| Project/Area Number |
16K18031
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Multi-year Fund |
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| Research Field |
Thermal engineering
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| Research Institution | Kyushu Institute of Technology |
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Principal Investigator |
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| Project Period (FY) |
2016-04-01 – 2018-03-31
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| Project Status |
Completed (Fiscal Year 2017)
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| Budget Amount *help |
¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2017: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2016: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
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| Keywords | 熱伝導 / 薄膜 / 表面フォノンポラリトン / ３オメガ法 / 熱伝導率 / 誘電体 / ガラス薄膜 / 減衰全反射 / 反射率測定 / マイクロ・ナノデバイス |
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| Outline of Final Research Achievements |
We fabricated Silicon dioxide free standing thin films with 100-200nm thickness by using standard micro-fabrication processes. The in-plane thermal conductivities of the thin films were measured by 3 omega method, and their thermal conductivities (1.5-2.0 W/(m・K)) were slightly higher than that of a bulk material (1.38 W/(m・K)). However, the enhancement of thermal conductivity by surface phonon polaritons were not clearly confirmed because the thickness of the fabricated films was thicker than 100nm in the present study. The enhancement of heat conduction by surface phonon polaritons were predicted for only thin films with less than 100nm thickness. We established the method for the research about thermal transport enhancement in thin film by surface phonon polaritons.
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