• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

Development o fusion measurement method of acoustic-emission by scanning probe microscope

Research Project

Project/Area Number 16K14123
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Materials/Mechanics of materials
Research InstitutionNational Institute of Advanced Industrial Science and Technology

Principal Investigator

FUJISAWA Satoru  国立研究開発法人産業技術総合研究所, 製造技術研究部門, 主任研究員 (20357908)

Co-Investigator(Kenkyū-buntansha) 間野 大樹  国立研究開発法人産業技術総合研究所, 製造技術研究部門, 主任研究員 (40344212)
三宅 晃司  国立研究開発法人産業技術総合研究所, 製造技術研究部門, 研究グループ長 (30302392)
Research Collaborator MIYAKE Koji  
Project Period (FY) 2016-04-01 – 2018-03-31
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000)
Fiscal Year 2017: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2016: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
Keywords走査型プローブ顕微鏡 (SPM) / スキャナ圧電体 / 重畳信号 / アコースティックエミッション (AE) / Cu (銅) 配線 / 電気的・機械的破壊 / アコースティックエミッション(AE) / 摩擦力顕微鏡(FFM) / Cu(銅)配線 / アコースティック・エミッション(AE) / 融石英表面 / ダイヤモンド / 走査型プローブ顕微鏡 / アコースティックエミッション / 確率共鳴
Outline of Final Research Achievements

By using the superimposing signal of acoustic emission (AE) A scanning probe microscope (SPM), the fracture by the nano-scale contact should be investigated to understand the mechanism of the mechanical processing. Using a combination of the scanning probe microscope (SPM), the AE signal might be detected with receiving the AE wave by the piezoelectric scanner of the SPM, by using with the piezoelectric effect the electric signal due to the AE wave is superimposed on the scan signal. Based on that, in this study, a novel method to detect AE signal from the scan signal is developed. By eliminating the scan signal that is in the signal, by using the electric filter the AE signal can be detected, where the detection is simultaneously with the detection the force of SPM. Expecting the need for the higher sensitivity for the AE detection of hard processing material, the evaluation of the sensitivity for AE and the improvement of the sensitivity, and the new detection method is challenged.

Report

(3 results)
  • 2017 Annual Research Report   Final Research Report ( PDF )
  • 2016 Research-status Report
  • Research Products

    (5 results)

All 2017 2016

All Journal Article (1 results) (of which Int'l Joint Research: 1 results,  Peer Reviewed: 1 results,  Open Access: 1 results,  Acknowledgement Compliant: 1 results) Presentation (3 results) (of which Int'l Joint Research: 1 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] A novel detection method for acoustic emission using a scanning probe microscope2016

    • Author(s)
      S. Fujisawa, H. Mano and K. Miyake
    • Journal Title

      Tribology Online

      Volume: 11 Pages: 646-652

    • NAID

      130005429964

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Open Access / Int'l Joint Research / Acknowledgement Compliant
  • [Presentation] 走査型プローブ顕微鏡におけるアコースティックエミッションの検出方法の研究2017

    • Author(s)
      藤澤悟、間野大樹、三宅晃司
    • Organizer
      第8回マイクロ・ナノ工学シンポジウム
    • Related Report
      2017 Annual Research Report
  • [Presentation] 走査型プローブ顕微鏡におけるアコースティックエミッションの検出方法の研究2016

    • Author(s)
      藤澤悟、間野大樹、三宅晃司
    • Organizer
      トライボロジー会議2016春 東京
    • Place of Presentation
      国立オリンピック記念青少年総合センター(東京都)
    • Related Report
      2016 Research-status Report
  • [Presentation] A novel detection method of the acoustic emission by using the scanning probe microscope2016

    • Author(s)
      S. Fujisawa, H. Mano and K. Miyake
    • Organizer
      IIIAE (8th International Conference on Acoustic Emission Inauguration conference of 3IAE and 23rd International Acoustic Emission Symposium)
    • Place of Presentation
      京都テルサ(京都市)
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Patent(Industrial Property Rights)] 微小変位機構2016

    • Inventor(s)
      藤澤悟
    • Industrial Property Rights Holder
      国立研究開発法人産業技術総合研究所
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2016-160541
    • Filing Date
      2016-07-25
    • Related Report
      2016 Research-status Report

URL: 

Published: 2016-04-21   Modified: 2019-03-29  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi