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Developing three-dimensional measurement method for nano- and atomistic structures using focal series of aberration-corrected transmission electron microscopy images

Research Project

Project/Area Number 16K13688
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Thin film/Surface and interfacial physical properties
Research InstitutionOsaka University

Principal Investigator

Yamasaki Jun  大阪大学, 超高圧電子顕微鏡センター, 准教授 (40335071)

Co-Investigator(Kenkyū-buntansha) 田中 信夫  名古屋大学, 未来材料・システム研究所, 研究員 (40126876)
Co-Investigator(Renkei-kenkyūsha) SAITOH KOH  名古屋大学, 未来材料・システム研究所, 教授 (50292280)
GOHARA KAZUTOSHI  北海道大学, 工学研究院, 教授 (40153746)
HIRATA AKIHIKO  東北大学, 原子分子材料科学高等研究機構, 准教授 (90350488)
KOBAYASHI KEITA  大阪大学, 超高圧電子顕微鏡センター, 助教 (40556908)
Project Period (FY) 2016-04-01 – 2018-03-31
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥3,770,000 (Direct Cost: ¥2,900,000、Indirect Cost: ¥870,000)
Fiscal Year 2017: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2016: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Keywords収差補正電子顕微鏡 / 正焦点 / 格子縞コントラスト / 金属ナノ粒子 / 三次元分布 / 非整合エピタキシャル界面 / 三次元観察 / 収差補正TEM / 焦点位置スキャン / 結晶格子縞 / ナノ粒子 / 動画計測 / 三次元計測 / 深さ分解能 / ナノ構造 / 単原子
Outline of Final Research Achievements

One of the imaging features in aberration-corrected transmission electron microscopy (AC-TEM) is that lattice fringe contrast is minimized at the in-focus condition. By utilizing the feature, we developed a new method to observe three-dimensional dispersion of metallic nano particles from a focal series of AC-TEM images. In the process, we developed a filtering procedure to display magnitude of lattice fringe contrast quantitatively. By using the filtering procedure, we also succeeded in developing a method to measure roughness at mismatch epitaxial interfaces between semiconducting materials.

Report

(3 results)
  • 2017 Annual Research Report   Final Research Report ( PDF )
  • 2016 Research-status Report
  • Research Products

    (2 results)

All 2017

All Journal Article (1 results) (of which Peer Reviewed: 1 results,  Acknowledgement Compliant: 1 results) Presentation (1 results) (of which Invited: 1 results)

  • [Journal Article] 結像系収差補正電子顕微鏡(収差補正TEM)を駆使した微細構造解析手法の進展2017

    • Author(s)
      山﨑 順
    • Journal Title

      触媒

      Volume: 59 Pages: 82-88

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Presentation] Precise measure of the depth resolution in aberration-corrected TEM2017

    • Author(s)
      Jun Yamasaki, Koh Saitoh, and Nobuo Tanaka
    • Organizer
      日本顕微鏡学会 第73回学術講演会
    • Related Report
      2017 Annual Research Report
    • Invited

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Published: 2016-04-21   Modified: 2019-03-29  

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