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Discovery of large electro caloric effect using HfO2-based ferroelectric ultra thin films

Research Project

Project/Area Number 16K14380
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Inorganic materials/Physical properties
Research InstitutionTokyo Institute of Technology

Principal Investigator

FUNAKUBO Hiroshi  東京工業大学, 物質理工学院, 教授 (90219080)

Co-Investigator(Kenkyū-buntansha) 山田 智明  名古屋大学, 工学研究科, 准教授 (80509349)
Project Period (FY) 2016-04-01 – 2018-03-31
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000)
Fiscal Year 2017: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Fiscal Year 2016: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Keywords電気熱量効果 / 酸化ハフニウム強誘電性 / 酸化ハフニウム / 強誘電体
Outline of Final Research Achievements

0.07YO1.5-0.93HfO2(7YHO) films prepared at room temperature and the following heat treatment show ferroelectricity almost compatible with those directly crystallized by high temperature deposition in case of PLD deposited films. Films deposited by sputtering process also show the similar ferroelectricity with that by PLD process when we selected room temperature deposition and the following heat treatment. PUND measurement after the subtraction of the leakage contribution is a best way to exact estimate exact remenent polarization. (111)-oriented epitaxial 7YHO films show the negative electrocaloric effect.

Report

(3 results)
  • 2017 Annual Research Report   Final Research Report ( PDF )
  • 2016 Research-status Report
  • Research Products

    (41 results)

All 2018 2017 2016 Other

All Journal Article (7 results) (of which Peer Reviewed: 7 results,  Acknowledgement Compliant: 3 results) Presentation (29 results) (of which Int'l Joint Research: 5 results,  Invited: 2 results) Book (1 results) Remarks (3 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] Indirect measurements of electrocaloric effect in ferroelectric thin films by positive-up-negative-down method2017

    • Author(s)
      Shogo Matsuo, Tomoaki Yamada, Takafumi Kamo, Hiroshi Funakubo, Masahito Yoshino, and Takanori Nagasaki
    • Journal Title

      Journal of the Ceramic Society of Japan

      Volume: 125 Issue: 6 Pages: 441-444

    • DOI

      10.2109/jcersj2.16283

    • NAID

      130006899926

    • ISSN
      1348-6535, 1882-0743
    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Epitaxial growth of YO1.5 doped HfO2 films on (100) YSZ substrates with various concentrations2017

    • Author(s)
      Takao Shimizu, Kiliha Katayama, and Hiroshi Funakubo
    • Journal Title

      Ferroelectrics

      Volume: 512 Issue: 1 Pages: 105-110

    • DOI

      10.1080/00150193.2017.1349994

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Experimental study of effect of strain on electrocaloric effect in (001)-epitaxial (Ba,Sr)TiO3 thin films2017

    • Author(s)
      Tomoaki Yamada, Shogo Matsuo, Takafumi Kamo, Hiroshi Funakubo, Masahito Yoshino, and Takanori Nagasaki
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 56 Issue: 10S Pages: 10PF15-10PF15

    • DOI

      10.7567/jjap.56.10pf15

    • NAID

      210000148392

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Nonlinear electric field dependence of electrocaloric effect in (001)-epitaxial (Ba, Sr) TiO3 thin films2017

    • Author(s)
      S. Matsuo, T. Yamada, M. Yoshino, T. Nagasaki, T. Kamo, and H. Funakubo
    • Journal Title

      Proc. IEEE ISAF-IWATMD-PFM 2017

      Volume: - Pages: 68-70

    • DOI

      10.1109/isaf.2017.8000214

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Indirect measurements of electrocaloric effect in ferroelectric thin films by positive-up-negative-down method2017

    • Author(s)
      Shogo Matsuo, Tomoaki Yamada, Takafumi Kamo, Hiroshi Funakubo, Masahito Yoshino, Takanori Nagasaki
    • Journal Title

      Journal of the Ceramic Society of Japan

      Volume: 125

    • NAID

      130006899926

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Formation of (111) orientation-controlled ferroelectric orthorhombic HfO2 thin films from solid phase via annealing2016

    • Author(s)
      Takanori Mimura, Kiliha Katayama, Takao Shimizu, Hiroshi Uchida, Takanori Kiguchi, Akihiro Akama, Toyohiko J. Konno, Osami Sakata, and Hiroshi Funakubo
    • Journal Title

      Appl. Phys. Lett.

      Volume: 109 Issue: 5

    • DOI

      10.1063/1.4960461

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Growth of (111)-oriented epitaxial and textured ferroelectric Y-doped HfO2 films for downscaled devices2016

    • Author(s)
      Kiliha Katayama, Takao Shimizu, Osami Sakata, Takahisa Shiraishi, Syogo Nakamura, Takanori Kiguchi, Akihiro Akama, Toyohiko J. Konno, Hiroshi Uchida, and Hiroshi Funakubo
    • Journal Title

      Appl. Phys. Lett.

      Volume: 109 Issue: 11

    • DOI

      10.1063/1.4962431

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Presentation] ZrO2 薄膜の結晶構造に対するドーパント効果2018

    • Author(s)
      崔ス珍、白石貴久、木口賢紀、今野豊彦、清水荘雄、舟窪浩
    • Organizer
      日本セラミックス協会 2018年年会
    • Related Report
      2017 Annual Research Report
  • [Presentation] エピタキシャル成長したHfO2 基強誘電体膜における結晶構造の膜厚依存性2018

    • Author(s)
      三村和仙、清水荘雄、木口賢紀、赤間章裕、今野豊彦、勝矢良雄、坂田修身、舟窪浩
    • Organizer
      日本セラミックス協会 2018年年会
    • Related Report
      2017 Annual Research Report
  • [Presentation] エピタキシャルHfO2基強誘電体における強誘電特性の膜厚依存性2018

    • Author(s)
      三村和仙、清水荘雄、勝矢良雄、坂田修身、舟窪浩
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] エピタキシャルCeO2-ZrO2薄膜の作製とその結晶構造評価2018

    • Author(s)
      白石貴久、Sujin Choi、清水荘雄、木口賢紀、舟窪浩、今野豊彦
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Positive-up-negative-down法による(Ba,Sr)TiO3薄膜の電気熱量効果の間接的評価2017

    • Author(s)
      山田智明、松尾翔吾、加茂崇史、舟窪浩、吉野正人、長﨑正雅
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜(神奈川県)
    • Year and Date
      2017-03-14
    • Related Report
      2016 Research-status Report
  • [Presentation] スパッタリング法によるY2O3-HfO2強誘電体エピタキシャル薄膜作製とその評価2017

    • Author(s)
      鈴木大生、三村和仙、清水荘雄、内田寛、舟窪浩
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜(神奈川県)
    • Year and Date
      2017-03-14
    • Related Report
      2016 Research-status Report
  • [Presentation] エピタキシャルHfO2基膜における強誘電相の安定性 -RE2O3-HfO2 vs ZrO2-HfO2-2017

    • Author(s)
      三村和仙、片山きりは、清水荘雄、木口賢紀、赤間章裕、今野豊彦、坂田修身、舟窪浩
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜(神奈川県)
    • Year and Date
      2017-03-14
    • Related Report
      2016 Research-status Report
  • [Presentation] Y2O3-HfO2エピタキシャル薄膜の構成相の決定因子2017

    • Author(s)
      鈴木大生、三村和仙、清水荘雄、、内田寛、舟窪浩
    • Organizer
      第55回セラミックス協会基礎科学討論会
    • Place of Presentation
      岡山コンベンションセンター(岡山県)
    • Year and Date
      2017-01-12
    • Related Report
      2016 Research-status Report
  • [Presentation] Phase stability and Property design in HfO2-based ferroelectric thin films2017

    • Author(s)
      Hiroshi Funakubo, Takao Shimizu, Kiliha Katayama, Takanori Mimura, Takanori Kiguchi, Takahisa Shiraishi, Akihiro Akama, Toyohiko J. Konno, and Osami Sakata
    • Organizer
      ICE 2017(8th International Conference on Electroceramics)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 強誘電体材料の比較 -ペロブスカイト基構造 vs. 蛍石基構造-2017

    • Author(s)
      舟窪浩、清水荘雄
    • Organizer
      2017年強的秩序とその操作に関する第5回研究会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Stability of Ferroelectric Phase in Epitaxial HfO2-based Films2017

    • Author(s)
      Takanori Mimura, Kiriha Katayama, Takao Shimizu, Takanori Kiguchi, Akihiko Akama, Toyohiko J. Konno, Osami Sakata, and Hiroshi Funakubo
    • Organizer
      2017 Joint IEEE ISAF-IWATMD-PFM Conference
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Nonlinear electric field dependence of electrocaloric effect in (001)-epitaxial (Ba, Sr) TiO3 thin films2017

    • Author(s)
      S. Matsuo, T. Yamada, T. Kamo, H. Funakubo, M. Yoshino and T. Nagasaki
    • Organizer
      2017 Joint IEEE ISAF-IWATMD-PFM Conference
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Indirect measurements of electrocaloric effect in (001) (Ba, Sr)TiO3 thin films by positive-up-negative-down method2017

    • Author(s)
      Shogo Matsuo, Tomoaki Yamada, Takafumi Kamo, Hiroshi Funakubo, Masahito Yoshino, and Takanori Nagasaki
    • Organizer
      ICE2017(8th International Conference on Electroceramics)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] HfO2基強誘電体エピタキシャル薄膜研究の最近の進展2017

    • Author(s)
      清水荘雄、三村和仙、舟窪浩
    • Organizer
      第34回強誘電体応用会議(FMA34)
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] (001)エピタキシャル(Ba,Sr)TiO3薄膜における電気熱量効果の電場依存性2017

    • Author(s)
      山田智明、松尾翔吾、加茂崇史、舟窪浩、吉野正人、長﨑正雅
    • Organizer
      第34回強誘電体応用会議(FMA34)
    • Related Report
      2017 Annual Research Report
  • [Presentation] Thickness-dependent phase stability of epitaxial ferroelectric HfO2-based films2017

    • Author(s)
      Takanori Mimura, Kiriha Katayama, Takao Shimizu, Takanori Kiguchi, Akihiro Akama, Toyohiko J. Konno, Osami Sakata, and Hiroshi Funakubo
    • Organizer
      STAC-10 (The Tenth International Conference on the Science and Technology for Advanced Ceramics)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Y添加HfO2エピタキシャル薄膜における負の電気熱量効果2017

    • Author(s)
      松尾翔吾、山田智明、三村和仙、清水荘雄、舟窪浩、吉野正人、長崎正雅
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] スパッタリング法による{100}配向Y2O3-HfO2強誘電体エピタキシャル薄膜の作製とその評価2017

    • Author(s)
      鈴木大生、三村和仙、清水荘雄、内田寛、舟窪浩
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Y2O3-HfO2強誘電体の温度安定性2017

    • Author(s)
      三村和仙、清水荘雄、木口賢紀、赤間章裕、今野豊彦、勝矢良雄、坂田修身、舟窪浩
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] ペロブスカイト型および蛍石型強誘電体薄膜の電気熱量効果2017

    • Author(s)
      山田智明、松尾翔吾、加茂崇史、三村和仙、清水荘雄、舟窪浩、吉野正人、長崎正雅
    • Organizer
      2017年強的秩序とその操作に関する第5回研究会
    • Related Report
      2017 Annual Research Report
  • [Presentation] HfO2基材料における強誘電相発現要因の検討2017

    • Author(s)
      清水荘雄、三村和仙、木口賢紀、赤間章裕、今野豊彦、坂田修身、舟窪浩
    • Organizer
      日本セラミックス協会第30回秋季シンポジウム
    • Related Report
      2017 Annual Research Report
  • [Presentation] HfO2基強誘電体のドメイン構造と電場誘起スイッチング2017

    • Author(s)
      清水荘雄、三村和仙、木口賢紀、白石貴久、赤間章裕、今野豊彦、坂田修身、勝矢良雄、舟窪浩
    • Organizer
      第37回エレクトロセラミックス研究討論会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Positive-up-negative-down法を用いた強誘電体薄膜の電気熱量効果の間接的評価2016

    • Author(s)
      松尾翔吾, 山田智明, 加茂崇史, 舟窪浩, 吉野正人, 長崎正雅
    • Organizer
      第48回日本原子力学会中部支部研究発表会
    • Place of Presentation
      名古屋大学(愛知県)
    • Year and Date
      2016-12-15
    • Related Report
      2016 Research-status Report
  • [Presentation] エピタキシャル(Ba, Sr)TiO3薄膜の残留歪み及び印加電界が電気熱量効果に与える影響2016

    • Author(s)
      松尾翔吾、山田智明、加茂崇史、舟窪浩、吉野正人、長埼正雅
    • Organizer
      第36回エレクトロセラミックス研究討論会
    • Place of Presentation
      ユニオンビル(富士通労働会館)(神奈川県)
    • Year and Date
      2016-10-13
    • Related Report
      2016 Research-status Report
  • [Presentation] 電界印加によるYO1.5-HfO2基薄膜の結晶構造変化2016

    • Author(s)
      清水荘雄、三村和仙、片山きりは、木口賢紀、赤間章裕、今野豊彦、坂田修身、舟窪浩
    • Organizer
      第77回応用物理学会秋季学術講演会
    • Place of Presentation
      朱鷺メッセ(新潟県)
    • Year and Date
      2016-09-13
    • Related Report
      2016 Research-status Report
  • [Presentation] HfO2基強誘電体の結晶構造と特性の熱処理温度依存性2016

    • Author(s)
      三村和仙、清水荘雄、内田寛、木口賢紀、赤間章裕、今野豊彦、坂田修身、舟窪 浩
    • Organizer
      第77回応用物理学会秋季学術講演会
    • Place of Presentation
      朱鷺メッセ(新潟県)
    • Year and Date
      2016-09-13
    • Related Report
      2016 Research-status Report
  • [Presentation] 強誘電体(Ba, Sr)TiO3;薄膜の電気熱量効果の電界依存性2016

    • Author(s)
      松尾翔吾、山田智明、加茂嵩史、舟窪浩、吉野正人、長﨑正雅
    • Organizer
      日本セラミックス協会第29回秋季シンポジウム
    • Place of Presentation
      広島大学 東広島キャンパス(広島県)
    • Year and Date
      2016-09-07
    • Related Report
      2016 Research-status Report
  • [Presentation] エピタキシャルおよび配向性YドープHfO2薄膜の強誘電性2016

    • Author(s)
      清水荘雄、片山きりは、三村和仙、木口賢紀、白石貴久、赤間章裕、今野豊彦、坂田修身、舟窪浩
    • Organizer
      日本セラミックス協会第29回秋季シンポジウム
    • Place of Presentation
      広島大学 東広島キャンパス(広島県)
    • Year and Date
      2016-09-07
    • Related Report
      2016 Research-status Report
  • [Presentation] 配向制御したHfO2基強誘電体薄膜の作製と特性評価2016

    • Author(s)
      舟窪浩、清水荘雄、片山きりは、三村和仙
    • Organizer
      応用物理学会シリコンテクノロジー分科会 第192回研究集会
    • Place of Presentation
      キャンパス・イノベーションセンター東京(東京都)
    • Year and Date
      2016-06-29
    • Related Report
      2016 Research-status Report
  • [Book] HfO2系強誘電体薄膜研究の最近の進展2016

    • Author(s)
      清水荘雄、舟窪浩
    • Total Pages
      5
    • Publisher
      工業製品技術協会(株式会社テクノプラザ)
    • Related Report
      2016 Research-status Report
  • [Remarks] 東京工業大学 物質理工学院 材料系 材料コース 舟窪研究室

    • URL

      http://f-lab.iem.titech.ac.jp/f-lab.htm

    • Related Report
      2017 Annual Research Report
  • [Remarks] 名古屋大学工学研究科 長崎研究室

    • URL

      http://enemat.nucl.nagoya-u.ac.jp/

    • Related Report
      2017 Annual Research Report
  • [Remarks] 東京工業大学 物質理工学院 材料系材料コース 舟窪研究室

    • URL

      http://f-lab.iem.titech.ac.jp/f-lab.htm

    • Related Report
      2016 Research-status Report
  • [Patent(Industrial Property Rights)] 強誘電性エピタキシャル薄膜、電子素子及び製造方法2017

    • Inventor(s)
      清水 荘雄、舟窪 浩、片山きりは、三村和仙
    • Industrial Property Rights Holder
      清水 荘雄、舟窪 浩、片山きりは、三村和仙
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2016-545654
    • Filing Date
      2017-02-16
    • Related Report
      2016 Research-status Report

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Published: 2016-04-21   Modified: 2019-03-29  

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