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Proof-of-Concept of Novel Three Dimensional Atom Probe without Needle Structured Sample

Research Project

Project/Area Number 16K13685
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Thin film/Surface and interfacial physical properties
Research InstitutionKyoto University

Principal Investigator

Gotoh Yasuhito  京都大学, 工学研究科, 准教授 (00225666)

Project Period (FY) 2016-04-01 – 2018-03-31
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000)
Fiscal Year 2017: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2016: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Keywordsアトムプローブ / 静電拡大投影 / 短焦点距離 / 平坦 / 倍率 / 拡大投影 / 電極間隔 / 空間分解能 / 単孔静電レンズ / 絶縁体 / 精密制御装置 / ピエゾ素子 / 三次元アトムプローブ / 単孔レンズ / 微小空隙 / 微細加工
Outline of Final Research Achievements

A novel method to use flat sample in atom probe tomography where the sample is requested to be formed as a needle structure was examined. It was found that high magnification of the electrostatic projection comparable to the atom probe can be obtained by placing a counter electrode above the flat sample with a very short spacing. The electrodes for this experiment was designed and fabricated, and preliminary experiments were performed.

Report

(3 results)
  • 2017 Annual Research Report   Final Research Report ( PDF )
  • 2016 Research-status Report
  • Research Products

    (5 results)

All 2018 2017 2016

All Presentation (5 results) (of which Int'l Joint Research: 1 results)

  • [Presentation] 短焦点発散静電レンズによる平面位置情報拡大投影手法の空間分解能2018

    • Author(s)
      前田然波、後藤康仁
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 短焦点発散静電レンズによる平面上位置情報拡大投影の倍率の電極間隔依存性2017

    • Author(s)
      前田然波、辻 博司、後藤康仁
    • Organizer
      第58回真空に関する連合講演会(2017年真空・表面科学合同講演会)
    • Related Report
      2017 Annual Research Report
  • [Presentation] Large magnification of charged particle distribution on plane surface by electrostatic divergent lens with extremely short focal length2017

    • Author(s)
      Yasuhito Gotoh, Saba Maeda, and Hiroshi Tsuji
    • Organizer
      The 30th International Vacuum Nanoelectronics Conference
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 短焦点発散性電レンズによる平面位置情報拡大投影の倍率の一様性2017

    • Author(s)
      前田然波、辻 博司、後藤康仁
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 短焦点距離の発散レンズを用いた二次元位置情報の拡大投影技術の検討2016

    • Author(s)
      後藤康仁、辻 博司
    • Organizer
      第57回真空に関する連合講演会
    • Place of Presentation
      名古屋国際会議場
    • Year and Date
      2016-11-30
    • Related Report
      2016 Research-status Report

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Published: 2016-04-21   Modified: 2019-03-29  

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