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Absolute evaluation of a probe-tip shape for the reduction of uncertainty of linewidth calibration using an AFM

Research Project

Project/Area Number 16K18119
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Measurement engineering
Research InstitutionNational Institute of Advanced Industrial Science and Technology

Principal Investigator

Kizu Ryosuke  国立研究開発法人産業技術総合研究所, 計量標準総合センター, 研究員 (40760294)

Project Period (FY) 2016-04-01 – 2019-03-31
Project Status Completed (Fiscal Year 2018)
Budget Amount *help
¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2018: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2017: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2016: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
Keywords原子間力顕微鏡(AFM) / 線幅校正 / ナノ計測 / 不確かさ / 原子間力顕微鏡(AFM) / 線幅 / 原子間力顕微鏡 / AFM / 走査プローブ顕微鏡
Outline of Final Research Achievements

We developed a technique for correcting the probe-tip width from the result of linewidth measurement for reducing measurement uncertainty of linewidth calibration of nanoscale semiconductor line pattern using an AFM. The expanded uncertainty (a coverage factor: k=2) of the measured value was reduced from 13 nm, which is the previous value, to 1.0 nm. The reduction of the uncertainty related to tip convolution was greatly contributed to the reduction of the expanded uncertainty of linewidth calibration.

Academic Significance and Societal Importance of the Research Achievements

半導体デバイス製造において、微細加工技術で作製されたナノ構造の形状計測はデバイス性能や製造歩留まりの向上に欠かせない。また、計測装置間の結果のずれを防ぐためには、正確な(長さ標準にトレーサブルな)計測が重要となる。本研究では、半導体ラインパターンの代表的な形状評価パラメータである線幅を精密・正確に計測するために、AFM探針形状を高精度に補正する技術を開発した。その結果、微小なラインパターン線幅を拡張不確かさ1.0 nmで校正することが可能になった。

Report

(4 results)
  • 2018 Annual Research Report   Final Research Report ( PDF )
  • 2017 Research-status Report
  • 2016 Research-status Report
  • Research Products

    (7 results)

All 2019 2018 2017

All Journal Article (3 results) (of which Peer Reviewed: 2 results) Presentation (3 results) (of which Int'l Joint Research: 1 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] Accurate vertical sidewall measurement by a metrological tilting-AFM for reference metrology of line edge roughness2019

    • Author(s)
      Kizu Ryosuke、Misumi Ichiko、Hirai Akiko、Gonda Satoshi
    • Journal Title

      Proc. of SPIE

      Volume: 10959 Pages: 82-82

    • DOI

      10.1117/12.2511712

    • Related Report
      2018 Annual Research Report
  • [Journal Article] Linewidth calibration using a metrological atomic force microscope with a tip-tilting mechanism2018

    • Author(s)
      Kizu Ryosuke、Misumi Ichiko、Hirai Akiko、Kinoshita Kazuto、Gonda Satoshi
    • Journal Title

      Measurement Science and Technology

      Volume: 30 Issue: 1 Pages: 015004-015004

    • DOI

      10.1088/1361-6501/aaf02a

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Development of a metrological atomic force microscope with a tip-tilting mechanism for 3D nanometrology2018

    • Author(s)
      Kizu Ryosuke、Misumi Ichiko、Hirai Akiko、Kinoshita Kazuto、Gonda Satoshi
    • Journal Title

      Measurement Science and Technology

      Volume: 印刷中 Issue: 7 Pages: 075005-075005

    • DOI

      10.1088/1361-6501/aabe1a

    • Related Report
      2017 Research-status Report
    • Peer Reviewed
  • [Presentation] Accurate vertical sidewall measurement by a metrological tilting-AFM for reference metrology of line edge roughness2019

    • Author(s)
      Kizu Ryosuke、Misumi Ichiko、Hirai Akiko、Gonda Satoshi
    • Organizer
      SPIE Advanced Lithography 2019
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 傾斜探針型測長AFMによる線幅計測における実効探針幅の補正2017

    • Author(s)
      木津良祐、三隅伊知子、平井亜紀子、木下和人、権太聡
    • Organizer
      精密工学会
    • Place of Presentation
      慶應義塾大学(神奈川県)
    • Year and Date
      2017-03-15
    • Related Report
      2016 Research-status Report
  • [Presentation] 走査型プローブ顕微鏡像のドリフト補正2017

    • Author(s)
      木津 良祐、三隅 伊知子、平井 亜紀子、権太 聡
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Research-status Report
  • [Patent(Industrial Property Rights)] 走査型プローブ顕微鏡のドリフト補正方法及びドリフト補正機能を備えた走査型プローブ顕微鏡2017

    • Inventor(s)
      木津 良祐
    • Industrial Property Rights Holder
      国立研究開発法人産業技術総合研究所
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2017-154999
    • Filing Date
      2017
    • Related Report
      2017 Research-status Report

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Published: 2016-04-21   Modified: 2020-03-30  

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