| Project/Area Number |
16K13725
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| Research Category |
Grant-in-Aid for Challenging Exploratory Research
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| Allocation Type | Multi-year Fund |
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| Research Field |
Quantum beam science
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| Research Institution | Osaka University |
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Principal Investigator |
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| Research Collaborator |
SHIMOMURA kei
HIROSE makoto
HIGASHINO takaya
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| Project Period (FY) |
2016-04-01 – 2019-03-31
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| Project Status |
Completed (Fiscal Year 2018)
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| Budget Amount *help |
¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000)
Fiscal Year 2017: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Fiscal Year 2016: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
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| Keywords | X線イメージング / ナノ構造科学 / 放射光 / 量子ビーム |
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| Outline of Final Research Achievements |
Multislice X-ray ptychography can overcome the limitation of the depth of field, reconstructing sectional images perpendicular to the propagation direction without degradation of the spatial resolution and laborious sample preparation. We experimentally demonstrated a multislice x-ray ptychography in combination with precession measurements that can reconstruct multisection images of optically thick objects. In addition, we proposed an improved 3D reconstruction algorithm for X-ray ptychography that is based on 3D iterative reconstruction and multislice phase retrieval calculation. In a synchrotron experiment, ptychographic diffraction data sets of a flat and thick processor specimen were collected under a limited-angle condition, and then high-resolution multislice images of the Cu multilevel interconnects were clearly reconstructed using the proposed algorithm.
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| Academic Significance and Societal Importance of the Research Achievements |
物質や生体の組織・構造および構成元素の分布を広い空間スケールで可視化する技術が希求されている。既に、電子顕微鏡やプローブ顕微鏡技術は成熟し、様々な応用研究が展開されている。しかしながら、これらの先端的観察技術を駆使しても、厚い試料を非破壊で3次元的に高い空間分解能で観察することは難しいのが現状である。マルチスライスＸ線タイコグラフィが広視野・高分解能三次元ナノ構造可視化法として確立されたことで、今後、様々な実用デバイスの三次元非破壊観察への応用が期待される。
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