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Resonant Photoacoustic Sensor

Research Project

Project/Area Number 16K14189
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Intelligent mechanics/Mechanical systems
Research InstitutionTohoku University

Principal Investigator

Ono Takahito  東北大学, 工学研究科, 教授 (90282095)

Project Period (FY) 2016-04-01 – 2018-03-31
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000)
Fiscal Year 2017: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2016: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Keywords高感度センサ / 光音響 / ヘルスケア / 振動子 / Q値 / グルコース / 生体物質 / 非侵襲 / センサ / 音波
Outline of Final Research Achievements

A photoacoustic sensor is developed for the noninvasive detection of biological substances in human body. The photoacoustic sensor is consisted of a high quality factor silicon resonator which is hermetically packaged by glass-silicon bonding. A glass window is formed in the sensor in order to irradiate pulse laser light to an object. The laser pulses passing through the window is irradiated to the object is converted to acoustic wave if the laser pulses are absorbed. The acoustic wave travels to the resonators via the glass and silicon support, thus, the acoustic wave can be detected from the vibration amplitude of the resonator. It is demonstrated that the small amount of glucose concentration in gelatin samples can be estimated from the developed photoacoustic sensors.

Academic Significance and Societal Importance of the Research Achievements

本研究が成功すれば、非侵襲で体内物質を検出でき、ヘルスケアなどの応用が期待できる。

Report

(3 results)
  • 2017 Annual Research Report   Final Research Report ( PDF )
  • 2016 Research-status Report
  • Research Products

    (20 results)

All 2018 2017 2016

All Journal Article (9 results) (of which Int'l Joint Research: 3 results,  Peer Reviewed: 8 results,  Open Access: 1 results,  Acknowledgement Compliant: 5 results) Presentation (11 results) (of which Int'l Joint Research: 7 results)

  • [Journal Article] ELECTRICALLY DRIVEN ION TRANSPORT IN NANOPORES FABRICATED BY METAL ASSISTED CHEMICAL ETCHING METHOD2018

    • Author(s)
      Nguyen Van Toan, Naoki Inomata, Masaya Toda, and Takahito Ono
    • Journal Title

      Proceeding of IEEE International Conference on Micro Electro Mechanical Systems

      Volume: 19 Pages: 1253-1256

    • Related Report
      2017 Annual Research Report
  • [Journal Article] Design and Fabrication of Capacitive Silicon Nanomechanical Resonators with Selective Vibration of a High-Order Mode2017

    • Author(s)
      Toan Nguyen、Shimazaki Tsuyoshi、Inomata Naoki、Song Yunheub、Ono Takahito
    • Journal Title

      Micromachines

      Volume: 8 Issue: 10 Pages: 312-312

    • DOI

      10.3390/mi8100312

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Progress in performance enhancement methods for capacitive silicon resonators2017

    • Author(s)
      Nguyen Van Toan and Takahito Ono
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 56 Issue: 11 Pages: 110101-110101

    • DOI

      10.7567/jjap.56.110101

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Vacuum packaged cantilever sensor mounted with a magnetic particle for magnetic force detection2017

    • Author(s)
      Gaopeng Xue, Masaya Toda, Takahito Ono
    • Journal Title

      Proceedings of the International Conference on Solid-State Sensors, Actuators and Microsystems

      Volume: 19 Pages: 1096-1099

    • DOI

      10.1109/transducers.2017.7994243

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Design and fabrication of a large area freestanding compressive stress SiO2 optical window2016

    • Author(s)
      Nquyen Van Toan, suguru Sangu and Takahito Ono
    • Journal Title

      Journal of Micromechanics and Microengineering

      Volume: 26 Issue: 7 Pages: 075016-075016

    • DOI

      10.1088/0960-1317/26/7/075016

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Single and mechanically coupled capacitive silicon nanomechanical resonators2016

    • Author(s)
      Nguyen Van Toan, Tsuyoshi Shimazaki, and Takahito Ono
    • Journal Title

      Micro & Nano Letters

      Volume: 11 Issue: 10 Pages: 591-594

    • DOI

      10.1049/mnl.2016.0265

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Fabrication of high aspect ratio SiO2 and Tempax glass pillar structures and its application for optical modulator device2016

    • Author(s)
      Nguyen Van Toan, Suguru Sangu, and Takahito Ono
    • Journal Title

      Journal of Microelectromechanical Systems

      Volume: 25 Issue: 4 Pages: 668-674

    • DOI

      10.1109/jmems.2016.2581184

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Parametrically Actuated Resonant Micromirror Using Stiffness Tunable Torsional Springs2016

    • Author(s)
      Y. Kawai, J.H. Kim, N. Inomata, and T. Ono
    • Journal Title

      Sensors and Materials

      Volume: 28 Pages: 131-139

    • DOI

      10.18494/SAM.2016.1163

    • ISSN
      0914-4935, 2435-0869
    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] High Aspect Ratio Silicon Structures Produced via Metal Assisted Chemical Etching and Assembly Technology for Cantilever Fabrication2016

    • Author(s)
      Nguyen Van Toan, Masaya Toda, and Takahito Ono
    • Journal Title

      IEEE Transactions on Nanotechnology

      Volume: 99 Issue: 4 Pages: 1-1

    • DOI

      10.1109/tnano.2016.2645781

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
  • [Presentation] Fabrication of high aspect aluminum doped zinc oxide nanomechanical structures by deep RIE and ALD2017

    • Author(s)
      Nguyen Van Toan, and Takahito Ono
    • Organizer
      The 30th IEEE International Conference on Micro Electro Mechanical Systems
    • Place of Presentation
      Las Vegas, USA
    • Year and Date
      2017-01-22
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] RESONANT MAGNETIC SENSOR USING MAGNETIC GRADIENT FIELD FORMED BY PERMALLOY CONCENTRATOR2017

    • Author(s)
      Wataru Suwa, Naoki Inomata, Masaya Toda and Takahito Ono
    • Organizer
      The 19th International Conference on Solid-State Sensors, Actuators and Microsystems
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 酸化バナジウム薄膜のピエゾ抵抗評価と圧力センサ応用2017

    • Author(s)
      猪股 直生, 小野 崇人
    • Organizer
      第34回「センサ・マイクロマシンと応用システム」シンポジウム
    • Related Report
      2017 Annual Research Report
  • [Presentation] Capacitive silicon nanomechanical resonators capable of selective vibration of high-order mode2017

    • Author(s)
      Nguyen Van Toan, Tsuyoshi Shimazaki, Naoki Inomata, Takahito Ono
    • Organizer
      第34回「センサ・マイクロマシンと応用システム」シンポジウム
    • Related Report
      2017 Annual Research Report
  • [Presentation] バナジウムドープ二硫化モリブデン二次元膜の合成に関する研究2017

    • Author(s)
      朱 敏杰, 猪股 直生, 小野 崇人
    • Organizer
      第34回「センサ・マイクロマシンと応用システム」シンポジウム
    • Related Report
      2017 Annual Research Report
  • [Presentation] パーマロイコンセントレータによる磁場勾配を用いた共振型磁気センサ2017

    • Author(s)
      諏訪 亘, 猪股 直生, 戸田 雅也, 小野 崇人
    • Organizer
      第34回「センサ・マイクロマシンと応用システム」シンポジウム
    • Related Report
      2017 Annual Research Report
  • [Presentation] High aspect silicon structures using metal assisted chemical etching2016

    • Author(s)
      N.V. Toan, M. Toda, and T. Ono
    • Organizer
      The 16th International Conference on Nanotechnology
    • Place of Presentation
      Sendai, Japan
    • Year and Date
      2016-08-22
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] Resonant acoustic microsensor for photoacoustic detection2016

    • Author(s)
      Imran Latif. Zhonglie An, and Takahito Ono
    • Organizer
      The 16th International Conference on Nanotechnology
    • Place of Presentation
      Sendai International Center, Sendai, Japan
    • Year and Date
      2016-08-22
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] Fabrication and evaluation of CVD diamond resonators2016

    • Author(s)
      Yuya Mochimaru, Masaya Toda and Takahito Ono
    • Organizer
      The 16th International Conference on Nanotechnology
    • Place of Presentation
      Sendai International Center, Sendai, Japan
    • Year and Date
      2016-08-22
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] Grass reflow process and its applications2016

    • Author(s)
      Nguyen Van Toan, Suguru Sangu, and Takahito Ono
    • Organizer
      Proceeding of the 11th IEEE International Conference on Nano/Micro Engineered and. Molecular Systems
    • Place of Presentation
      Taikanso, Matsushima, Miyagi
    • Year and Date
      2016-04-17
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] Mechannically coupled capacitive silicon nanomechanical resonators2016

    • Author(s)
      Tsuyoshi Shimazaki, Nguyen Van Toan, and Takahito Ono
    • Organizer
      The 11th IEEE International Conference on Nano/Micro Engineered and. Molecular Systems
    • Place of Presentation
      Taikanso, Matsushima, Miyagi
    • Year and Date
      2016-04-17
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research

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Published: 2016-04-21   Modified: 2021-01-27  

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