Proof-of-Concept of Novel Three Dimensional Atom Probe without Needle Structured Sample
| Project/Area Number |
16K13685
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| Research Category |
Grant-in-Aid for Challenging Exploratory Research
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| Allocation Type | Multi-year Fund |
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| Research Field |
Thin film/Surface and interfacial physical properties
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| Research Institution | Kyoto University |
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Principal Investigator |
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| Project Period (FY) |
2016-04-01 – 2018-03-31
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| Project Status |
Completed (Fiscal Year 2017)
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| Budget Amount *help |
¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000)
Fiscal Year 2017: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2016: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
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| Keywords | アトムプローブ / 静電拡大投影 / 短焦点距離 / 平坦 / 倍率 / 拡大投影 / 電極間隔 / 空間分解能 / 単孔静電レンズ / 絶縁体 / 精密制御装置 / ピエゾ素子 / 三次元アトムプローブ / 単孔レンズ / 微小空隙 / 微細加工 |
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| Outline of Final Research Achievements |
A novel method to use flat sample in atom probe tomography where the sample is requested to be formed as a needle structure was examined. It was found that high magnification of the electrostatic projection comparable to the atom probe can be obtained by placing a counter electrode above the flat sample with a very short spacing. The electrodes for this experiment was designed and fabricated, and preliminary experiments were performed.
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Report
(3 results)
Research Products
(5 results)
