      朱鷺メッセ,新潟県
    • Year and Date
      2016-09-13
    • Related Report
      2016 Research-status Report
  • [Presentation] PLD and MBE growth of Ga2O3 and (AlxGa1-x)2O32016

    • Author(s)
      Takayoshi Oshima
    • Organizer
      German-Japanese Gallium Oxide Technology Meeting 2016
    • Place of Presentation
      Berlin, Germany
    • Year and Date
      2016-09-07
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] ITO ohmic contacts for β-Ga2O32016

    • Author(s)
      Takayoshi Oshima, Ryo Wakabayashi, Mai Hattori, Akihiro Hashiguchi, Naoto Kawano, Kohei Sasaki, Takekazu Masui, Akito Kuramata, Shigenobu Yamakoshi, Kohei Yoshimatsu, Akira Ohtomo, Toshiyuki Oishi, and Makoto Kasu
    • Organizer
      German-Japanese Gallium Oxide Technology Meeting 2016
    • Place of Presentation
      Berlin, Germany
    • Year and Date
      2016-09-07
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] γ型酸化ガリウム系半導体の開拓研究2016

    • Author(s)
      大島孝仁
    • Organizer
      第3回学産交流ポスターセッション
    • Place of Presentation
      新化学技術推進協会会議室
    • Related Report
      2016 Research-status Report
  • [Presentation] 酸化ガリウム系半導体の薄膜成長2016

    • Author(s)
      大島孝仁
    • Organizer
      第1回ISYSE 研究会
    • Place of Presentation
      広島大学
    • Related Report
      2016 Research-status Report
    • Invited
  • [Presentation] Mist CVD法の基礎と応用2016

    • Author(s)
      大島孝仁
    • Organizer
      日本学術振興会透明酸化物光・電子材料第166委員会第72回研究会
    • Place of Presentation
      田町キャンパスイノベーションセンター,東京都
    • Related Report
      2016 Research-status Report
    • Invited
  • [Patent(Industrial Property Rights)] 積層体および半導体装置2018

    • Inventor(s)
      大島孝仁,四戸孝,高橋勲
    • Industrial Property Rights Holder
      大島孝仁,四戸孝,高橋勲
    • Industrial Property Rights Type
      特許
    • Filing Date
      2018
    • Related Report
      2017 Annual Research Report

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Published: 2016-04-21   Modified: 2022-06-07  

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