| Project/Area Number |
16K17500
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Multi-year Fund |
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| Research Field |
Nano/Microsystems
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| Research Institution | Tohoku University |
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Principal Investigator |
Yoshida Shinya 東北大学, 工学研究科, 特任准教授 (30509691)
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| Project Period (FY) |
2016-04-01 – 2018-03-31
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| Project Status |
Completed (Fiscal Year 2017)
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| Budget Amount *help |
¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2017: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Fiscal Year 2016: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
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| Keywords | チタン酸ジルコン酸鉛(PZT) / 超音波トランスデューサ / pMUT / 圧電MEMS / 圧電ＭＥＭＳ / レンジファインダー / ｐＭＵＴ / マイクロ・ナノデバイス / 先端機能デバイス / 電子・電気材料 / 電子デバイス・機器 / デバイス設計・製造プロセス |
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| Outline of Final Research Achievements |
The purpose of this study is to create a compact-size ultrasonic rangefinder with a capability of long range finding for applications to a robot system although the device utilizes a piezoelectric thin film and is driven by low driving voltage such as <3.3 V. We developed essential technologies and performed demonstration experiments as follows. (1) Fabrication of a crack-free and ultrahigh-performance PZT-based monocrystalline thin film on Si, (2) Development of a metallic epitaxial buffer layer structure for PZT, (3) Construction of theory for maximizing a signal-to-noise ratio of piezoelectric micromachined ultrasonic transducer (pMUT), (4) Prototyping of a pMUT rangefinder based on this PZT film and demonstration of its high-performance range-finding ability.
As a result, we successfully verified that this pMUT rangefinder has the potency to realize a small and cheap proximity sensor module and/or sonar system for safety operation of a robot.
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